10/4/2011	11:56:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2011	11:56:32 AM	Recipe started at 11:56 AM
10/4/2011	11:56:32 AM	Helium valve closed
10/4/2011	11:56:32 AM	H2 valve closed
10/4/2011	11:56:32 AM	BCl3 valve closed
10/4/2011	11:56:32 AM	PH3 valve closed
10/4/2011	11:56:32 AM	SiCl4 pre valve closed
10/4/2011	11:56:32 AM	SiCl4 post valve closed
10/4/2011	11:56:32 AM	Main Vac valve closed
10/4/2011	11:56:32 AM	Bypass valve closed
10/4/2011	11:56:32 AM	Bubbler valve closed
10/4/2011	11:56:32 AM	Helium MFC set to  0.000000
10/4/2011	11:56:32 AM	H2 MFC set to  0.000000
10/4/2011	11:56:32 AM	BCl3 MFC set to  0.000000
10/4/2011	11:56:32 AM	PHl3 MFC set to  0.000000
10/4/2011	11:56:32 AM	SiCl4 MFC set to  0.000000
10/4/2011	11:56:32 AM	Bypass solenoid MFC set to  0.000000
10/4/2011	11:56:33 AM	Tube furnace set to 0
10/4/2011	11:56:36 AM	H2 valve closed
10/4/2011	11:56:36 AM	BCl3 valve closed
10/4/2011	11:56:36 AM	PH3 valve closed
10/4/2011	11:56:36 AM	SiCl4 pre valve closed
10/4/2011	11:56:36 AM	SiCl4 post valve closed
10/4/2011	11:56:36 AM	Main Vac valve closed
10/4/2011	11:56:36 AM	Bypass valve closed
10/4/2011	11:56:36 AM	Bubbler valve closed
10/4/2011	11:56:36 AM	Helium valve opened
10/4/2011	11:56:36 AM	Helium MFC set to  500.000000
10/4/2011	11:56:36 AM	H2 MFC set to  0.000000
10/4/2011	11:56:36 AM	BCl3 MFC set to  0.000000
10/4/2011	11:56:36 AM	PHl3 MFC set to  0.000000
10/4/2011	11:56:36 AM	SiCl4 MFC set to  0.000000
10/4/2011	11:56:36 AM	Bypass solenoid MFC set to  0.000000
10/4/2011	11:56:36 AM	Tube furnace set to 0
10/4/2011	11:57:42 AM	Helium valve closed
10/4/2011	11:57:42 AM	H2 valve closed
10/4/2011	11:57:42 AM	BCl3 valve closed
10/4/2011	11:57:42 AM	PH3 valve closed
10/4/2011	11:57:42 AM	SiCl4 pre valve closed
10/4/2011	11:57:42 AM	SiCl4 post valve closed
10/4/2011	11:57:42 AM	Main Vac valve closed
10/4/2011	11:57:42 AM	Bypass valve closed
10/4/2011	11:57:42 AM	Bubbler valve closed
10/4/2011	11:57:42 AM	Helium MFC set to  0.000000
10/4/2011	11:57:42 AM	H2 MFC set to  0.000000
10/4/2011	11:57:42 AM	BCl3 MFC set to  0.000000
10/4/2011	11:57:42 AM	PHl3 MFC set to  0.000000
10/4/2011	11:57:42 AM	SiCl4 MFC set to  0.000000
10/4/2011	11:57:42 AM	Bypass solenoid MFC set to  0.000000
10/4/2011	11:57:42 AM	Tube furnace set to 0
10/4/2011	11:57:43 AM	Run finished at 11:57 AM
10/4/2011	11:57:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2011	12:01:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2011	12:01:29 PM	Recipe started at 12:01 PM
10/4/2011	12:01:29 PM	Helium valve closed
10/4/2011	12:01:29 PM	H2 valve closed
10/4/2011	12:01:29 PM	BCl3 valve closed
10/4/2011	12:01:29 PM	PH3 valve closed
10/4/2011	12:01:29 PM	SiCl4 pre valve closed
10/4/2011	12:01:29 PM	SiCl4 post valve closed
10/4/2011	12:01:29 PM	Main Vac valve closed
10/4/2011	12:01:29 PM	Bubbler valve closed
10/4/2011	12:01:29 PM	Bypass valve opened
10/4/2011	12:01:29 PM	Helium MFC set to  0.000000
10/4/2011	12:01:29 PM	H2 MFC set to  0.000000
10/4/2011	12:01:29 PM	BCl3 MFC set to  0.000000
10/4/2011	12:01:29 PM	PHl3 MFC set to  0.000000
10/4/2011	12:01:29 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:01:29 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:01:30 PM	Tube furnace set to 0
10/4/2011	12:02:39 PM	Helium valve closed
10/4/2011	12:02:39 PM	H2 valve closed
10/4/2011	12:02:39 PM	BCl3 valve closed
10/4/2011	12:02:39 PM	PH3 valve closed
10/4/2011	12:02:39 PM	SiCl4 pre valve closed
10/4/2011	12:02:39 PM	SiCl4 post valve closed
10/4/2011	12:02:39 PM	Main Vac valve closed
10/4/2011	12:02:39 PM	Bubbler valve closed
10/4/2011	12:02:39 PM	Bypass valve opened
10/4/2011	12:02:39 PM	Helium MFC set to  0.000000
10/4/2011	12:02:39 PM	H2 MFC set to  0.000000
10/4/2011	12:02:39 PM	BCl3 MFC set to  0.000000
10/4/2011	12:02:39 PM	PHl3 MFC set to  0.000000
10/4/2011	12:02:39 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:02:39 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:02:39 PM	Tube furnace set to 0
10/4/2011	12:03:01 PM	Helium valve closed
10/4/2011	12:03:01 PM	H2 valve closed
10/4/2011	12:03:01 PM	BCl3 valve closed
10/4/2011	12:03:02 PM	PH3 valve closed
10/4/2011	12:03:02 PM	SiCl4 pre valve closed
10/4/2011	12:03:02 PM	SiCl4 post valve closed
10/4/2011	12:03:02 PM	Bypass valve closed
10/4/2011	12:03:02 PM	Bubbler valve closed
10/4/2011	12:03:02 PM	Main Vac valve opened
10/4/2011	12:03:02 PM	Helium MFC set to  0.000000
10/4/2011	12:03:02 PM	H2 MFC set to  0.000000
10/4/2011	12:03:02 PM	BCl3 MFC set to  0.000000
10/4/2011	12:03:02 PM	PHl3 MFC set to  0.000000
10/4/2011	12:03:02 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:03:02 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:03:02 PM	Tube furnace set to 0
10/4/2011	12:03:03 PM	Run finished at 12:03 PM
10/4/2011	12:03:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2011	12:03:50 PM	Recipe started at 12:03 PM
10/4/2011	12:03:50 PM	Helium valve closed
10/4/2011	12:03:50 PM	H2 valve closed
10/4/2011	12:03:50 PM	BCl3 valve closed
10/4/2011	12:03:50 PM	PH3 valve closed
10/4/2011	12:03:50 PM	SiCl4 pre valve closed
10/4/2011	12:03:50 PM	SiCl4 post valve closed
10/4/2011	12:03:50 PM	Main Vac valve closed
10/4/2011	12:03:50 PM	Bubbler valve closed
10/4/2011	12:03:50 PM	Bypass valve opened
10/4/2011	12:03:50 PM	Helium MFC set to  0.000000
10/4/2011	12:03:50 PM	H2 MFC set to  0.000000
10/4/2011	12:03:50 PM	BCl3 MFC set to  0.000000
10/4/2011	12:03:50 PM	PHl3 MFC set to  0.000000
10/4/2011	12:03:50 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:03:50 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:03:50 PM	Tube furnace set to 150
10/4/2011	12:03:51 PM	Helium valve closed
10/4/2011	12:03:51 PM	H2 valve closed
10/4/2011	12:03:51 PM	BCl3 valve closed
10/4/2011	12:03:51 PM	PH3 valve closed
10/4/2011	12:03:51 PM	SiCl4 pre valve closed
10/4/2011	12:03:51 PM	SiCl4 post valve closed
10/4/2011	12:03:51 PM	Main Vac valve closed
10/4/2011	12:03:51 PM	Bubbler valve closed
10/4/2011	12:03:51 PM	Bypass valve opened
10/4/2011	12:03:51 PM	Helium MFC set to  0.000000
10/4/2011	12:03:51 PM	H2 MFC set to  0.000000
10/4/2011	12:03:51 PM	BCl3 MFC set to  0.000000
10/4/2011	12:03:51 PM	PHl3 MFC set to  0.000000
10/4/2011	12:03:51 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:03:51 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:03:51 PM	Tube furnace set to 150
10/4/2011	12:04:21 PM	Helium valve closed
10/4/2011	12:04:21 PM	H2 valve closed
10/4/2011	12:04:21 PM	BCl3 valve closed
10/4/2011	12:04:21 PM	PH3 valve closed
10/4/2011	12:04:21 PM	SiCl4 pre valve closed
10/4/2011	12:04:21 PM	SiCl4 post valve closed
10/4/2011	12:04:21 PM	Bypass valve closed
10/4/2011	12:04:21 PM	Bubbler valve closed
10/4/2011	12:04:21 PM	Main Vac valve opened
10/4/2011	12:04:21 PM	Helium MFC set to  0.000000
10/4/2011	12:04:21 PM	H2 MFC set to  0.000000
10/4/2011	12:04:21 PM	BCl3 MFC set to  0.000000
10/4/2011	12:04:21 PM	PHl3 MFC set to  0.000000
10/4/2011	12:04:21 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:04:21 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:04:21 PM	Tube furnace set to 150
10/4/2011	12:04:51 PM	H2 valve closed
10/4/2011	12:04:51 PM	BCl3 valve closed
10/4/2011	12:04:51 PM	PH3 valve closed
10/4/2011	12:04:51 PM	SiCl4 pre valve closed
10/4/2011	12:04:51 PM	SiCl4 post valve closed
10/4/2011	12:04:51 PM	Bypass valve closed
10/4/2011	12:04:51 PM	Bubbler valve closed
10/4/2011	12:04:51 PM	Helium valve opened
10/4/2011	12:04:51 PM	Main Vac valve opened
10/4/2011	12:04:51 PM	Helium MFC set to  20.000000
10/4/2011	12:04:51 PM	H2 MFC set to  0.000000
10/4/2011	12:04:51 PM	BCl3 MFC set to  0.000000
10/4/2011	12:04:51 PM	PHl3 MFC set to  0.000000
10/4/2011	12:04:51 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:04:51 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:04:51 PM	Tube furnace set to 150
10/4/2011	12:05:21 PM	Helium valve closed
10/4/2011	12:05:21 PM	H2 valve closed
10/4/2011	12:05:21 PM	BCl3 valve closed
10/4/2011	12:05:21 PM	PH3 valve closed
10/4/2011	12:05:21 PM	SiCl4 pre valve closed
10/4/2011	12:05:21 PM	SiCl4 post valve closed
10/4/2011	12:05:21 PM	Bypass valve closed
10/4/2011	12:05:21 PM	Bubbler valve closed
10/4/2011	12:05:21 PM	Main Vac valve opened
10/4/2011	12:05:21 PM	Helium MFC set to  0.000000
10/4/2011	12:05:21 PM	H2 MFC set to  0.000000
10/4/2011	12:05:21 PM	BCl3 MFC set to  0.000000
10/4/2011	12:05:21 PM	PHl3 MFC set to  0.000000
10/4/2011	12:05:21 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:05:21 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:05:21 PM	Tube furnace set to 150
10/4/2011	12:05:51 PM	H2 valve closed
10/4/2011	12:05:51 PM	BCl3 valve closed
10/4/2011	12:05:51 PM	PH3 valve closed
10/4/2011	12:05:51 PM	SiCl4 pre valve closed
10/4/2011	12:05:51 PM	SiCl4 post valve closed
10/4/2011	12:05:51 PM	Bypass valve closed
10/4/2011	12:05:51 PM	Bubbler valve closed
10/4/2011	12:05:51 PM	Helium valve opened
10/4/2011	12:05:51 PM	Main Vac valve opened
10/4/2011	12:05:51 PM	Helium MFC set to  20.000000
10/4/2011	12:05:51 PM	H2 MFC set to  0.000000
10/4/2011	12:05:51 PM	BCl3 MFC set to  0.000000
10/4/2011	12:05:51 PM	PHl3 MFC set to  0.000000
10/4/2011	12:05:51 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:05:51 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:05:52 PM	Tube furnace set to 150
10/4/2011	12:06:22 PM	Helium valve closed
10/4/2011	12:06:22 PM	H2 valve closed
10/4/2011	12:06:22 PM	BCl3 valve closed
10/4/2011	12:06:22 PM	PH3 valve closed
10/4/2011	12:06:22 PM	SiCl4 pre valve closed
10/4/2011	12:06:22 PM	SiCl4 post valve closed
10/4/2011	12:06:22 PM	Bypass valve closed
10/4/2011	12:06:22 PM	Bubbler valve closed
10/4/2011	12:06:22 PM	Main Vac valve opened
10/4/2011	12:06:22 PM	Helium MFC set to  0.000000
10/4/2011	12:06:22 PM	H2 MFC set to  0.000000
10/4/2011	12:06:22 PM	BCl3 MFC set to  0.000000
10/4/2011	12:06:22 PM	PHl3 MFC set to  0.000000
10/4/2011	12:06:22 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:06:22 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:06:22 PM	Tube furnace set to 150
10/4/2011	12:06:52 PM	H2 valve closed
10/4/2011	12:06:52 PM	BCl3 valve closed
10/4/2011	12:06:52 PM	PH3 valve closed
10/4/2011	12:06:52 PM	SiCl4 pre valve closed
10/4/2011	12:06:52 PM	SiCl4 post valve closed
10/4/2011	12:06:52 PM	Bypass valve closed
10/4/2011	12:06:52 PM	Bubbler valve closed
10/4/2011	12:06:52 PM	Helium valve opened
10/4/2011	12:06:52 PM	Main Vac valve opened
10/4/2011	12:06:52 PM	Helium MFC set to  20.000000
10/4/2011	12:06:52 PM	H2 MFC set to  0.000000
10/4/2011	12:06:52 PM	BCl3 MFC set to  0.000000
10/4/2011	12:06:52 PM	PHl3 MFC set to  0.000000
10/4/2011	12:06:52 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:06:52 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:06:52 PM	Tube furnace set to 150
10/4/2011	12:07:22 PM	Helium valve closed
10/4/2011	12:07:22 PM	H2 valve closed
10/4/2011	12:07:22 PM	BCl3 valve closed
10/4/2011	12:07:22 PM	PH3 valve closed
10/4/2011	12:07:22 PM	SiCl4 pre valve closed
10/4/2011	12:07:22 PM	SiCl4 post valve closed
10/4/2011	12:07:22 PM	Bypass valve closed
10/4/2011	12:07:22 PM	Bubbler valve closed
10/4/2011	12:07:22 PM	Main Vac valve opened
10/4/2011	12:07:22 PM	Helium MFC set to  0.000000
10/4/2011	12:07:22 PM	H2 MFC set to  0.000000
10/4/2011	12:07:22 PM	BCl3 MFC set to  0.000000
10/4/2011	12:07:22 PM	PHl3 MFC set to  0.000000
10/4/2011	12:07:22 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:07:22 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:07:22 PM	Tube furnace set to 150
10/4/2011	12:07:52 PM	H2 valve closed
10/4/2011	12:07:52 PM	BCl3 valve closed
10/4/2011	12:07:52 PM	PH3 valve closed
10/4/2011	12:07:52 PM	SiCl4 pre valve closed
10/4/2011	12:07:52 PM	SiCl4 post valve closed
10/4/2011	12:07:52 PM	Bypass valve closed
10/4/2011	12:07:52 PM	Bubbler valve closed
10/4/2011	12:07:52 PM	Helium valve opened
10/4/2011	12:07:52 PM	Main Vac valve opened
10/4/2011	12:07:52 PM	Helium MFC set to  20.000000
10/4/2011	12:07:52 PM	H2 MFC set to  0.000000
10/4/2011	12:07:52 PM	BCl3 MFC set to  0.000000
10/4/2011	12:07:52 PM	PHl3 MFC set to  0.000000
10/4/2011	12:07:52 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:07:52 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:07:52 PM	Tube furnace set to 150
10/4/2011	12:08:22 PM	Helium valve closed
10/4/2011	12:08:22 PM	H2 valve closed
10/4/2011	12:08:22 PM	BCl3 valve closed
10/4/2011	12:08:22 PM	PH3 valve closed
10/4/2011	12:08:22 PM	SiCl4 pre valve closed
10/4/2011	12:08:22 PM	SiCl4 post valve closed
10/4/2011	12:08:22 PM	Bypass valve closed
10/4/2011	12:08:22 PM	Bubbler valve closed
10/4/2011	12:08:22 PM	Main Vac valve opened
10/4/2011	12:08:22 PM	Helium MFC set to  0.000000
10/4/2011	12:08:22 PM	H2 MFC set to  0.000000
10/4/2011	12:08:22 PM	BCl3 MFC set to  0.000000
10/4/2011	12:08:22 PM	PHl3 MFC set to  0.000000
10/4/2011	12:08:22 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:08:22 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:08:23 PM	Tube furnace set to 150
10/4/2011	12:08:53 PM	H2 valve closed
10/4/2011	12:08:53 PM	BCl3 valve closed
10/4/2011	12:08:53 PM	PH3 valve closed
10/4/2011	12:08:53 PM	SiCl4 pre valve closed
10/4/2011	12:08:53 PM	SiCl4 post valve closed
10/4/2011	12:08:53 PM	Bypass valve closed
10/4/2011	12:08:53 PM	Bubbler valve closed
10/4/2011	12:08:53 PM	Helium valve opened
10/4/2011	12:08:53 PM	Main Vac valve opened
10/4/2011	12:08:53 PM	Helium MFC set to  20.000000
10/4/2011	12:08:53 PM	H2 MFC set to  0.000000
10/4/2011	12:08:53 PM	BCl3 MFC set to  0.000000
10/4/2011	12:08:53 PM	PHl3 MFC set to  0.000000
10/4/2011	12:08:53 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:08:53 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:08:53 PM	Tube furnace set to 150
10/4/2011	12:09:23 PM	Helium valve closed
10/4/2011	12:09:23 PM	H2 valve closed
10/4/2011	12:09:23 PM	BCl3 valve closed
10/4/2011	12:09:23 PM	PH3 valve closed
10/4/2011	12:09:23 PM	SiCl4 pre valve closed
10/4/2011	12:09:23 PM	SiCl4 post valve closed
10/4/2011	12:09:23 PM	Bypass valve closed
10/4/2011	12:09:23 PM	Bubbler valve closed
10/4/2011	12:09:23 PM	Main Vac valve opened
10/4/2011	12:09:23 PM	Helium MFC set to  0.000000
10/4/2011	12:09:23 PM	H2 MFC set to  0.000000
10/4/2011	12:09:23 PM	BCl3 MFC set to  0.000000
10/4/2011	12:09:23 PM	PHl3 MFC set to  0.000000
10/4/2011	12:09:23 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:09:23 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:09:23 PM	Tube furnace set to 150
10/4/2011	12:09:53 PM	H2 valve closed
10/4/2011	12:09:53 PM	BCl3 valve closed
10/4/2011	12:09:53 PM	PH3 valve closed
10/4/2011	12:09:53 PM	SiCl4 pre valve closed
10/4/2011	12:09:53 PM	SiCl4 post valve closed
10/4/2011	12:09:53 PM	Bypass valve closed
10/4/2011	12:09:53 PM	Bubbler valve closed
10/4/2011	12:09:53 PM	Helium valve opened
10/4/2011	12:09:53 PM	Main Vac valve opened
10/4/2011	12:09:53 PM	Helium MFC set to  20.000000
10/4/2011	12:09:53 PM	H2 MFC set to  0.000000
10/4/2011	12:09:53 PM	BCl3 MFC set to  0.000000
10/4/2011	12:09:53 PM	PHl3 MFC set to  0.000000
10/4/2011	12:09:53 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:09:53 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:09:53 PM	Tube furnace set to 150
10/4/2011	12:10:23 PM	Helium valve closed
10/4/2011	12:10:23 PM	H2 valve closed
10/4/2011	12:10:23 PM	BCl3 valve closed
10/4/2011	12:10:23 PM	PH3 valve closed
10/4/2011	12:10:23 PM	SiCl4 pre valve closed
10/4/2011	12:10:23 PM	SiCl4 post valve closed
10/4/2011	12:10:23 PM	Bypass valve closed
10/4/2011	12:10:23 PM	Bubbler valve closed
10/4/2011	12:10:23 PM	Main Vac valve opened
10/4/2011	12:10:23 PM	Helium MFC set to  0.000000
10/4/2011	12:10:23 PM	H2 MFC set to  0.000000
10/4/2011	12:10:23 PM	BCl3 MFC set to  0.000000
10/4/2011	12:10:23 PM	PHl3 MFC set to  0.000000
10/4/2011	12:10:23 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:10:23 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:10:23 PM	Tube furnace set to 150
10/4/2011	12:10:53 PM	H2 valve closed
10/4/2011	12:10:53 PM	BCl3 valve closed
10/4/2011	12:10:53 PM	PH3 valve closed
10/4/2011	12:10:53 PM	SiCl4 pre valve closed
10/4/2011	12:10:53 PM	SiCl4 post valve closed
10/4/2011	12:10:53 PM	Bypass valve closed
10/4/2011	12:10:53 PM	Bubbler valve closed
10/4/2011	12:10:53 PM	Helium valve opened
10/4/2011	12:10:53 PM	Main Vac valve opened
10/4/2011	12:10:53 PM	Helium MFC set to  20.000000
10/4/2011	12:10:53 PM	H2 MFC set to  0.000000
10/4/2011	12:10:53 PM	BCl3 MFC set to  0.000000
10/4/2011	12:10:53 PM	PHl3 MFC set to  0.000000
10/4/2011	12:10:53 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:10:53 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:10:54 PM	Tube furnace set to 150
10/4/2011	12:11:24 PM	Helium valve closed
10/4/2011	12:11:24 PM	H2 valve closed
10/4/2011	12:11:24 PM	BCl3 valve closed
10/4/2011	12:11:24 PM	PH3 valve closed
10/4/2011	12:11:24 PM	SiCl4 pre valve closed
10/4/2011	12:11:24 PM	SiCl4 post valve closed
10/4/2011	12:11:24 PM	Bypass valve closed
10/4/2011	12:11:24 PM	Bubbler valve closed
10/4/2011	12:11:24 PM	Main Vac valve opened
10/4/2011	12:11:24 PM	Helium MFC set to  0.000000
10/4/2011	12:11:24 PM	H2 MFC set to  0.000000
10/4/2011	12:11:24 PM	BCl3 MFC set to  0.000000
10/4/2011	12:11:24 PM	PHl3 MFC set to  0.000000
10/4/2011	12:11:24 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:11:24 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:11:24 PM	Tube furnace set to 150
10/4/2011	12:11:54 PM	H2 valve closed
10/4/2011	12:11:54 PM	BCl3 valve closed
10/4/2011	12:11:54 PM	PH3 valve closed
10/4/2011	12:11:54 PM	SiCl4 pre valve closed
10/4/2011	12:11:54 PM	SiCl4 post valve closed
10/4/2011	12:11:54 PM	Bypass valve closed
10/4/2011	12:11:54 PM	Bubbler valve closed
10/4/2011	12:11:54 PM	Helium valve opened
10/4/2011	12:11:54 PM	Main Vac valve opened
10/4/2011	12:11:54 PM	Helium MFC set to  20.000000
10/4/2011	12:11:54 PM	H2 MFC set to  0.000000
10/4/2011	12:11:54 PM	BCl3 MFC set to  0.000000
10/4/2011	12:11:54 PM	PHl3 MFC set to  0.000000
10/4/2011	12:11:54 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:11:54 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:11:54 PM	Tube furnace set to 150
10/4/2011	12:12:24 PM	Helium valve closed
10/4/2011	12:12:24 PM	H2 valve closed
10/4/2011	12:12:24 PM	BCl3 valve closed
10/4/2011	12:12:24 PM	PH3 valve closed
10/4/2011	12:12:24 PM	SiCl4 pre valve closed
10/4/2011	12:12:24 PM	SiCl4 post valve closed
10/4/2011	12:12:24 PM	Bypass valve closed
10/4/2011	12:12:24 PM	Bubbler valve closed
10/4/2011	12:12:24 PM	Main Vac valve opened
10/4/2011	12:12:24 PM	Helium MFC set to  0.000000
10/4/2011	12:12:24 PM	H2 MFC set to  0.000000
10/4/2011	12:12:24 PM	BCl3 MFC set to  0.000000
10/4/2011	12:12:24 PM	PHl3 MFC set to  0.000000
10/4/2011	12:12:24 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:12:24 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:12:24 PM	Tube furnace set to 150
10/4/2011	12:12:54 PM	H2 valve closed
10/4/2011	12:12:54 PM	BCl3 valve closed
10/4/2011	12:12:54 PM	PH3 valve closed
10/4/2011	12:12:54 PM	SiCl4 pre valve closed
10/4/2011	12:12:54 PM	SiCl4 post valve closed
10/4/2011	12:12:54 PM	Bypass valve closed
10/4/2011	12:12:54 PM	Bubbler valve closed
10/4/2011	12:12:54 PM	Helium valve opened
10/4/2011	12:12:54 PM	Main Vac valve opened
10/4/2011	12:12:54 PM	Helium MFC set to  20.000000
10/4/2011	12:12:54 PM	H2 MFC set to  0.000000
10/4/2011	12:12:54 PM	BCl3 MFC set to  0.000000
10/4/2011	12:12:54 PM	PHl3 MFC set to  0.000000
10/4/2011	12:12:54 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:12:54 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:12:54 PM	Tube furnace set to 150
10/4/2011	12:13:24 PM	Helium valve closed
10/4/2011	12:13:24 PM	H2 valve closed
10/4/2011	12:13:24 PM	BCl3 valve closed
10/4/2011	12:13:24 PM	PH3 valve closed
10/4/2011	12:13:24 PM	SiCl4 pre valve closed
10/4/2011	12:13:24 PM	SiCl4 post valve closed
10/4/2011	12:13:24 PM	Bypass valve closed
10/4/2011	12:13:24 PM	Bubbler valve closed
10/4/2011	12:13:24 PM	Main Vac valve opened
10/4/2011	12:13:24 PM	Helium MFC set to  0.000000
10/4/2011	12:13:24 PM	H2 MFC set to  0.000000
10/4/2011	12:13:24 PM	BCl3 MFC set to  0.000000
10/4/2011	12:13:24 PM	PHl3 MFC set to  0.000000
10/4/2011	12:13:24 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:13:24 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:13:25 PM	Tube furnace set to 150
10/4/2011	12:13:55 PM	H2 valve closed
10/4/2011	12:13:55 PM	BCl3 valve closed
10/4/2011	12:13:55 PM	PH3 valve closed
10/4/2011	12:13:55 PM	SiCl4 pre valve closed
10/4/2011	12:13:55 PM	SiCl4 post valve closed
10/4/2011	12:13:55 PM	Bypass valve closed
10/4/2011	12:13:55 PM	Bubbler valve closed
10/4/2011	12:13:55 PM	Helium valve opened
10/4/2011	12:13:55 PM	Main Vac valve opened
10/4/2011	12:13:55 PM	Helium MFC set to  20.000000
10/4/2011	12:13:55 PM	H2 MFC set to  0.000000
10/4/2011	12:13:55 PM	BCl3 MFC set to  0.000000
10/4/2011	12:13:55 PM	PHl3 MFC set to  0.000000
10/4/2011	12:13:55 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:13:55 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:13:55 PM	Tube furnace set to 150
10/4/2011	12:14:25 PM	Helium valve closed
10/4/2011	12:14:25 PM	H2 valve closed
10/4/2011	12:14:25 PM	BCl3 valve closed
10/4/2011	12:14:25 PM	PH3 valve closed
10/4/2011	12:14:25 PM	SiCl4 pre valve closed
10/4/2011	12:14:25 PM	SiCl4 post valve closed
10/4/2011	12:14:25 PM	Bypass valve closed
10/4/2011	12:14:25 PM	Bubbler valve closed
10/4/2011	12:14:25 PM	Main Vac valve opened
10/4/2011	12:14:25 PM	Helium MFC set to  0.000000
10/4/2011	12:14:25 PM	H2 MFC set to  0.000000
10/4/2011	12:14:25 PM	BCl3 MFC set to  0.000000
10/4/2011	12:14:25 PM	PHl3 MFC set to  0.000000
10/4/2011	12:14:25 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:14:25 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:14:25 PM	Tube furnace set to 150
10/4/2011	12:14:55 PM	H2 valve closed
10/4/2011	12:14:55 PM	BCl3 valve closed
10/4/2011	12:14:55 PM	PH3 valve closed
10/4/2011	12:14:55 PM	SiCl4 pre valve closed
10/4/2011	12:14:55 PM	SiCl4 post valve closed
10/4/2011	12:14:55 PM	Bypass valve closed
10/4/2011	12:14:55 PM	Bubbler valve closed
10/4/2011	12:14:55 PM	Helium valve opened
10/4/2011	12:14:55 PM	Main Vac valve opened
10/4/2011	12:14:55 PM	Helium MFC set to  20.000000
10/4/2011	12:14:55 PM	H2 MFC set to  0.000000
10/4/2011	12:14:55 PM	BCl3 MFC set to  0.000000
10/4/2011	12:14:55 PM	PHl3 MFC set to  0.000000
10/4/2011	12:14:55 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:14:55 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:14:55 PM	Tube furnace set to 150
10/4/2011	12:15:25 PM	Helium valve closed
10/4/2011	12:15:25 PM	H2 valve closed
10/4/2011	12:15:25 PM	BCl3 valve closed
10/4/2011	12:15:25 PM	PH3 valve closed
10/4/2011	12:15:25 PM	SiCl4 pre valve closed
10/4/2011	12:15:25 PM	SiCl4 post valve closed
10/4/2011	12:15:25 PM	Bypass valve closed
10/4/2011	12:15:25 PM	Bubbler valve closed
10/4/2011	12:15:25 PM	Main Vac valve opened
10/4/2011	12:15:25 PM	Helium MFC set to  0.000000
10/4/2011	12:15:25 PM	H2 MFC set to  0.000000
10/4/2011	12:15:25 PM	BCl3 MFC set to  0.000000
10/4/2011	12:15:25 PM	PHl3 MFC set to  0.000000
10/4/2011	12:15:25 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:15:25 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:15:25 PM	Tube furnace set to 150
10/4/2011	12:15:55 PM	H2 valve closed
10/4/2011	12:15:55 PM	BCl3 valve closed
10/4/2011	12:15:55 PM	PH3 valve closed
10/4/2011	12:15:55 PM	SiCl4 pre valve closed
10/4/2011	12:15:55 PM	SiCl4 post valve closed
10/4/2011	12:15:55 PM	Bypass valve closed
10/4/2011	12:15:55 PM	Bubbler valve closed
10/4/2011	12:15:55 PM	Helium valve opened
10/4/2011	12:15:55 PM	Main Vac valve opened
10/4/2011	12:15:55 PM	Helium MFC set to  20.000000
10/4/2011	12:15:55 PM	H2 MFC set to  0.000000
10/4/2011	12:15:55 PM	BCl3 MFC set to  0.000000
10/4/2011	12:15:55 PM	PHl3 MFC set to  0.000000
10/4/2011	12:15:55 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:15:55 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:15:56 PM	Tube furnace set to 150
10/4/2011	12:16:26 PM	Helium valve closed
10/4/2011	12:16:26 PM	H2 valve closed
10/4/2011	12:16:26 PM	BCl3 valve closed
10/4/2011	12:16:26 PM	PH3 valve closed
10/4/2011	12:16:26 PM	SiCl4 pre valve closed
10/4/2011	12:16:26 PM	SiCl4 post valve closed
10/4/2011	12:16:26 PM	Bypass valve closed
10/4/2011	12:16:26 PM	Bubbler valve closed
10/4/2011	12:16:26 PM	Main Vac valve opened
10/4/2011	12:16:26 PM	Helium MFC set to  0.000000
10/4/2011	12:16:26 PM	H2 MFC set to  0.000000
10/4/2011	12:16:26 PM	BCl3 MFC set to  0.000000
10/4/2011	12:16:26 PM	PHl3 MFC set to  0.000000
10/4/2011	12:16:26 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:16:26 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:16:26 PM	Tube furnace set to 150
10/4/2011	12:16:56 PM	H2 valve closed
10/4/2011	12:16:56 PM	BCl3 valve closed
10/4/2011	12:16:56 PM	PH3 valve closed
10/4/2011	12:16:56 PM	SiCl4 pre valve closed
10/4/2011	12:16:56 PM	SiCl4 post valve closed
10/4/2011	12:16:56 PM	Bypass valve closed
10/4/2011	12:16:56 PM	Bubbler valve closed
10/4/2011	12:16:56 PM	Helium valve opened
10/4/2011	12:16:56 PM	Main Vac valve opened
10/4/2011	12:16:56 PM	Helium MFC set to  20.000000
10/4/2011	12:16:56 PM	H2 MFC set to  0.000000
10/4/2011	12:16:56 PM	BCl3 MFC set to  0.000000
10/4/2011	12:16:56 PM	PHl3 MFC set to  0.000000
10/4/2011	12:16:56 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:16:56 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:16:56 PM	Tube furnace set to 150
10/4/2011	12:17:26 PM	Helium valve closed
10/4/2011	12:17:26 PM	H2 valve closed
10/4/2011	12:17:26 PM	BCl3 valve closed
10/4/2011	12:17:26 PM	PH3 valve closed
10/4/2011	12:17:26 PM	SiCl4 pre valve closed
10/4/2011	12:17:26 PM	SiCl4 post valve closed
10/4/2011	12:17:26 PM	Bypass valve closed
10/4/2011	12:17:26 PM	Bubbler valve closed
10/4/2011	12:17:26 PM	Main Vac valve opened
10/4/2011	12:17:26 PM	Helium MFC set to  0.000000
10/4/2011	12:17:26 PM	H2 MFC set to  0.000000
10/4/2011	12:17:26 PM	BCl3 MFC set to  0.000000
10/4/2011	12:17:26 PM	PHl3 MFC set to  0.000000
10/4/2011	12:17:26 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:17:26 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:17:26 PM	Tube furnace set to 150
10/4/2011	12:17:56 PM	H2 valve closed
10/4/2011	12:17:56 PM	BCl3 valve closed
10/4/2011	12:17:56 PM	PH3 valve closed
10/4/2011	12:17:56 PM	SiCl4 pre valve closed
10/4/2011	12:17:56 PM	SiCl4 post valve closed
10/4/2011	12:17:56 PM	Bypass valve closed
10/4/2011	12:17:56 PM	Bubbler valve closed
10/4/2011	12:17:56 PM	Helium valve opened
10/4/2011	12:17:56 PM	Main Vac valve opened
10/4/2011	12:17:56 PM	Helium MFC set to  20.000000
10/4/2011	12:17:56 PM	H2 MFC set to  0.000000
10/4/2011	12:17:56 PM	BCl3 MFC set to  0.000000
10/4/2011	12:17:56 PM	PHl3 MFC set to  0.000000
10/4/2011	12:17:56 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:17:56 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:17:56 PM	Tube furnace set to 150
10/4/2011	12:18:26 PM	Helium valve closed
10/4/2011	12:18:26 PM	H2 valve closed
10/4/2011	12:18:26 PM	BCl3 valve closed
10/4/2011	12:18:27 PM	PH3 valve closed
10/4/2011	12:18:27 PM	SiCl4 pre valve closed
10/4/2011	12:18:27 PM	SiCl4 post valve closed
10/4/2011	12:18:27 PM	Bypass valve closed
10/4/2011	12:18:27 PM	Bubbler valve closed
10/4/2011	12:18:27 PM	Main Vac valve opened
10/4/2011	12:18:27 PM	Helium MFC set to  0.000000
10/4/2011	12:18:27 PM	H2 MFC set to  0.000000
10/4/2011	12:18:27 PM	BCl3 MFC set to  0.000000
10/4/2011	12:18:27 PM	PHl3 MFC set to  0.000000
10/4/2011	12:18:27 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:18:27 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:18:27 PM	Tube furnace set to 150
10/4/2011	12:18:57 PM	H2 valve closed
10/4/2011	12:18:57 PM	BCl3 valve closed
10/4/2011	12:18:57 PM	PH3 valve closed
10/4/2011	12:18:57 PM	SiCl4 pre valve closed
10/4/2011	12:18:57 PM	SiCl4 post valve closed
10/4/2011	12:18:57 PM	Bypass valve closed
10/4/2011	12:18:57 PM	Bubbler valve closed
10/4/2011	12:18:57 PM	Helium valve opened
10/4/2011	12:18:57 PM	Main Vac valve opened
10/4/2011	12:18:57 PM	Helium MFC set to  20.000000
10/4/2011	12:18:57 PM	H2 MFC set to  0.000000
10/4/2011	12:18:57 PM	BCl3 MFC set to  0.000000
10/4/2011	12:18:57 PM	PHl3 MFC set to  0.000000
10/4/2011	12:18:57 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:18:57 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:18:57 PM	Tube furnace set to 150
10/4/2011	12:19:27 PM	Helium valve closed
10/4/2011	12:19:27 PM	H2 valve closed
10/4/2011	12:19:27 PM	BCl3 valve closed
10/4/2011	12:19:27 PM	PH3 valve closed
10/4/2011	12:19:27 PM	SiCl4 pre valve closed
10/4/2011	12:19:27 PM	SiCl4 post valve closed
10/4/2011	12:19:27 PM	Bypass valve closed
10/4/2011	12:19:27 PM	Bubbler valve closed
10/4/2011	12:19:27 PM	Main Vac valve opened
10/4/2011	12:19:27 PM	Helium MFC set to  0.000000
10/4/2011	12:19:27 PM	H2 MFC set to  0.000000
10/4/2011	12:19:27 PM	BCl3 MFC set to  0.000000
10/4/2011	12:19:27 PM	PHl3 MFC set to  0.000000
10/4/2011	12:19:27 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:19:27 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:19:27 PM	Tube furnace set to 150
10/4/2011	12:19:57 PM	H2 valve closed
10/4/2011	12:19:57 PM	BCl3 valve closed
10/4/2011	12:19:57 PM	PH3 valve closed
10/4/2011	12:19:57 PM	SiCl4 pre valve closed
10/4/2011	12:19:57 PM	SiCl4 post valve closed
10/4/2011	12:19:57 PM	Bypass valve closed
10/4/2011	12:19:57 PM	Bubbler valve closed
10/4/2011	12:19:57 PM	Helium valve opened
10/4/2011	12:19:57 PM	Main Vac valve opened
10/4/2011	12:19:57 PM	Helium MFC set to  20.000000
10/4/2011	12:19:57 PM	H2 MFC set to  0.000000
10/4/2011	12:19:57 PM	BCl3 MFC set to  0.000000
10/4/2011	12:19:57 PM	PHl3 MFC set to  0.000000
10/4/2011	12:19:57 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:19:57 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:19:57 PM	Tube furnace set to 150
10/4/2011	12:20:27 PM	Helium valve closed
10/4/2011	12:20:27 PM	H2 valve closed
10/4/2011	12:20:27 PM	BCl3 valve closed
10/4/2011	12:20:27 PM	PH3 valve closed
10/4/2011	12:20:27 PM	SiCl4 pre valve closed
10/4/2011	12:20:27 PM	SiCl4 post valve closed
10/4/2011	12:20:27 PM	Bypass valve closed
10/4/2011	12:20:27 PM	Bubbler valve closed
10/4/2011	12:20:27 PM	Main Vac valve opened
10/4/2011	12:20:27 PM	Helium MFC set to  0.000000
10/4/2011	12:20:27 PM	H2 MFC set to  0.000000
10/4/2011	12:20:27 PM	BCl3 MFC set to  0.000000
10/4/2011	12:20:27 PM	PHl3 MFC set to  0.000000
10/4/2011	12:20:27 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:20:27 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:20:27 PM	Tube furnace set to 150
10/4/2011	12:20:58 PM	H2 valve closed
10/4/2011	12:20:58 PM	BCl3 valve closed
10/4/2011	12:20:58 PM	PH3 valve closed
10/4/2011	12:20:58 PM	SiCl4 pre valve closed
10/4/2011	12:20:58 PM	SiCl4 post valve closed
10/4/2011	12:20:58 PM	Bypass valve closed
10/4/2011	12:20:58 PM	Bubbler valve closed
10/4/2011	12:20:58 PM	Helium valve opened
10/4/2011	12:20:58 PM	Main Vac valve opened
10/4/2011	12:20:58 PM	Helium MFC set to  20.000000
10/4/2011	12:20:58 PM	H2 MFC set to  0.000000
10/4/2011	12:20:58 PM	BCl3 MFC set to  0.000000
10/4/2011	12:20:58 PM	PHl3 MFC set to  0.000000
10/4/2011	12:20:58 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:20:58 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:20:58 PM	Tube furnace set to 150
10/4/2011	12:21:28 PM	Helium valve closed
10/4/2011	12:21:28 PM	H2 valve closed
10/4/2011	12:21:28 PM	BCl3 valve closed
10/4/2011	12:21:28 PM	PH3 valve closed
10/4/2011	12:21:28 PM	SiCl4 pre valve closed
10/4/2011	12:21:28 PM	SiCl4 post valve closed
10/4/2011	12:21:28 PM	Bypass valve closed
10/4/2011	12:21:28 PM	Bubbler valve closed
10/4/2011	12:21:28 PM	Main Vac valve opened
10/4/2011	12:21:28 PM	Helium MFC set to  0.000000
10/4/2011	12:21:28 PM	H2 MFC set to  0.000000
10/4/2011	12:21:28 PM	BCl3 MFC set to  0.000000
10/4/2011	12:21:28 PM	PHl3 MFC set to  0.000000
10/4/2011	12:21:28 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:21:28 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:21:28 PM	Tube furnace set to 150
10/4/2011	12:21:58 PM	H2 valve closed
10/4/2011	12:21:58 PM	BCl3 valve closed
10/4/2011	12:21:58 PM	PH3 valve closed
10/4/2011	12:21:58 PM	SiCl4 pre valve closed
10/4/2011	12:21:58 PM	SiCl4 post valve closed
10/4/2011	12:21:58 PM	Bypass valve closed
10/4/2011	12:21:58 PM	Bubbler valve closed
10/4/2011	12:21:58 PM	Helium valve opened
10/4/2011	12:21:58 PM	Main Vac valve opened
10/4/2011	12:21:58 PM	Helium MFC set to  20.000000
10/4/2011	12:21:58 PM	H2 MFC set to  0.000000
10/4/2011	12:21:58 PM	BCl3 MFC set to  0.000000
10/4/2011	12:21:58 PM	PHl3 MFC set to  0.000000
10/4/2011	12:21:58 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:21:58 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:21:58 PM	Tube furnace set to 150
10/4/2011	12:22:28 PM	Helium valve closed
10/4/2011	12:22:28 PM	H2 valve closed
10/4/2011	12:22:28 PM	BCl3 valve closed
10/4/2011	12:22:28 PM	PH3 valve closed
10/4/2011	12:22:28 PM	SiCl4 pre valve closed
10/4/2011	12:22:28 PM	SiCl4 post valve closed
10/4/2011	12:22:28 PM	Bypass valve closed
10/4/2011	12:22:28 PM	Bubbler valve closed
10/4/2011	12:22:28 PM	Main Vac valve opened
10/4/2011	12:22:28 PM	Helium MFC set to  0.000000
10/4/2011	12:22:28 PM	H2 MFC set to  0.000000
10/4/2011	12:22:28 PM	BCl3 MFC set to  0.000000
10/4/2011	12:22:28 PM	PHl3 MFC set to  0.000000
10/4/2011	12:22:28 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:22:28 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:22:28 PM	Tube furnace set to 150
10/4/2011	12:22:58 PM	H2 valve closed
10/4/2011	12:22:58 PM	BCl3 valve closed
10/4/2011	12:22:58 PM	PH3 valve closed
10/4/2011	12:22:58 PM	SiCl4 pre valve closed
10/4/2011	12:22:58 PM	SiCl4 post valve closed
10/4/2011	12:22:58 PM	Bypass valve closed
10/4/2011	12:22:58 PM	Bubbler valve closed
10/4/2011	12:22:58 PM	Helium valve opened
10/4/2011	12:22:58 PM	Main Vac valve opened
10/4/2011	12:22:58 PM	Helium MFC set to  20.000000
10/4/2011	12:22:58 PM	H2 MFC set to  0.000000
10/4/2011	12:22:58 PM	BCl3 MFC set to  0.000000
10/4/2011	12:22:58 PM	PHl3 MFC set to  0.000000
10/4/2011	12:22:58 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:22:58 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:22:59 PM	Tube furnace set to 150
10/4/2011	12:23:29 PM	Helium valve closed
10/4/2011	12:23:29 PM	H2 valve closed
10/4/2011	12:23:29 PM	BCl3 valve closed
10/4/2011	12:23:29 PM	PH3 valve closed
10/4/2011	12:23:29 PM	SiCl4 pre valve closed
10/4/2011	12:23:29 PM	SiCl4 post valve closed
10/4/2011	12:23:29 PM	Bypass valve closed
10/4/2011	12:23:29 PM	Bubbler valve closed
10/4/2011	12:23:29 PM	Main Vac valve opened
10/4/2011	12:23:29 PM	Helium MFC set to  0.000000
10/4/2011	12:23:29 PM	H2 MFC set to  0.000000
10/4/2011	12:23:29 PM	BCl3 MFC set to  0.000000
10/4/2011	12:23:29 PM	PHl3 MFC set to  0.000000
10/4/2011	12:23:29 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:23:29 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:23:29 PM	Tube furnace set to 150
10/4/2011	12:23:59 PM	H2 valve closed
10/4/2011	12:23:59 PM	BCl3 valve closed
10/4/2011	12:23:59 PM	PH3 valve closed
10/4/2011	12:23:59 PM	SiCl4 pre valve closed
10/4/2011	12:23:59 PM	SiCl4 post valve closed
10/4/2011	12:23:59 PM	Bypass valve closed
10/4/2011	12:23:59 PM	Bubbler valve closed
10/4/2011	12:23:59 PM	Helium valve opened
10/4/2011	12:23:59 PM	Main Vac valve opened
10/4/2011	12:23:59 PM	Helium MFC set to  20.000000
10/4/2011	12:23:59 PM	H2 MFC set to  0.000000
10/4/2011	12:23:59 PM	BCl3 MFC set to  0.000000
10/4/2011	12:23:59 PM	PHl3 MFC set to  0.000000
10/4/2011	12:23:59 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:23:59 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:23:59 PM	Tube furnace set to 150
10/4/2011	12:24:29 PM	Helium valve closed
10/4/2011	12:24:29 PM	H2 valve closed
10/4/2011	12:24:29 PM	BCl3 valve closed
10/4/2011	12:24:29 PM	PH3 valve closed
10/4/2011	12:24:29 PM	SiCl4 pre valve closed
10/4/2011	12:24:29 PM	SiCl4 post valve closed
10/4/2011	12:24:29 PM	Bypass valve closed
10/4/2011	12:24:29 PM	Bubbler valve closed
10/4/2011	12:24:29 PM	Main Vac valve opened
10/4/2011	12:24:29 PM	Helium MFC set to  0.000000
10/4/2011	12:24:29 PM	H2 MFC set to  0.000000
10/4/2011	12:24:29 PM	BCl3 MFC set to  0.000000
10/4/2011	12:24:29 PM	PHl3 MFC set to  0.000000
10/4/2011	12:24:29 PM	SiCl4 MFC set to  0.000000
10/4/2011	12:24:29 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	12:24:29 PM	Tube furnace set to 180
10/4/2011	12:24:34 PM	Run finished at 12:24 PM
10/4/2011	1:11:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/4/2011	1:11:22 PM	Recipe started at 1:11 PM
10/4/2011	1:11:22 PM	Helium valve closed
10/4/2011	1:11:22 PM	H2 valve closed
10/4/2011	1:11:22 PM	BCl3 valve closed
10/4/2011	1:11:22 PM	PH3 valve closed
10/4/2011	1:11:22 PM	SiCl4 pre valve closed
10/4/2011	1:11:22 PM	SiCl4 post valve closed
10/4/2011	1:11:22 PM	Main Vac valve closed
10/4/2011	1:11:22 PM	Bubbler valve closed
10/4/2011	1:11:22 PM	Bypass valve opened
10/4/2011	1:11:22 PM	Helium MFC set to  0.000000
10/4/2011	1:11:22 PM	H2 MFC set to  0.000000
10/4/2011	1:11:22 PM	BCl3 MFC set to  0.000000
10/4/2011	1:11:22 PM	PHl3 MFC set to  0.000000
10/4/2011	1:11:22 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:11:22 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:11:23 PM	Tube furnace set to 0
10/4/2011	1:11:23 PM	Helium valve closed
10/4/2011	1:11:23 PM	H2 valve closed
10/4/2011	1:11:23 PM	BCl3 valve closed
10/4/2011	1:11:23 PM	PH3 valve closed
10/4/2011	1:11:23 PM	SiCl4 pre valve closed
10/4/2011	1:11:23 PM	SiCl4 post valve closed
10/4/2011	1:11:23 PM	Main Vac valve closed
10/4/2011	1:11:23 PM	Bubbler valve closed
10/4/2011	1:11:23 PM	Bypass valve opened
10/4/2011	1:11:23 PM	Helium MFC set to  0.000000
10/4/2011	1:11:23 PM	H2 MFC set to  0.000000
10/4/2011	1:11:23 PM	BCl3 MFC set to  0.000000
10/4/2011	1:11:23 PM	PHl3 MFC set to  0.000000
10/4/2011	1:11:23 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:11:23 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:11:23 PM	Tube furnace set to 0
10/4/2011	1:11:25 PM	Run aborted at 1:11 PM
10/4/2011	1:11:25 PM	Helium valve closed
10/4/2011	1:11:25 PM	H2 valve closed
10/4/2011	1:11:25 PM	BCl3 valve closed
10/4/2011	1:11:25 PM	PH3 valve closed
10/4/2011	1:11:26 PM	SiCl4 pre valve closed
10/4/2011	1:11:26 PM	SiCl4 post valve closed
10/4/2011	1:11:26 PM	Bypass valve closed
10/4/2011	1:11:26 PM	Main Vac valve closed
10/4/2011	1:11:26 PM	Bubbler valve closed
10/4/2011	1:11:26 PM	Helium MFC set to  0.000000
10/4/2011	1:11:26 PM	H2 MFC set to  0.000000
10/4/2011	1:11:26 PM	BCl3 MFC set to  0.000000
10/4/2011	1:11:26 PM	PHl3 MFC set to  0.000000
10/4/2011	1:11:26 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:11:26 PM	Tube furnace set to 0
10/4/2011	1:11:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/4/2011	1:11:30 PM	Main Vac valve opened
10/4/2011	1:13:26 PM	Main Vac valve closed
10/4/2011	1:13:32 PM	Main Vac valve opened
10/4/2011	1:14:22 PM	Recipe started at 1:14 PM
10/4/2011	1:14:22 PM	Helium valve closed
10/4/2011	1:14:22 PM	H2 valve closed
10/4/2011	1:14:22 PM	BCl3 valve closed
10/4/2011	1:14:22 PM	PH3 valve closed
10/4/2011	1:14:22 PM	SiCl4 pre valve closed
10/4/2011	1:14:22 PM	SiCl4 post valve closed
10/4/2011	1:14:22 PM	Main Vac valve closed
10/4/2011	1:14:22 PM	Bypass valve closed
10/4/2011	1:14:22 PM	Bubbler valve closed
10/4/2011	1:14:22 PM	Helium MFC set to  0.000000
10/4/2011	1:14:22 PM	H2 MFC set to  0.000000
10/4/2011	1:14:22 PM	BCl3 MFC set to  0.000000
10/4/2011	1:14:22 PM	PHl3 MFC set to  0.000000
10/4/2011	1:14:22 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:14:22 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:14:23 PM	Tube furnace set to 0
10/4/2011	1:14:26 PM	Helium valve closed
10/4/2011	1:14:26 PM	BCl3 valve closed
10/4/2011	1:14:26 PM	PH3 valve closed
10/4/2011	1:14:26 PM	SiCl4 pre valve closed
10/4/2011	1:14:26 PM	SiCl4 post valve closed
10/4/2011	1:14:26 PM	Main Vac valve closed
10/4/2011	1:14:26 PM	Bypass valve closed
10/4/2011	1:14:26 PM	Bubbler valve closed
10/4/2011	1:14:26 PM	H2 valve opened
10/4/2011	1:14:26 PM	Helium MFC set to  0.000000
10/4/2011	1:14:26 PM	H2 MFC set to  500.000000
10/4/2011	1:14:26 PM	BCl3 MFC set to  0.000000
10/4/2011	1:14:26 PM	PHl3 MFC set to  0.000000
10/4/2011	1:14:26 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:14:26 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:14:26 PM	Tube furnace set to 0
10/4/2011	1:15:30 PM	Helium valve closed
10/4/2011	1:15:30 PM	BCl3 valve closed
10/4/2011	1:15:30 PM	PH3 valve closed
10/4/2011	1:15:30 PM	SiCl4 pre valve closed
10/4/2011	1:15:30 PM	SiCl4 post valve closed
10/4/2011	1:15:30 PM	Main Vac valve closed
10/4/2011	1:15:30 PM	Bypass valve closed
10/4/2011	1:15:30 PM	H2 valve opened
10/4/2011	1:15:30 PM	Bubbler valve opened
10/4/2011	1:15:30 PM	Helium MFC set to  0.000000
10/4/2011	1:15:30 PM	H2 MFC set to  500.000000
10/4/2011	1:15:30 PM	BCl3 MFC set to  0.000000
10/4/2011	1:15:30 PM	PHl3 MFC set to  0.000000
10/4/2011	1:15:30 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:15:30 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:15:30 PM	Tube furnace set to 0
10/4/2011	1:15:31 PM	Helium valve closed
10/4/2011	1:15:31 PM	BCl3 valve closed
10/4/2011	1:15:31 PM	PH3 valve closed
10/4/2011	1:15:31 PM	SiCl4 pre valve closed
10/4/2011	1:15:31 PM	SiCl4 post valve closed
10/4/2011	1:15:31 PM	Main Vac valve closed
10/4/2011	1:15:31 PM	Bypass valve closed
10/4/2011	1:15:31 PM	H2 valve opened
10/4/2011	1:15:31 PM	Bubbler valve opened
10/4/2011	1:15:31 PM	Helium MFC set to  0.000000
10/4/2011	1:15:31 PM	H2 MFC set to  500.000000
10/4/2011	1:15:31 PM	BCl3 MFC set to  0.000000
10/4/2011	1:15:31 PM	PHl3 MFC set to  0.000000
10/4/2011	1:15:31 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:15:31 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:15:31 PM	Tube furnace set to 800
10/4/2011	1:25:31 PM	Helium valve closed
10/4/2011	1:25:31 PM	BCl3 valve closed
10/4/2011	1:25:31 PM	PH3 valve closed
10/4/2011	1:25:31 PM	SiCl4 pre valve closed
10/4/2011	1:25:31 PM	SiCl4 post valve closed
10/4/2011	1:25:31 PM	Main Vac valve closed
10/4/2011	1:25:31 PM	Bypass valve closed
10/4/2011	1:25:31 PM	H2 valve opened
10/4/2011	1:25:31 PM	Bubbler valve opened
10/4/2011	1:25:31 PM	Helium MFC set to  0.000000
10/4/2011	1:25:31 PM	H2 MFC set to  500.000000
10/4/2011	1:25:31 PM	BCl3 MFC set to  0.000000
10/4/2011	1:25:31 PM	PHl3 MFC set to  0.000000
10/4/2011	1:25:31 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:25:31 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:25:31 PM	Tube furnace set to 750
10/4/2011	1:26:10 PM	Run aborted at 1:26 PM
10/4/2011	1:26:10 PM	Helium valve closed
10/4/2011	1:26:10 PM	H2 valve closed
10/4/2011	1:26:10 PM	BCl3 valve closed
10/4/2011	1:26:10 PM	PH3 valve closed
10/4/2011	1:26:10 PM	SiCl4 pre valve closed
10/4/2011	1:26:10 PM	SiCl4 post valve closed
10/4/2011	1:26:10 PM	Bypass valve closed
10/4/2011	1:26:10 PM	Main Vac valve closed
10/4/2011	1:26:10 PM	Bubbler valve closed
10/4/2011	1:26:10 PM	Helium MFC set to  0.000000
10/4/2011	1:26:10 PM	H2 MFC set to  0.000000
10/4/2011	1:26:10 PM	BCl3 MFC set to  0.000000
10/4/2011	1:26:10 PM	PHl3 MFC set to  0.000000
10/4/2011	1:26:10 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:26:10 PM	Tube furnace set to 0
10/4/2011	1:26:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2011	1:26:28 PM	Recipe started at 1:26 PM
10/4/2011	1:26:28 PM	Helium valve closed
10/4/2011	1:26:28 PM	H2 valve closed
10/4/2011	1:26:28 PM	BCl3 valve closed
10/4/2011	1:26:28 PM	PH3 valve closed
10/4/2011	1:26:28 PM	SiCl4 pre valve closed
10/4/2011	1:26:28 PM	SiCl4 post valve closed
10/4/2011	1:26:28 PM	Main Vac valve closed
10/4/2011	1:26:28 PM	Bubbler valve closed
10/4/2011	1:26:28 PM	Bypass valve opened
10/4/2011	1:26:28 PM	Helium MFC set to  0.000000
10/4/2011	1:26:28 PM	H2 MFC set to  0.000000
10/4/2011	1:26:28 PM	BCl3 MFC set to  0.000000
10/4/2011	1:26:28 PM	PHl3 MFC set to  0.000000
10/4/2011	1:26:28 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:26:28 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:26:28 PM	Tube furnace set to 0
10/4/2011	1:26:58 PM	Helium valve closed
10/4/2011	1:26:58 PM	H2 valve closed
10/4/2011	1:26:58 PM	BCl3 valve closed
10/4/2011	1:26:58 PM	PH3 valve closed
10/4/2011	1:26:58 PM	SiCl4 pre valve closed
10/4/2011	1:26:58 PM	SiCl4 post valve closed
10/4/2011	1:26:58 PM	Main Vac valve closed
10/4/2011	1:26:58 PM	Bubbler valve closed
10/4/2011	1:26:58 PM	Bypass valve opened
10/4/2011	1:26:58 PM	Helium MFC set to  0.000000
10/4/2011	1:26:58 PM	H2 MFC set to  0.000000
10/4/2011	1:26:58 PM	BCl3 MFC set to  0.000000
10/4/2011	1:26:58 PM	PHl3 MFC set to  0.000000
10/4/2011	1:26:58 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:26:58 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:26:58 PM	Tube furnace set to 0
10/4/2011	1:27:22 PM	Helium valve closed
10/4/2011	1:27:22 PM	H2 valve closed
10/4/2011	1:27:22 PM	BCl3 valve closed
10/4/2011	1:27:22 PM	PH3 valve closed
10/4/2011	1:27:22 PM	SiCl4 pre valve closed
10/4/2011	1:27:22 PM	SiCl4 post valve closed
10/4/2011	1:27:22 PM	Bypass valve closed
10/4/2011	1:27:22 PM	Bubbler valve closed
10/4/2011	1:27:22 PM	Main Vac valve opened
10/4/2011	1:27:22 PM	Helium MFC set to  0.000000
10/4/2011	1:27:22 PM	H2 MFC set to  0.000000
10/4/2011	1:27:22 PM	BCl3 MFC set to  0.000000
10/4/2011	1:27:22 PM	PHl3 MFC set to  0.000000
10/4/2011	1:27:22 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:27:22 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:27:22 PM	Tube furnace set to 0
10/4/2011	1:27:23 PM	Run finished at 1:27 PM
10/4/2011	1:27:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2011	1:29:00 PM	Recipe started at 1:28 PM
10/4/2011	1:29:00 PM	Helium valve closed
10/4/2011	1:29:00 PM	H2 valve closed
10/4/2011	1:29:00 PM	BCl3 valve closed
10/4/2011	1:29:00 PM	PH3 valve closed
10/4/2011	1:29:00 PM	SiCl4 pre valve closed
10/4/2011	1:29:00 PM	SiCl4 post valve closed
10/4/2011	1:29:00 PM	Main Vac valve closed
10/4/2011	1:29:00 PM	Bypass valve closed
10/4/2011	1:29:00 PM	Bubbler valve closed
10/4/2011	1:29:00 PM	Helium MFC set to  0.000000
10/4/2011	1:29:00 PM	H2 MFC set to  0.000000
10/4/2011	1:29:00 PM	BCl3 MFC set to  0.000000
10/4/2011	1:29:00 PM	PHl3 MFC set to  0.000000
10/4/2011	1:29:00 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:29:00 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:29:00 PM	Tube furnace set to 0
10/4/2011	1:29:03 PM	Helium valve closed
10/4/2011	1:29:03 PM	BCl3 valve closed
10/4/2011	1:29:03 PM	PH3 valve closed
10/4/2011	1:29:03 PM	SiCl4 pre valve closed
10/4/2011	1:29:03 PM	SiCl4 post valve closed
10/4/2011	1:29:03 PM	Main Vac valve closed
10/4/2011	1:29:03 PM	Bypass valve closed
10/4/2011	1:29:03 PM	Bubbler valve closed
10/4/2011	1:29:03 PM	H2 valve opened
10/4/2011	1:29:03 PM	Helium MFC set to  0.000000
10/4/2011	1:29:03 PM	H2 MFC set to  500.000000
10/4/2011	1:29:03 PM	BCl3 MFC set to  0.000000
10/4/2011	1:29:03 PM	PHl3 MFC set to  0.000000
10/4/2011	1:29:03 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:29:03 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:29:04 PM	Tube furnace set to 0
10/4/2011	1:30:01 PM	Helium valve closed
10/4/2011	1:30:01 PM	BCl3 valve closed
10/4/2011	1:30:01 PM	PH3 valve closed
10/4/2011	1:30:01 PM	SiCl4 pre valve closed
10/4/2011	1:30:01 PM	SiCl4 post valve closed
10/4/2011	1:30:01 PM	Main Vac valve closed
10/4/2011	1:30:01 PM	Bypass valve closed
10/4/2011	1:30:01 PM	H2 valve opened
10/4/2011	1:30:01 PM	Bubbler valve opened
10/4/2011	1:30:01 PM	Helium MFC set to  0.000000
10/4/2011	1:30:01 PM	H2 MFC set to  500.000000
10/4/2011	1:30:01 PM	BCl3 MFC set to  0.000000
10/4/2011	1:30:01 PM	PHl3 MFC set to  0.000000
10/4/2011	1:30:01 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:30:01 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:30:02 PM	Tube furnace set to 0
10/4/2011	1:30:03 PM	Helium valve closed
10/4/2011	1:30:03 PM	BCl3 valve closed
10/4/2011	1:30:03 PM	PH3 valve closed
10/4/2011	1:30:03 PM	SiCl4 pre valve closed
10/4/2011	1:30:03 PM	SiCl4 post valve closed
10/4/2011	1:30:03 PM	Main Vac valve closed
10/4/2011	1:30:03 PM	Bypass valve closed
10/4/2011	1:30:03 PM	H2 valve opened
10/4/2011	1:30:03 PM	Bubbler valve opened
10/4/2011	1:30:03 PM	Helium MFC set to  0.000000
10/4/2011	1:30:03 PM	H2 MFC set to  500.000000
10/4/2011	1:30:03 PM	BCl3 MFC set to  0.000000
10/4/2011	1:30:03 PM	PHl3 MFC set to  0.000000
10/4/2011	1:30:03 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:30:03 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:30:03 PM	Tube furnace set to 1000
10/4/2011	1:38:23 PM	Helium valve closed
10/4/2011	1:38:23 PM	BCl3 valve closed
10/4/2011	1:38:23 PM	PH3 valve closed
10/4/2011	1:38:23 PM	SiCl4 pre valve closed
10/4/2011	1:38:23 PM	SiCl4 post valve closed
10/4/2011	1:38:23 PM	Main Vac valve closed
10/4/2011	1:38:23 PM	Bypass valve closed
10/4/2011	1:38:23 PM	H2 valve opened
10/4/2011	1:38:23 PM	Bubbler valve opened
10/4/2011	1:38:23 PM	Helium MFC set to  0.000000
10/4/2011	1:38:23 PM	H2 MFC set to  500.000000
10/4/2011	1:38:23 PM	BCl3 MFC set to  0.000000
10/4/2011	1:38:23 PM	PHl3 MFC set to  0.000000
10/4/2011	1:38:23 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:38:23 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:38:23 PM	Tube furnace set to 1000
10/4/2011	1:48:23 PM	Helium valve closed
10/4/2011	1:48:23 PM	BCl3 valve closed
10/4/2011	1:48:23 PM	PH3 valve closed
10/4/2011	1:48:23 PM	SiCl4 pre valve closed
10/4/2011	1:48:23 PM	SiCl4 post valve closed
10/4/2011	1:48:23 PM	Main Vac valve closed
10/4/2011	1:48:23 PM	Bypass valve closed
10/4/2011	1:48:23 PM	H2 valve opened
10/4/2011	1:48:23 PM	Bubbler valve opened
10/4/2011	1:48:23 PM	Helium MFC set to  0.000000
10/4/2011	1:48:23 PM	H2 MFC set to  500.000000
10/4/2011	1:48:23 PM	BCl3 MFC set to  0.000000
10/4/2011	1:48:23 PM	PHl3 MFC set to  0.000000
10/4/2011	1:48:23 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:48:23 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:48:23 PM	Tube furnace set to 750
10/4/2011	1:53:23 PM	H2 valve closed
10/4/2011	1:53:23 PM	BCl3 valve closed
10/4/2011	1:53:23 PM	PH3 valve closed
10/4/2011	1:53:23 PM	SiCl4 pre valve closed
10/4/2011	1:53:23 PM	SiCl4 post valve closed
10/4/2011	1:53:23 PM	Main Vac valve closed
10/4/2011	1:53:23 PM	Bypass valve closed
10/4/2011	1:53:23 PM	Helium valve opened
10/4/2011	1:53:23 PM	Bubbler valve opened
10/4/2011	1:53:23 PM	Helium MFC set to  500.000000
10/4/2011	1:53:23 PM	H2 MFC set to  0.000000
10/4/2011	1:53:23 PM	BCl3 MFC set to  0.000000
10/4/2011	1:53:23 PM	PHl3 MFC set to  0.000000
10/4/2011	1:53:23 PM	SiCl4 MFC set to  0.000000
10/4/2011	1:53:23 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	1:53:23 PM	Tube furnace set to 0
10/4/2011	2:13:23 PM	Helium valve closed
10/4/2011	2:13:23 PM	H2 valve closed
10/4/2011	2:13:23 PM	BCl3 valve closed
10/4/2011	2:13:23 PM	PH3 valve closed
10/4/2011	2:13:23 PM	SiCl4 pre valve closed
10/4/2011	2:13:23 PM	SiCl4 post valve closed
10/4/2011	2:13:23 PM	Main Vac valve closed
10/4/2011	2:13:23 PM	Bypass valve closed
10/4/2011	2:13:23 PM	Bubbler valve closed
10/4/2011	2:13:23 PM	Helium MFC set to  0.000000
10/4/2011	2:13:23 PM	H2 MFC set to  0.000000
10/4/2011	2:13:23 PM	BCl3 MFC set to  0.000000
10/4/2011	2:13:23 PM	PHl3 MFC set to  0.000000
10/4/2011	2:13:23 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:13:23 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:13:23 PM	Tube furnace set to 0
10/4/2011	2:13:24 PM	Run finished at 2:13 PM
10/4/2011	2:40:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2011	2:40:17 PM	Recipe started at 2:40 PM
10/4/2011	2:40:17 PM	Helium valve closed
10/4/2011	2:40:17 PM	H2 valve closed
10/4/2011	2:40:17 PM	BCl3 valve closed
10/4/2011	2:40:17 PM	PH3 valve closed
10/4/2011	2:40:17 PM	SiCl4 pre valve closed
10/4/2011	2:40:17 PM	SiCl4 post valve closed
10/4/2011	2:40:18 PM	Main Vac valve closed
10/4/2011	2:40:18 PM	Bypass valve closed
10/4/2011	2:40:18 PM	Bubbler valve closed
10/4/2011	2:40:18 PM	Helium MFC set to  0.000000
10/4/2011	2:40:18 PM	H2 MFC set to  0.000000
10/4/2011	2:40:18 PM	BCl3 MFC set to  0.000000
10/4/2011	2:40:18 PM	PHl3 MFC set to  0.000000
10/4/2011	2:40:18 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:40:18 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:40:18 PM	Tube furnace set to 0
10/4/2011	2:40:21 PM	H2 valve closed
10/4/2011	2:40:21 PM	BCl3 valve closed
10/4/2011	2:40:21 PM	PH3 valve closed
10/4/2011	2:40:21 PM	SiCl4 pre valve closed
10/4/2011	2:40:21 PM	SiCl4 post valve closed
10/4/2011	2:40:21 PM	Main Vac valve closed
10/4/2011	2:40:21 PM	Bypass valve closed
10/4/2011	2:40:21 PM	Bubbler valve closed
10/4/2011	2:40:21 PM	Helium valve opened
10/4/2011	2:40:21 PM	Helium MFC set to  500.000000
10/4/2011	2:40:21 PM	H2 MFC set to  0.000000
10/4/2011	2:40:21 PM	BCl3 MFC set to  0.000000
10/4/2011	2:40:21 PM	PHl3 MFC set to  0.000000
10/4/2011	2:40:21 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:40:21 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:40:21 PM	Tube furnace set to 0
10/4/2011	2:40:22 PM	Helium valve closed
10/4/2011	2:40:22 PM	H2 valve closed
10/4/2011	2:40:22 PM	BCl3 valve closed
10/4/2011	2:40:22 PM	PH3 valve closed
10/4/2011	2:40:22 PM	SiCl4 pre valve closed
10/4/2011	2:40:22 PM	SiCl4 post valve closed
10/4/2011	2:40:22 PM	Main Vac valve closed
10/4/2011	2:40:22 PM	Bypass valve closed
10/4/2011	2:40:22 PM	Bubbler valve closed
10/4/2011	2:40:22 PM	Helium MFC set to  0.000000
10/4/2011	2:40:22 PM	H2 MFC set to  0.000000
10/4/2011	2:40:22 PM	BCl3 MFC set to  0.000000
10/4/2011	2:40:22 PM	PHl3 MFC set to  0.000000
10/4/2011	2:40:22 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:40:22 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:40:22 PM	Tube furnace set to 0
10/4/2011	2:40:23 PM	Run finished at 2:40 PM
10/4/2011	2:40:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2011	2:45:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2011	2:45:06 PM	Recipe started at 2:45 PM
10/4/2011	2:45:06 PM	Helium valve closed
10/4/2011	2:45:06 PM	H2 valve closed
10/4/2011	2:45:06 PM	BCl3 valve closed
10/4/2011	2:45:06 PM	PH3 valve closed
10/4/2011	2:45:06 PM	SiCl4 pre valve closed
10/4/2011	2:45:06 PM	SiCl4 post valve closed
10/4/2011	2:45:06 PM	Main Vac valve closed
10/4/2011	2:45:06 PM	Bubbler valve closed
10/4/2011	2:45:06 PM	Bypass valve opened
10/4/2011	2:45:06 PM	Helium MFC set to  0.000000
10/4/2011	2:45:06 PM	H2 MFC set to  0.000000
10/4/2011	2:45:06 PM	BCl3 MFC set to  0.000000
10/4/2011	2:45:06 PM	PHl3 MFC set to  0.000000
10/4/2011	2:45:06 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:45:06 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:45:06 PM	Tube furnace set to 0
10/4/2011	2:46:11 PM	Helium valve closed
10/4/2011	2:46:11 PM	H2 valve closed
10/4/2011	2:46:11 PM	BCl3 valve closed
10/4/2011	2:46:11 PM	PH3 valve closed
10/4/2011	2:46:11 PM	SiCl4 pre valve closed
10/4/2011	2:46:11 PM	SiCl4 post valve closed
10/4/2011	2:46:11 PM	Main Vac valve closed
10/4/2011	2:46:11 PM	Bubbler valve closed
10/4/2011	2:46:11 PM	Bypass valve opened
10/4/2011	2:46:11 PM	Helium MFC set to  0.000000
10/4/2011	2:46:11 PM	H2 MFC set to  0.000000
10/4/2011	2:46:11 PM	BCl3 MFC set to  0.000000
10/4/2011	2:46:11 PM	PHl3 MFC set to  0.000000
10/4/2011	2:46:11 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:46:11 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:46:11 PM	Tube furnace set to 0
10/4/2011	2:47:11 PM	Helium valve closed
10/4/2011	2:47:11 PM	H2 valve closed
10/4/2011	2:47:11 PM	BCl3 valve closed
10/4/2011	2:47:11 PM	PH3 valve closed
10/4/2011	2:47:11 PM	SiCl4 pre valve closed
10/4/2011	2:47:11 PM	SiCl4 post valve closed
10/4/2011	2:47:11 PM	Bypass valve closed
10/4/2011	2:47:11 PM	Bubbler valve closed
10/4/2011	2:47:11 PM	Main Vac valve opened
10/4/2011	2:47:11 PM	Helium MFC set to  0.000000
10/4/2011	2:47:11 PM	H2 MFC set to  0.000000
10/4/2011	2:47:11 PM	BCl3 MFC set to  0.000000
10/4/2011	2:47:11 PM	PHl3 MFC set to  0.000000
10/4/2011	2:47:11 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:47:11 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:47:11 PM	Tube furnace set to 0
10/4/2011	2:47:12 PM	Run finished at 2:47 PM
10/4/2011	2:47:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2011	2:48:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/4/2011	2:48:42 PM	Recipe started at 2:48 PM
10/4/2011	2:48:42 PM	Helium valve closed
10/4/2011	2:48:42 PM	H2 valve closed
10/4/2011	2:48:42 PM	BCl3 valve closed
10/4/2011	2:48:42 PM	PH3 valve closed
10/4/2011	2:48:42 PM	SiCl4 pre valve closed
10/4/2011	2:48:42 PM	SiCl4 post valve closed
10/4/2011	2:48:42 PM	Main Vac valve closed
10/4/2011	2:48:42 PM	Bubbler valve closed
10/4/2011	2:48:42 PM	Bypass valve opened
10/4/2011	2:48:42 PM	Helium MFC set to  0.000000
10/4/2011	2:48:42 PM	H2 MFC set to  0.000000
10/4/2011	2:48:42 PM	BCl3 MFC set to  0.000000
10/4/2011	2:48:42 PM	PHl3 MFC set to  0.000000
10/4/2011	2:48:42 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:48:42 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:48:42 PM	Tube furnace set to 0
10/4/2011	2:48:43 PM	Helium valve closed
10/4/2011	2:48:43 PM	H2 valve closed
10/4/2011	2:48:43 PM	BCl3 valve closed
10/4/2011	2:48:43 PM	PH3 valve closed
10/4/2011	2:48:43 PM	SiCl4 pre valve closed
10/4/2011	2:48:43 PM	SiCl4 post valve closed
10/4/2011	2:48:43 PM	Main Vac valve closed
10/4/2011	2:48:43 PM	Bubbler valve closed
10/4/2011	2:48:43 PM	Bypass valve opened
10/4/2011	2:48:43 PM	Helium MFC set to  0.000000
10/4/2011	2:48:43 PM	H2 MFC set to  0.000000
10/4/2011	2:48:43 PM	BCl3 MFC set to  0.000000
10/4/2011	2:48:43 PM	PHl3 MFC set to  0.000000
10/4/2011	2:48:43 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:48:43 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:48:43 PM	Tube furnace set to 0
10/4/2011	2:49:13 PM	Helium valve closed
10/4/2011	2:49:13 PM	H2 valve closed
10/4/2011	2:49:13 PM	BCl3 valve closed
10/4/2011	2:49:13 PM	PH3 valve closed
10/4/2011	2:49:13 PM	SiCl4 pre valve closed
10/4/2011	2:49:13 PM	SiCl4 post valve closed
10/4/2011	2:49:13 PM	Bypass valve closed
10/4/2011	2:49:13 PM	Bubbler valve closed
10/4/2011	2:49:13 PM	Main Vac valve opened
10/4/2011	2:49:13 PM	Helium MFC set to  0.000000
10/4/2011	2:49:13 PM	H2 MFC set to  0.000000
10/4/2011	2:49:13 PM	BCl3 MFC set to  0.000000
10/4/2011	2:49:13 PM	PHl3 MFC set to  0.000000
10/4/2011	2:49:13 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:49:13 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:49:13 PM	Tube furnace set to 0
10/4/2011	2:49:43 PM	H2 valve closed
10/4/2011	2:49:43 PM	BCl3 valve closed
10/4/2011	2:49:43 PM	PH3 valve closed
10/4/2011	2:49:43 PM	SiCl4 pre valve closed
10/4/2011	2:49:43 PM	SiCl4 post valve closed
10/4/2011	2:49:43 PM	Bypass valve closed
10/4/2011	2:49:43 PM	Bubbler valve closed
10/4/2011	2:49:43 PM	Helium valve opened
10/4/2011	2:49:43 PM	Main Vac valve opened
10/4/2011	2:49:43 PM	Helium MFC set to  20.000000
10/4/2011	2:49:43 PM	H2 MFC set to  0.000000
10/4/2011	2:49:43 PM	BCl3 MFC set to  0.000000
10/4/2011	2:49:43 PM	PHl3 MFC set to  0.000000
10/4/2011	2:49:43 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:49:43 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:49:43 PM	Tube furnace set to 0
10/4/2011	2:50:13 PM	Helium valve closed
10/4/2011	2:50:13 PM	H2 valve closed
10/4/2011	2:50:13 PM	BCl3 valve closed
10/4/2011	2:50:13 PM	PH3 valve closed
10/4/2011	2:50:13 PM	SiCl4 pre valve closed
10/4/2011	2:50:13 PM	SiCl4 post valve closed
10/4/2011	2:50:13 PM	Bypass valve closed
10/4/2011	2:50:13 PM	Bubbler valve closed
10/4/2011	2:50:13 PM	Main Vac valve opened
10/4/2011	2:50:13 PM	Helium MFC set to  0.000000
10/4/2011	2:50:13 PM	H2 MFC set to  0.000000
10/4/2011	2:50:13 PM	BCl3 MFC set to  0.000000
10/4/2011	2:50:13 PM	PHl3 MFC set to  0.000000
10/4/2011	2:50:13 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:50:13 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:50:13 PM	Tube furnace set to 0
10/4/2011	2:50:43 PM	H2 valve closed
10/4/2011	2:50:43 PM	BCl3 valve closed
10/4/2011	2:50:43 PM	PH3 valve closed
10/4/2011	2:50:43 PM	SiCl4 pre valve closed
10/4/2011	2:50:43 PM	SiCl4 post valve closed
10/4/2011	2:50:43 PM	Bypass valve closed
10/4/2011	2:50:43 PM	Bubbler valve closed
10/4/2011	2:50:43 PM	Helium valve opened
10/4/2011	2:50:43 PM	Main Vac valve opened
10/4/2011	2:50:43 PM	Helium MFC set to  20.000000
10/4/2011	2:50:43 PM	H2 MFC set to  0.000000
10/4/2011	2:50:43 PM	BCl3 MFC set to  0.000000
10/4/2011	2:50:43 PM	PHl3 MFC set to  0.000000
10/4/2011	2:50:43 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:50:43 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:50:44 PM	Tube furnace set to 0
10/4/2011	2:51:14 PM	Helium valve closed
10/4/2011	2:51:14 PM	H2 valve closed
10/4/2011	2:51:14 PM	BCl3 valve closed
10/4/2011	2:51:14 PM	PH3 valve closed
10/4/2011	2:51:14 PM	SiCl4 pre valve closed
10/4/2011	2:51:14 PM	SiCl4 post valve closed
10/4/2011	2:51:14 PM	Bypass valve closed
10/4/2011	2:51:14 PM	Bubbler valve closed
10/4/2011	2:51:14 PM	Main Vac valve opened
10/4/2011	2:51:14 PM	Helium MFC set to  0.000000
10/4/2011	2:51:14 PM	H2 MFC set to  0.000000
10/4/2011	2:51:14 PM	BCl3 MFC set to  0.000000
10/4/2011	2:51:14 PM	PHl3 MFC set to  0.000000
10/4/2011	2:51:14 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:51:14 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:51:14 PM	Tube furnace set to 0
10/4/2011	2:51:44 PM	H2 valve closed
10/4/2011	2:51:44 PM	BCl3 valve closed
10/4/2011	2:51:44 PM	PH3 valve closed
10/4/2011	2:51:44 PM	SiCl4 pre valve closed
10/4/2011	2:51:44 PM	SiCl4 post valve closed
10/4/2011	2:51:44 PM	Bypass valve closed
10/4/2011	2:51:44 PM	Bubbler valve closed
10/4/2011	2:51:44 PM	Helium valve opened
10/4/2011	2:51:44 PM	Main Vac valve opened
10/4/2011	2:51:44 PM	Helium MFC set to  20.000000
10/4/2011	2:51:44 PM	H2 MFC set to  0.000000
10/4/2011	2:51:44 PM	BCl3 MFC set to  0.000000
10/4/2011	2:51:44 PM	PHl3 MFC set to  0.000000
10/4/2011	2:51:44 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:51:44 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:51:44 PM	Tube furnace set to 0
10/4/2011	2:52:14 PM	Helium valve closed
10/4/2011	2:52:14 PM	H2 valve closed
10/4/2011	2:52:14 PM	BCl3 valve closed
10/4/2011	2:52:14 PM	PH3 valve closed
10/4/2011	2:52:14 PM	SiCl4 pre valve closed
10/4/2011	2:52:14 PM	SiCl4 post valve closed
10/4/2011	2:52:14 PM	Bypass valve closed
10/4/2011	2:52:14 PM	Bubbler valve closed
10/4/2011	2:52:14 PM	Main Vac valve opened
10/4/2011	2:52:14 PM	Helium MFC set to  0.000000
10/4/2011	2:52:14 PM	H2 MFC set to  0.000000
10/4/2011	2:52:14 PM	BCl3 MFC set to  0.000000
10/4/2011	2:52:14 PM	PHl3 MFC set to  0.000000
10/4/2011	2:52:14 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:52:14 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:52:14 PM	Tube furnace set to 0
10/4/2011	2:52:44 PM	H2 valve closed
10/4/2011	2:52:44 PM	BCl3 valve closed
10/4/2011	2:52:44 PM	PH3 valve closed
10/4/2011	2:52:44 PM	SiCl4 pre valve closed
10/4/2011	2:52:44 PM	SiCl4 post valve closed
10/4/2011	2:52:44 PM	Bypass valve closed
10/4/2011	2:52:44 PM	Bubbler valve closed
10/4/2011	2:52:44 PM	Helium valve opened
10/4/2011	2:52:44 PM	Main Vac valve opened
10/4/2011	2:52:44 PM	Helium MFC set to  20.000000
10/4/2011	2:52:44 PM	H2 MFC set to  0.000000
10/4/2011	2:52:44 PM	BCl3 MFC set to  0.000000
10/4/2011	2:52:44 PM	PHl3 MFC set to  0.000000
10/4/2011	2:52:44 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:52:44 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:52:44 PM	Tube furnace set to 0
10/4/2011	2:53:14 PM	Helium valve closed
10/4/2011	2:53:14 PM	H2 valve closed
10/4/2011	2:53:14 PM	BCl3 valve closed
10/4/2011	2:53:14 PM	PH3 valve closed
10/4/2011	2:53:14 PM	SiCl4 pre valve closed
10/4/2011	2:53:14 PM	SiCl4 post valve closed
10/4/2011	2:53:14 PM	Bypass valve closed
10/4/2011	2:53:14 PM	Bubbler valve closed
10/4/2011	2:53:14 PM	Main Vac valve opened
10/4/2011	2:53:14 PM	Helium MFC set to  0.000000
10/4/2011	2:53:14 PM	H2 MFC set to  0.000000
10/4/2011	2:53:14 PM	BCl3 MFC set to  0.000000
10/4/2011	2:53:14 PM	PHl3 MFC set to  0.000000
10/4/2011	2:53:14 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:53:14 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:53:15 PM	Tube furnace set to 0
10/4/2011	2:53:45 PM	H2 valve closed
10/4/2011	2:53:45 PM	BCl3 valve closed
10/4/2011	2:53:45 PM	PH3 valve closed
10/4/2011	2:53:45 PM	SiCl4 pre valve closed
10/4/2011	2:53:45 PM	SiCl4 post valve closed
10/4/2011	2:53:45 PM	Bypass valve closed
10/4/2011	2:53:45 PM	Bubbler valve closed
10/4/2011	2:53:45 PM	Helium valve opened
10/4/2011	2:53:45 PM	Main Vac valve opened
10/4/2011	2:53:45 PM	Helium MFC set to  20.000000
10/4/2011	2:53:45 PM	H2 MFC set to  0.000000
10/4/2011	2:53:45 PM	BCl3 MFC set to  0.000000
10/4/2011	2:53:45 PM	PHl3 MFC set to  0.000000
10/4/2011	2:53:45 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:53:45 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:53:45 PM	Tube furnace set to 0
10/4/2011	2:54:15 PM	Helium valve closed
10/4/2011	2:54:15 PM	H2 valve closed
10/4/2011	2:54:15 PM	BCl3 valve closed
10/4/2011	2:54:15 PM	PH3 valve closed
10/4/2011	2:54:15 PM	SiCl4 pre valve closed
10/4/2011	2:54:15 PM	SiCl4 post valve closed
10/4/2011	2:54:15 PM	Bypass valve closed
10/4/2011	2:54:15 PM	Bubbler valve closed
10/4/2011	2:54:15 PM	Main Vac valve opened
10/4/2011	2:54:15 PM	Helium MFC set to  0.000000
10/4/2011	2:54:15 PM	H2 MFC set to  0.000000
10/4/2011	2:54:15 PM	BCl3 MFC set to  0.000000
10/4/2011	2:54:15 PM	PHl3 MFC set to  0.000000
10/4/2011	2:54:15 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:54:15 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:54:15 PM	Tube furnace set to 0
10/4/2011	2:54:45 PM	H2 valve closed
10/4/2011	2:54:45 PM	BCl3 valve closed
10/4/2011	2:54:45 PM	PH3 valve closed
10/4/2011	2:54:45 PM	SiCl4 pre valve closed
10/4/2011	2:54:45 PM	SiCl4 post valve closed
10/4/2011	2:54:45 PM	Bypass valve closed
10/4/2011	2:54:45 PM	Bubbler valve closed
10/4/2011	2:54:45 PM	Helium valve opened
10/4/2011	2:54:45 PM	Main Vac valve opened
10/4/2011	2:54:45 PM	Helium MFC set to  20.000000
10/4/2011	2:54:45 PM	H2 MFC set to  0.000000
10/4/2011	2:54:45 PM	BCl3 MFC set to  0.000000
10/4/2011	2:54:45 PM	PHl3 MFC set to  0.000000
10/4/2011	2:54:45 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:54:45 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:54:45 PM	Tube furnace set to 0
10/4/2011	2:55:15 PM	Helium valve closed
10/4/2011	2:55:15 PM	H2 valve closed
10/4/2011	2:55:15 PM	BCl3 valve closed
10/4/2011	2:55:15 PM	PH3 valve closed
10/4/2011	2:55:15 PM	SiCl4 pre valve closed
10/4/2011	2:55:15 PM	SiCl4 post valve closed
10/4/2011	2:55:15 PM	Bypass valve closed
10/4/2011	2:55:15 PM	Bubbler valve closed
10/4/2011	2:55:15 PM	Main Vac valve opened
10/4/2011	2:55:15 PM	Helium MFC set to  0.000000
10/4/2011	2:55:15 PM	H2 MFC set to  0.000000
10/4/2011	2:55:15 PM	BCl3 MFC set to  0.000000
10/4/2011	2:55:15 PM	PHl3 MFC set to  0.000000
10/4/2011	2:55:15 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:55:15 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:55:15 PM	Tube furnace set to 0
10/4/2011	2:55:45 PM	H2 valve closed
10/4/2011	2:55:45 PM	BCl3 valve closed
10/4/2011	2:55:45 PM	PH3 valve closed
10/4/2011	2:55:45 PM	SiCl4 pre valve closed
10/4/2011	2:55:45 PM	SiCl4 post valve closed
10/4/2011	2:55:45 PM	Bypass valve closed
10/4/2011	2:55:45 PM	Bubbler valve closed
10/4/2011	2:55:45 PM	Helium valve opened
10/4/2011	2:55:45 PM	Main Vac valve opened
10/4/2011	2:55:45 PM	Helium MFC set to  20.000000
10/4/2011	2:55:45 PM	H2 MFC set to  0.000000
10/4/2011	2:55:45 PM	BCl3 MFC set to  0.000000
10/4/2011	2:55:45 PM	PHl3 MFC set to  0.000000
10/4/2011	2:55:45 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:55:45 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:55:46 PM	Tube furnace set to 0
10/4/2011	2:56:16 PM	Helium valve closed
10/4/2011	2:56:16 PM	H2 valve closed
10/4/2011	2:56:16 PM	BCl3 valve closed
10/4/2011	2:56:16 PM	PH3 valve closed
10/4/2011	2:56:16 PM	SiCl4 pre valve closed
10/4/2011	2:56:16 PM	SiCl4 post valve closed
10/4/2011	2:56:16 PM	Bypass valve closed
10/4/2011	2:56:16 PM	Bubbler valve closed
10/4/2011	2:56:16 PM	Main Vac valve opened
10/4/2011	2:56:16 PM	Helium MFC set to  0.000000
10/4/2011	2:56:16 PM	H2 MFC set to  0.000000
10/4/2011	2:56:16 PM	BCl3 MFC set to  0.000000
10/4/2011	2:56:16 PM	PHl3 MFC set to  0.000000
10/4/2011	2:56:16 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:56:16 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:56:16 PM	Tube furnace set to 0
10/4/2011	2:56:46 PM	H2 valve closed
10/4/2011	2:56:46 PM	BCl3 valve closed
10/4/2011	2:56:46 PM	PH3 valve closed
10/4/2011	2:56:46 PM	SiCl4 pre valve closed
10/4/2011	2:56:46 PM	SiCl4 post valve closed
10/4/2011	2:56:46 PM	Bypass valve closed
10/4/2011	2:56:46 PM	Bubbler valve closed
10/4/2011	2:56:46 PM	Helium valve opened
10/4/2011	2:56:46 PM	Main Vac valve opened
10/4/2011	2:56:46 PM	Helium MFC set to  20.000000
10/4/2011	2:56:46 PM	H2 MFC set to  0.000000
10/4/2011	2:56:46 PM	BCl3 MFC set to  0.000000
10/4/2011	2:56:46 PM	PHl3 MFC set to  0.000000
10/4/2011	2:56:46 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:56:46 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:56:46 PM	Tube furnace set to 0
10/4/2011	2:57:16 PM	Helium valve closed
10/4/2011	2:57:16 PM	H2 valve closed
10/4/2011	2:57:16 PM	BCl3 valve closed
10/4/2011	2:57:16 PM	PH3 valve closed
10/4/2011	2:57:16 PM	SiCl4 pre valve closed
10/4/2011	2:57:16 PM	SiCl4 post valve closed
10/4/2011	2:57:16 PM	Bypass valve closed
10/4/2011	2:57:16 PM	Bubbler valve closed
10/4/2011	2:57:16 PM	Main Vac valve opened
10/4/2011	2:57:16 PM	Helium MFC set to  0.000000
10/4/2011	2:57:16 PM	H2 MFC set to  0.000000
10/4/2011	2:57:16 PM	BCl3 MFC set to  0.000000
10/4/2011	2:57:16 PM	PHl3 MFC set to  0.000000
10/4/2011	2:57:16 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:57:16 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:57:16 PM	Tube furnace set to 0
10/4/2011	2:57:46 PM	H2 valve closed
10/4/2011	2:57:46 PM	BCl3 valve closed
10/4/2011	2:57:46 PM	PH3 valve closed
10/4/2011	2:57:46 PM	SiCl4 pre valve closed
10/4/2011	2:57:46 PM	SiCl4 post valve closed
10/4/2011	2:57:46 PM	Bypass valve closed
10/4/2011	2:57:46 PM	Bubbler valve closed
10/4/2011	2:57:46 PM	Helium valve opened
10/4/2011	2:57:46 PM	Main Vac valve opened
10/4/2011	2:57:46 PM	Helium MFC set to  20.000000
10/4/2011	2:57:46 PM	H2 MFC set to  0.000000
10/4/2011	2:57:46 PM	BCl3 MFC set to  0.000000
10/4/2011	2:57:46 PM	PHl3 MFC set to  0.000000
10/4/2011	2:57:46 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:57:46 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:57:46 PM	Tube furnace set to 0
10/4/2011	2:58:16 PM	Helium valve closed
10/4/2011	2:58:16 PM	H2 valve closed
10/4/2011	2:58:16 PM	BCl3 valve closed
10/4/2011	2:58:16 PM	PH3 valve closed
10/4/2011	2:58:16 PM	SiCl4 pre valve closed
10/4/2011	2:58:16 PM	SiCl4 post valve closed
10/4/2011	2:58:16 PM	Bypass valve closed
10/4/2011	2:58:16 PM	Bubbler valve closed
10/4/2011	2:58:16 PM	Main Vac valve opened
10/4/2011	2:58:16 PM	Helium MFC set to  0.000000
10/4/2011	2:58:16 PM	H2 MFC set to  0.000000
10/4/2011	2:58:16 PM	BCl3 MFC set to  0.000000
10/4/2011	2:58:16 PM	PHl3 MFC set to  0.000000
10/4/2011	2:58:16 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:58:16 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:58:17 PM	Tube furnace set to 0
10/4/2011	2:58:47 PM	H2 valve closed
10/4/2011	2:58:47 PM	BCl3 valve closed
10/4/2011	2:58:47 PM	PH3 valve closed
10/4/2011	2:58:47 PM	SiCl4 pre valve closed
10/4/2011	2:58:47 PM	SiCl4 post valve closed
10/4/2011	2:58:47 PM	Bypass valve closed
10/4/2011	2:58:47 PM	Bubbler valve closed
10/4/2011	2:58:47 PM	Helium valve opened
10/4/2011	2:58:47 PM	Main Vac valve opened
10/4/2011	2:58:47 PM	Helium MFC set to  20.000000
10/4/2011	2:58:47 PM	H2 MFC set to  0.000000
10/4/2011	2:58:47 PM	BCl3 MFC set to  0.000000
10/4/2011	2:58:47 PM	PHl3 MFC set to  0.000000
10/4/2011	2:58:47 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:58:47 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:58:47 PM	Tube furnace set to 0
10/4/2011	2:59:17 PM	Helium valve closed
10/4/2011	2:59:17 PM	H2 valve closed
10/4/2011	2:59:17 PM	BCl3 valve closed
10/4/2011	2:59:17 PM	PH3 valve closed
10/4/2011	2:59:17 PM	SiCl4 pre valve closed
10/4/2011	2:59:17 PM	SiCl4 post valve closed
10/4/2011	2:59:17 PM	Bypass valve closed
10/4/2011	2:59:17 PM	Bubbler valve closed
10/4/2011	2:59:17 PM	Main Vac valve opened
10/4/2011	2:59:17 PM	Helium MFC set to  0.000000
10/4/2011	2:59:17 PM	H2 MFC set to  0.000000
10/4/2011	2:59:17 PM	BCl3 MFC set to  0.000000
10/4/2011	2:59:17 PM	PHl3 MFC set to  0.000000
10/4/2011	2:59:17 PM	SiCl4 MFC set to  0.000000
10/4/2011	2:59:17 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	2:59:17 PM	Tube furnace set to 0
10/4/2011	2:59:18 PM	Run finished at 2:59 PM
10/4/2011	2:59:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/4/2011	3:00:30 PM	Recipe started at 3:00 PM
10/4/2011	3:00:30 PM	Helium valve closed
10/4/2011	3:00:30 PM	H2 valve closed
10/4/2011	3:00:30 PM	BCl3 valve closed
10/4/2011	3:00:30 PM	PH3 valve closed
10/4/2011	3:00:30 PM	SiCl4 pre valve closed
10/4/2011	3:00:30 PM	SiCl4 post valve closed
10/4/2011	3:00:30 PM	Main Vac valve closed
10/4/2011	3:00:30 PM	Bubbler valve closed
10/4/2011	3:00:30 PM	Bypass valve opened
10/4/2011	3:00:30 PM	Helium MFC set to  0.000000
10/4/2011	3:00:30 PM	H2 MFC set to  0.000000
10/4/2011	3:00:30 PM	BCl3 MFC set to  0.000000
10/4/2011	3:00:30 PM	PHl3 MFC set to  0.000000
10/4/2011	3:00:30 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:00:30 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:00:30 PM	Tube furnace set to 150
10/4/2011	3:00:30 PM	Helium valve closed
10/4/2011	3:00:30 PM	H2 valve closed
10/4/2011	3:00:30 PM	BCl3 valve closed
10/4/2011	3:00:30 PM	PH3 valve closed
10/4/2011	3:00:30 PM	SiCl4 pre valve closed
10/4/2011	3:00:30 PM	SiCl4 post valve closed
10/4/2011	3:00:30 PM	Main Vac valve closed
10/4/2011	3:00:30 PM	Bubbler valve closed
10/4/2011	3:00:30 PM	Bypass valve opened
10/4/2011	3:00:30 PM	Helium MFC set to  0.000000
10/4/2011	3:00:30 PM	H2 MFC set to  0.000000
10/4/2011	3:00:30 PM	BCl3 MFC set to  0.000000
10/4/2011	3:00:30 PM	PHl3 MFC set to  0.000000
10/4/2011	3:00:30 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:00:30 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:00:30 PM	Tube furnace set to 150
10/4/2011	3:00:33 PM	Helium valve closed
10/4/2011	3:00:33 PM	H2 valve closed
10/4/2011	3:00:33 PM	BCl3 valve closed
10/4/2011	3:00:33 PM	PH3 valve closed
10/4/2011	3:00:33 PM	SiCl4 pre valve closed
10/4/2011	3:00:33 PM	SiCl4 post valve closed
10/4/2011	3:00:33 PM	Bypass valve closed
10/4/2011	3:00:33 PM	Bubbler valve closed
10/4/2011	3:00:33 PM	Main Vac valve opened
10/4/2011	3:00:33 PM	Helium MFC set to  0.000000
10/4/2011	3:00:33 PM	H2 MFC set to  0.000000
10/4/2011	3:00:33 PM	BCl3 MFC set to  0.000000
10/4/2011	3:00:33 PM	PHl3 MFC set to  0.000000
10/4/2011	3:00:33 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:00:33 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:00:33 PM	Tube furnace set to 150
10/4/2011	3:01:03 PM	H2 valve closed
10/4/2011	3:01:03 PM	BCl3 valve closed
10/4/2011	3:01:03 PM	PH3 valve closed
10/4/2011	3:01:03 PM	SiCl4 pre valve closed
10/4/2011	3:01:03 PM	SiCl4 post valve closed
10/4/2011	3:01:03 PM	Bypass valve closed
10/4/2011	3:01:03 PM	Bubbler valve closed
10/4/2011	3:01:03 PM	Helium valve opened
10/4/2011	3:01:03 PM	Main Vac valve opened
10/4/2011	3:01:03 PM	Helium MFC set to  20.000000
10/4/2011	3:01:03 PM	H2 MFC set to  0.000000
10/4/2011	3:01:03 PM	BCl3 MFC set to  0.000000
10/4/2011	3:01:03 PM	PHl3 MFC set to  0.000000
10/4/2011	3:01:03 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:01:03 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:01:03 PM	Tube furnace set to 150
10/4/2011	3:01:33 PM	Helium valve closed
10/4/2011	3:01:33 PM	H2 valve closed
10/4/2011	3:01:33 PM	BCl3 valve closed
10/4/2011	3:01:33 PM	PH3 valve closed
10/4/2011	3:01:33 PM	SiCl4 pre valve closed
10/4/2011	3:01:33 PM	SiCl4 post valve closed
10/4/2011	3:01:33 PM	Bypass valve closed
10/4/2011	3:01:33 PM	Bubbler valve closed
10/4/2011	3:01:33 PM	Main Vac valve opened
10/4/2011	3:01:33 PM	Helium MFC set to  0.000000
10/4/2011	3:01:33 PM	H2 MFC set to  0.000000
10/4/2011	3:01:33 PM	BCl3 MFC set to  0.000000
10/4/2011	3:01:33 PM	PHl3 MFC set to  0.000000
10/4/2011	3:01:33 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:01:33 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:01:34 PM	Tube furnace set to 150
10/4/2011	3:02:04 PM	H2 valve closed
10/4/2011	3:02:04 PM	BCl3 valve closed
10/4/2011	3:02:04 PM	PH3 valve closed
10/4/2011	3:02:04 PM	SiCl4 pre valve closed
10/4/2011	3:02:04 PM	SiCl4 post valve closed
10/4/2011	3:02:04 PM	Bypass valve closed
10/4/2011	3:02:04 PM	Bubbler valve closed
10/4/2011	3:02:04 PM	Helium valve opened
10/4/2011	3:02:04 PM	Main Vac valve opened
10/4/2011	3:02:04 PM	Helium MFC set to  20.000000
10/4/2011	3:02:04 PM	H2 MFC set to  0.000000
10/4/2011	3:02:04 PM	BCl3 MFC set to  0.000000
10/4/2011	3:02:04 PM	PHl3 MFC set to  0.000000
10/4/2011	3:02:04 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:02:04 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:02:04 PM	Tube furnace set to 150
10/4/2011	3:02:34 PM	Helium valve closed
10/4/2011	3:02:34 PM	H2 valve closed
10/4/2011	3:02:34 PM	BCl3 valve closed
10/4/2011	3:02:34 PM	PH3 valve closed
10/4/2011	3:02:34 PM	SiCl4 pre valve closed
10/4/2011	3:02:34 PM	SiCl4 post valve closed
10/4/2011	3:02:34 PM	Bypass valve closed
10/4/2011	3:02:34 PM	Bubbler valve closed
10/4/2011	3:02:34 PM	Main Vac valve opened
10/4/2011	3:02:34 PM	Helium MFC set to  0.000000
10/4/2011	3:02:34 PM	H2 MFC set to  0.000000
10/4/2011	3:02:34 PM	BCl3 MFC set to  0.000000
10/4/2011	3:02:34 PM	PHl3 MFC set to  0.000000
10/4/2011	3:02:34 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:02:34 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:02:34 PM	Tube furnace set to 150
10/4/2011	3:03:04 PM	H2 valve closed
10/4/2011	3:03:04 PM	BCl3 valve closed
10/4/2011	3:03:04 PM	PH3 valve closed
10/4/2011	3:03:04 PM	SiCl4 pre valve closed
10/4/2011	3:03:04 PM	SiCl4 post valve closed
10/4/2011	3:03:04 PM	Bypass valve closed
10/4/2011	3:03:04 PM	Bubbler valve closed
10/4/2011	3:03:04 PM	Helium valve opened
10/4/2011	3:03:04 PM	Main Vac valve opened
10/4/2011	3:03:04 PM	Helium MFC set to  20.000000
10/4/2011	3:03:04 PM	H2 MFC set to  0.000000
10/4/2011	3:03:04 PM	BCl3 MFC set to  0.000000
10/4/2011	3:03:04 PM	PHl3 MFC set to  0.000000
10/4/2011	3:03:04 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:03:04 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:03:04 PM	Tube furnace set to 150
10/4/2011	3:03:34 PM	Helium valve closed
10/4/2011	3:03:34 PM	H2 valve closed
10/4/2011	3:03:34 PM	BCl3 valve closed
10/4/2011	3:03:34 PM	PH3 valve closed
10/4/2011	3:03:34 PM	SiCl4 pre valve closed
10/4/2011	3:03:34 PM	SiCl4 post valve closed
10/4/2011	3:03:34 PM	Bypass valve closed
10/4/2011	3:03:34 PM	Bubbler valve closed
10/4/2011	3:03:34 PM	Main Vac valve opened
10/4/2011	3:03:34 PM	Helium MFC set to  0.000000
10/4/2011	3:03:34 PM	H2 MFC set to  0.000000
10/4/2011	3:03:34 PM	BCl3 MFC set to  0.000000
10/4/2011	3:03:34 PM	PHl3 MFC set to  0.000000
10/4/2011	3:03:34 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:03:34 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:03:34 PM	Tube furnace set to 150
10/4/2011	3:04:04 PM	H2 valve closed
10/4/2011	3:04:04 PM	BCl3 valve closed
10/4/2011	3:04:04 PM	PH3 valve closed
10/4/2011	3:04:04 PM	SiCl4 pre valve closed
10/4/2011	3:04:04 PM	SiCl4 post valve closed
10/4/2011	3:04:04 PM	Bypass valve closed
10/4/2011	3:04:04 PM	Bubbler valve closed
10/4/2011	3:04:04 PM	Helium valve opened
10/4/2011	3:04:04 PM	Main Vac valve opened
10/4/2011	3:04:04 PM	Helium MFC set to  20.000000
10/4/2011	3:04:04 PM	H2 MFC set to  0.000000
10/4/2011	3:04:04 PM	BCl3 MFC set to  0.000000
10/4/2011	3:04:04 PM	PHl3 MFC set to  0.000000
10/4/2011	3:04:04 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:04:04 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:04:05 PM	Tube furnace set to 150
10/4/2011	3:04:35 PM	Helium valve closed
10/4/2011	3:04:35 PM	H2 valve closed
10/4/2011	3:04:35 PM	BCl3 valve closed
10/4/2011	3:04:35 PM	PH3 valve closed
10/4/2011	3:04:35 PM	SiCl4 pre valve closed
10/4/2011	3:04:35 PM	SiCl4 post valve closed
10/4/2011	3:04:35 PM	Bypass valve closed
10/4/2011	3:04:35 PM	Bubbler valve closed
10/4/2011	3:04:35 PM	Main Vac valve opened
10/4/2011	3:04:35 PM	Helium MFC set to  0.000000
10/4/2011	3:04:35 PM	H2 MFC set to  0.000000
10/4/2011	3:04:35 PM	BCl3 MFC set to  0.000000
10/4/2011	3:04:35 PM	PHl3 MFC set to  0.000000
10/4/2011	3:04:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:04:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:04:35 PM	Tube furnace set to 150
10/4/2011	3:05:05 PM	H2 valve closed
10/4/2011	3:05:05 PM	BCl3 valve closed
10/4/2011	3:05:05 PM	PH3 valve closed
10/4/2011	3:05:05 PM	SiCl4 pre valve closed
10/4/2011	3:05:05 PM	SiCl4 post valve closed
10/4/2011	3:05:05 PM	Bypass valve closed
10/4/2011	3:05:05 PM	Bubbler valve closed
10/4/2011	3:05:05 PM	Helium valve opened
10/4/2011	3:05:05 PM	Main Vac valve opened
10/4/2011	3:05:05 PM	Helium MFC set to  20.000000
10/4/2011	3:05:05 PM	H2 MFC set to  0.000000
10/4/2011	3:05:05 PM	BCl3 MFC set to  0.000000
10/4/2011	3:05:05 PM	PHl3 MFC set to  0.000000
10/4/2011	3:05:05 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:05:05 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:05:05 PM	Tube furnace set to 150
10/4/2011	3:05:35 PM	Helium valve closed
10/4/2011	3:05:35 PM	H2 valve closed
10/4/2011	3:05:35 PM	BCl3 valve closed
10/4/2011	3:05:35 PM	PH3 valve closed
10/4/2011	3:05:35 PM	SiCl4 pre valve closed
10/4/2011	3:05:35 PM	SiCl4 post valve closed
10/4/2011	3:05:35 PM	Bypass valve closed
10/4/2011	3:05:35 PM	Bubbler valve closed
10/4/2011	3:05:35 PM	Main Vac valve opened
10/4/2011	3:05:35 PM	Helium MFC set to  0.000000
10/4/2011	3:05:35 PM	H2 MFC set to  0.000000
10/4/2011	3:05:35 PM	BCl3 MFC set to  0.000000
10/4/2011	3:05:35 PM	PHl3 MFC set to  0.000000
10/4/2011	3:05:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:05:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:05:35 PM	Tube furnace set to 150
10/4/2011	3:06:05 PM	H2 valve closed
10/4/2011	3:06:05 PM	BCl3 valve closed
10/4/2011	3:06:05 PM	PH3 valve closed
10/4/2011	3:06:05 PM	SiCl4 pre valve closed
10/4/2011	3:06:05 PM	SiCl4 post valve closed
10/4/2011	3:06:05 PM	Bypass valve closed
10/4/2011	3:06:05 PM	Bubbler valve closed
10/4/2011	3:06:05 PM	Helium valve opened
10/4/2011	3:06:05 PM	Main Vac valve opened
10/4/2011	3:06:05 PM	Helium MFC set to  20.000000
10/4/2011	3:06:05 PM	H2 MFC set to  0.000000
10/4/2011	3:06:05 PM	BCl3 MFC set to  0.000000
10/4/2011	3:06:05 PM	PHl3 MFC set to  0.000000
10/4/2011	3:06:05 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:06:05 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:06:05 PM	Tube furnace set to 150
10/4/2011	3:06:35 PM	Helium valve closed
10/4/2011	3:06:35 PM	H2 valve closed
10/4/2011	3:06:35 PM	BCl3 valve closed
10/4/2011	3:06:35 PM	PH3 valve closed
10/4/2011	3:06:35 PM	SiCl4 pre valve closed
10/4/2011	3:06:35 PM	SiCl4 post valve closed
10/4/2011	3:06:35 PM	Bypass valve closed
10/4/2011	3:06:35 PM	Bubbler valve closed
10/4/2011	3:06:35 PM	Main Vac valve opened
10/4/2011	3:06:35 PM	Helium MFC set to  0.000000
10/4/2011	3:06:35 PM	H2 MFC set to  0.000000
10/4/2011	3:06:35 PM	BCl3 MFC set to  0.000000
10/4/2011	3:06:35 PM	PHl3 MFC set to  0.000000
10/4/2011	3:06:36 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:06:36 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:06:36 PM	Tube furnace set to 150
10/4/2011	3:07:06 PM	H2 valve closed
10/4/2011	3:07:06 PM	BCl3 valve closed
10/4/2011	3:07:06 PM	PH3 valve closed
10/4/2011	3:07:06 PM	SiCl4 pre valve closed
10/4/2011	3:07:06 PM	SiCl4 post valve closed
10/4/2011	3:07:06 PM	Bypass valve closed
10/4/2011	3:07:06 PM	Bubbler valve closed
10/4/2011	3:07:06 PM	Helium valve opened
10/4/2011	3:07:06 PM	Main Vac valve opened
10/4/2011	3:07:06 PM	Helium MFC set to  20.000000
10/4/2011	3:07:06 PM	H2 MFC set to  0.000000
10/4/2011	3:07:06 PM	BCl3 MFC set to  0.000000
10/4/2011	3:07:06 PM	PHl3 MFC set to  0.000000
10/4/2011	3:07:06 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:07:06 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:07:06 PM	Tube furnace set to 150
10/4/2011	3:07:36 PM	Helium valve closed
10/4/2011	3:07:36 PM	H2 valve closed
10/4/2011	3:07:36 PM	BCl3 valve closed
10/4/2011	3:07:36 PM	PH3 valve closed
10/4/2011	3:07:36 PM	SiCl4 pre valve closed
10/4/2011	3:07:36 PM	SiCl4 post valve closed
10/4/2011	3:07:36 PM	Bypass valve closed
10/4/2011	3:07:36 PM	Bubbler valve closed
10/4/2011	3:07:36 PM	Main Vac valve opened
10/4/2011	3:07:36 PM	Helium MFC set to  0.000000
10/4/2011	3:07:36 PM	H2 MFC set to  0.000000
10/4/2011	3:07:36 PM	BCl3 MFC set to  0.000000
10/4/2011	3:07:36 PM	PHl3 MFC set to  0.000000
10/4/2011	3:07:36 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:07:36 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:07:36 PM	Tube furnace set to 150
10/4/2011	3:08:06 PM	H2 valve closed
10/4/2011	3:08:06 PM	BCl3 valve closed
10/4/2011	3:08:06 PM	PH3 valve closed
10/4/2011	3:08:06 PM	SiCl4 pre valve closed
10/4/2011	3:08:06 PM	SiCl4 post valve closed
10/4/2011	3:08:06 PM	Bypass valve closed
10/4/2011	3:08:06 PM	Bubbler valve closed
10/4/2011	3:08:06 PM	Helium valve opened
10/4/2011	3:08:06 PM	Main Vac valve opened
10/4/2011	3:08:06 PM	Helium MFC set to  20.000000
10/4/2011	3:08:06 PM	H2 MFC set to  0.000000
10/4/2011	3:08:06 PM	BCl3 MFC set to  0.000000
10/4/2011	3:08:06 PM	PHl3 MFC set to  0.000000
10/4/2011	3:08:06 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:08:06 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:08:06 PM	Tube furnace set to 150
10/4/2011	3:08:36 PM	Helium valve closed
10/4/2011	3:08:36 PM	H2 valve closed
10/4/2011	3:08:36 PM	BCl3 valve closed
10/4/2011	3:08:36 PM	PH3 valve closed
10/4/2011	3:08:36 PM	SiCl4 pre valve closed
10/4/2011	3:08:36 PM	SiCl4 post valve closed
10/4/2011	3:08:36 PM	Bypass valve closed
10/4/2011	3:08:36 PM	Bubbler valve closed
10/4/2011	3:08:36 PM	Main Vac valve opened
10/4/2011	3:08:36 PM	Helium MFC set to  0.000000
10/4/2011	3:08:36 PM	H2 MFC set to  0.000000
10/4/2011	3:08:36 PM	BCl3 MFC set to  0.000000
10/4/2011	3:08:36 PM	PHl3 MFC set to  0.000000
10/4/2011	3:08:36 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:08:36 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:08:36 PM	Tube furnace set to 150
10/4/2011	3:09:06 PM	H2 valve closed
10/4/2011	3:09:07 PM	BCl3 valve closed
10/4/2011	3:09:07 PM	PH3 valve closed
10/4/2011	3:09:07 PM	SiCl4 pre valve closed
10/4/2011	3:09:07 PM	SiCl4 post valve closed
10/4/2011	3:09:07 PM	Bypass valve closed
10/4/2011	3:09:07 PM	Bubbler valve closed
10/4/2011	3:09:07 PM	Helium valve opened
10/4/2011	3:09:07 PM	Main Vac valve opened
10/4/2011	3:09:07 PM	Helium MFC set to  20.000000
10/4/2011	3:09:07 PM	H2 MFC set to  0.000000
10/4/2011	3:09:07 PM	BCl3 MFC set to  0.000000
10/4/2011	3:09:07 PM	PHl3 MFC set to  0.000000
10/4/2011	3:09:07 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:09:07 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:09:07 PM	Tube furnace set to 150
10/4/2011	3:09:37 PM	Helium valve closed
10/4/2011	3:09:37 PM	H2 valve closed
10/4/2011	3:09:37 PM	BCl3 valve closed
10/4/2011	3:09:37 PM	PH3 valve closed
10/4/2011	3:09:37 PM	SiCl4 pre valve closed
10/4/2011	3:09:37 PM	SiCl4 post valve closed
10/4/2011	3:09:37 PM	Bypass valve closed
10/4/2011	3:09:37 PM	Bubbler valve closed
10/4/2011	3:09:37 PM	Main Vac valve opened
10/4/2011	3:09:37 PM	Helium MFC set to  0.000000
10/4/2011	3:09:37 PM	H2 MFC set to  0.000000
10/4/2011	3:09:37 PM	BCl3 MFC set to  0.000000
10/4/2011	3:09:37 PM	PHl3 MFC set to  0.000000
10/4/2011	3:09:37 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:09:37 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:09:37 PM	Tube furnace set to 150
10/4/2011	3:10:07 PM	H2 valve closed
10/4/2011	3:10:07 PM	BCl3 valve closed
10/4/2011	3:10:07 PM	PH3 valve closed
10/4/2011	3:10:07 PM	SiCl4 pre valve closed
10/4/2011	3:10:07 PM	SiCl4 post valve closed
10/4/2011	3:10:07 PM	Bypass valve closed
10/4/2011	3:10:07 PM	Bubbler valve closed
10/4/2011	3:10:07 PM	Helium valve opened
10/4/2011	3:10:07 PM	Main Vac valve opened
10/4/2011	3:10:07 PM	Helium MFC set to  20.000000
10/4/2011	3:10:07 PM	H2 MFC set to  0.000000
10/4/2011	3:10:07 PM	BCl3 MFC set to  0.000000
10/4/2011	3:10:07 PM	PHl3 MFC set to  0.000000
10/4/2011	3:10:07 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:10:07 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:10:07 PM	Tube furnace set to 150
10/4/2011	3:10:37 PM	Helium valve closed
10/4/2011	3:10:37 PM	H2 valve closed
10/4/2011	3:10:37 PM	BCl3 valve closed
10/4/2011	3:10:37 PM	PH3 valve closed
10/4/2011	3:10:37 PM	SiCl4 pre valve closed
10/4/2011	3:10:37 PM	SiCl4 post valve closed
10/4/2011	3:10:37 PM	Bypass valve closed
10/4/2011	3:10:37 PM	Bubbler valve closed
10/4/2011	3:10:37 PM	Main Vac valve opened
10/4/2011	3:10:37 PM	Helium MFC set to  0.000000
10/4/2011	3:10:37 PM	H2 MFC set to  0.000000
10/4/2011	3:10:37 PM	BCl3 MFC set to  0.000000
10/4/2011	3:10:37 PM	PHl3 MFC set to  0.000000
10/4/2011	3:10:37 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:10:37 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:10:37 PM	Tube furnace set to 150
10/4/2011	3:11:07 PM	H2 valve closed
10/4/2011	3:11:07 PM	BCl3 valve closed
10/4/2011	3:11:07 PM	PH3 valve closed
10/4/2011	3:11:07 PM	SiCl4 pre valve closed
10/4/2011	3:11:07 PM	SiCl4 post valve closed
10/4/2011	3:11:07 PM	Bypass valve closed
10/4/2011	3:11:07 PM	Bubbler valve closed
10/4/2011	3:11:07 PM	Helium valve opened
10/4/2011	3:11:07 PM	Main Vac valve opened
10/4/2011	3:11:07 PM	Helium MFC set to  20.000000
10/4/2011	3:11:07 PM	H2 MFC set to  0.000000
10/4/2011	3:11:07 PM	BCl3 MFC set to  0.000000
10/4/2011	3:11:07 PM	PHl3 MFC set to  0.000000
10/4/2011	3:11:07 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:11:07 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:11:08 PM	Tube furnace set to 150
10/4/2011	3:11:38 PM	Helium valve closed
10/4/2011	3:11:38 PM	H2 valve closed
10/4/2011	3:11:38 PM	BCl3 valve closed
10/4/2011	3:11:38 PM	PH3 valve closed
10/4/2011	3:11:38 PM	SiCl4 pre valve closed
10/4/2011	3:11:38 PM	SiCl4 post valve closed
10/4/2011	3:11:38 PM	Bypass valve closed
10/4/2011	3:11:38 PM	Bubbler valve closed
10/4/2011	3:11:38 PM	Main Vac valve opened
10/4/2011	3:11:38 PM	Helium MFC set to  0.000000
10/4/2011	3:11:38 PM	H2 MFC set to  0.000000
10/4/2011	3:11:38 PM	BCl3 MFC set to  0.000000
10/4/2011	3:11:38 PM	PHl3 MFC set to  0.000000
10/4/2011	3:11:38 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:11:38 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:11:38 PM	Tube furnace set to 150
10/4/2011	3:12:08 PM	H2 valve closed
10/4/2011	3:12:08 PM	BCl3 valve closed
10/4/2011	3:12:08 PM	PH3 valve closed
10/4/2011	3:12:08 PM	SiCl4 pre valve closed
10/4/2011	3:12:08 PM	SiCl4 post valve closed
10/4/2011	3:12:08 PM	Bypass valve closed
10/4/2011	3:12:08 PM	Bubbler valve closed
10/4/2011	3:12:08 PM	Helium valve opened
10/4/2011	3:12:08 PM	Main Vac valve opened
10/4/2011	3:12:08 PM	Helium MFC set to  20.000000
10/4/2011	3:12:08 PM	H2 MFC set to  0.000000
10/4/2011	3:12:08 PM	BCl3 MFC set to  0.000000
10/4/2011	3:12:08 PM	PHl3 MFC set to  0.000000
10/4/2011	3:12:08 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:12:08 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:12:08 PM	Tube furnace set to 150
10/4/2011	3:12:38 PM	Helium valve closed
10/4/2011	3:12:38 PM	H2 valve closed
10/4/2011	3:12:38 PM	BCl3 valve closed
10/4/2011	3:12:38 PM	PH3 valve closed
10/4/2011	3:12:38 PM	SiCl4 pre valve closed
10/4/2011	3:12:38 PM	SiCl4 post valve closed
10/4/2011	3:12:38 PM	Bypass valve closed
10/4/2011	3:12:38 PM	Bubbler valve closed
10/4/2011	3:12:38 PM	Main Vac valve opened
10/4/2011	3:12:38 PM	Helium MFC set to  0.000000
10/4/2011	3:12:38 PM	H2 MFC set to  0.000000
10/4/2011	3:12:38 PM	BCl3 MFC set to  0.000000
10/4/2011	3:12:38 PM	PHl3 MFC set to  0.000000
10/4/2011	3:12:38 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:12:38 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:12:38 PM	Tube furnace set to 150
10/4/2011	3:13:08 PM	H2 valve closed
10/4/2011	3:13:08 PM	BCl3 valve closed
10/4/2011	3:13:08 PM	PH3 valve closed
10/4/2011	3:13:08 PM	SiCl4 pre valve closed
10/4/2011	3:13:08 PM	SiCl4 post valve closed
10/4/2011	3:13:08 PM	Bypass valve closed
10/4/2011	3:13:08 PM	Bubbler valve closed
10/4/2011	3:13:08 PM	Helium valve opened
10/4/2011	3:13:08 PM	Main Vac valve opened
10/4/2011	3:13:08 PM	Helium MFC set to  20.000000
10/4/2011	3:13:08 PM	H2 MFC set to  0.000000
10/4/2011	3:13:08 PM	BCl3 MFC set to  0.000000
10/4/2011	3:13:08 PM	PHl3 MFC set to  0.000000
10/4/2011	3:13:08 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:13:08 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:13:08 PM	Tube furnace set to 150
10/4/2011	3:13:38 PM	Helium valve closed
10/4/2011	3:13:38 PM	H2 valve closed
10/4/2011	3:13:38 PM	BCl3 valve closed
10/4/2011	3:13:38 PM	PH3 valve closed
10/4/2011	3:13:38 PM	SiCl4 pre valve closed
10/4/2011	3:13:38 PM	SiCl4 post valve closed
10/4/2011	3:13:38 PM	Bypass valve closed
10/4/2011	3:13:38 PM	Bubbler valve closed
10/4/2011	3:13:38 PM	Main Vac valve opened
10/4/2011	3:13:38 PM	Helium MFC set to  0.000000
10/4/2011	3:13:38 PM	H2 MFC set to  0.000000
10/4/2011	3:13:38 PM	BCl3 MFC set to  0.000000
10/4/2011	3:13:38 PM	PHl3 MFC set to  0.000000
10/4/2011	3:13:38 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:13:38 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:13:39 PM	Tube furnace set to 150
10/4/2011	3:14:09 PM	H2 valve closed
10/4/2011	3:14:09 PM	BCl3 valve closed
10/4/2011	3:14:09 PM	PH3 valve closed
10/4/2011	3:14:09 PM	SiCl4 pre valve closed
10/4/2011	3:14:09 PM	SiCl4 post valve closed
10/4/2011	3:14:09 PM	Bypass valve closed
10/4/2011	3:14:09 PM	Bubbler valve closed
10/4/2011	3:14:09 PM	Helium valve opened
10/4/2011	3:14:09 PM	Main Vac valve opened
10/4/2011	3:14:09 PM	Helium MFC set to  20.000000
10/4/2011	3:14:09 PM	H2 MFC set to  0.000000
10/4/2011	3:14:09 PM	BCl3 MFC set to  0.000000
10/4/2011	3:14:09 PM	PHl3 MFC set to  0.000000
10/4/2011	3:14:09 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:14:09 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:14:09 PM	Tube furnace set to 150
10/4/2011	3:14:39 PM	Helium valve closed
10/4/2011	3:14:39 PM	H2 valve closed
10/4/2011	3:14:39 PM	BCl3 valve closed
10/4/2011	3:14:39 PM	PH3 valve closed
10/4/2011	3:14:39 PM	SiCl4 pre valve closed
10/4/2011	3:14:39 PM	SiCl4 post valve closed
10/4/2011	3:14:39 PM	Bypass valve closed
10/4/2011	3:14:39 PM	Bubbler valve closed
10/4/2011	3:14:39 PM	Main Vac valve opened
10/4/2011	3:14:39 PM	Helium MFC set to  0.000000
10/4/2011	3:14:39 PM	H2 MFC set to  0.000000
10/4/2011	3:14:39 PM	BCl3 MFC set to  0.000000
10/4/2011	3:14:39 PM	PHl3 MFC set to  0.000000
10/4/2011	3:14:39 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:14:39 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:14:39 PM	Tube furnace set to 150
10/4/2011	3:15:09 PM	H2 valve closed
10/4/2011	3:15:09 PM	BCl3 valve closed
10/4/2011	3:15:09 PM	PH3 valve closed
10/4/2011	3:15:09 PM	SiCl4 pre valve closed
10/4/2011	3:15:09 PM	SiCl4 post valve closed
10/4/2011	3:15:09 PM	Bypass valve closed
10/4/2011	3:15:09 PM	Bubbler valve closed
10/4/2011	3:15:09 PM	Helium valve opened
10/4/2011	3:15:09 PM	Main Vac valve opened
10/4/2011	3:15:09 PM	Helium MFC set to  20.000000
10/4/2011	3:15:09 PM	H2 MFC set to  0.000000
10/4/2011	3:15:09 PM	BCl3 MFC set to  0.000000
10/4/2011	3:15:09 PM	PHl3 MFC set to  0.000000
10/4/2011	3:15:09 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:15:09 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:15:09 PM	Tube furnace set to 150
10/4/2011	3:15:39 PM	Helium valve closed
10/4/2011	3:15:39 PM	H2 valve closed
10/4/2011	3:15:39 PM	BCl3 valve closed
10/4/2011	3:15:39 PM	PH3 valve closed
10/4/2011	3:15:39 PM	SiCl4 pre valve closed
10/4/2011	3:15:39 PM	SiCl4 post valve closed
10/4/2011	3:15:39 PM	Bypass valve closed
10/4/2011	3:15:39 PM	Bubbler valve closed
10/4/2011	3:15:39 PM	Main Vac valve opened
10/4/2011	3:15:39 PM	Helium MFC set to  0.000000
10/4/2011	3:15:39 PM	H2 MFC set to  0.000000
10/4/2011	3:15:39 PM	BCl3 MFC set to  0.000000
10/4/2011	3:15:39 PM	PHl3 MFC set to  0.000000
10/4/2011	3:15:39 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:15:39 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:15:39 PM	Tube furnace set to 150
10/4/2011	3:16:09 PM	H2 valve closed
10/4/2011	3:16:09 PM	BCl3 valve closed
10/4/2011	3:16:09 PM	PH3 valve closed
10/4/2011	3:16:09 PM	SiCl4 pre valve closed
10/4/2011	3:16:09 PM	SiCl4 post valve closed
10/4/2011	3:16:09 PM	Bypass valve closed
10/4/2011	3:16:09 PM	Bubbler valve closed
10/4/2011	3:16:09 PM	Helium valve opened
10/4/2011	3:16:09 PM	Main Vac valve opened
10/4/2011	3:16:09 PM	Helium MFC set to  20.000000
10/4/2011	3:16:09 PM	H2 MFC set to  0.000000
10/4/2011	3:16:09 PM	BCl3 MFC set to  0.000000
10/4/2011	3:16:09 PM	PHl3 MFC set to  0.000000
10/4/2011	3:16:09 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:16:09 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:16:10 PM	Tube furnace set to 150
10/4/2011	3:16:40 PM	Helium valve closed
10/4/2011	3:16:40 PM	H2 valve closed
10/4/2011	3:16:40 PM	BCl3 valve closed
10/4/2011	3:16:40 PM	PH3 valve closed
10/4/2011	3:16:40 PM	SiCl4 pre valve closed
10/4/2011	3:16:40 PM	SiCl4 post valve closed
10/4/2011	3:16:40 PM	Bypass valve closed
10/4/2011	3:16:40 PM	Bubbler valve closed
10/4/2011	3:16:40 PM	Main Vac valve opened
10/4/2011	3:16:40 PM	Helium MFC set to  0.000000
10/4/2011	3:16:40 PM	H2 MFC set to  0.000000
10/4/2011	3:16:40 PM	BCl3 MFC set to  0.000000
10/4/2011	3:16:40 PM	PHl3 MFC set to  0.000000
10/4/2011	3:16:40 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:16:40 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:16:40 PM	Tube furnace set to 150
10/4/2011	3:17:10 PM	H2 valve closed
10/4/2011	3:17:10 PM	BCl3 valve closed
10/4/2011	3:17:10 PM	PH3 valve closed
10/4/2011	3:17:10 PM	SiCl4 pre valve closed
10/4/2011	3:17:10 PM	SiCl4 post valve closed
10/4/2011	3:17:10 PM	Bypass valve closed
10/4/2011	3:17:10 PM	Bubbler valve closed
10/4/2011	3:17:10 PM	Helium valve opened
10/4/2011	3:17:10 PM	Main Vac valve opened
10/4/2011	3:17:10 PM	Helium MFC set to  20.000000
10/4/2011	3:17:10 PM	H2 MFC set to  0.000000
10/4/2011	3:17:10 PM	BCl3 MFC set to  0.000000
10/4/2011	3:17:10 PM	PHl3 MFC set to  0.000000
10/4/2011	3:17:10 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:17:10 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:17:10 PM	Tube furnace set to 150
10/4/2011	3:17:40 PM	Helium valve closed
10/4/2011	3:17:40 PM	H2 valve closed
10/4/2011	3:17:40 PM	BCl3 valve closed
10/4/2011	3:17:40 PM	PH3 valve closed
10/4/2011	3:17:40 PM	SiCl4 pre valve closed
10/4/2011	3:17:40 PM	SiCl4 post valve closed
10/4/2011	3:17:40 PM	Bypass valve closed
10/4/2011	3:17:40 PM	Bubbler valve closed
10/4/2011	3:17:40 PM	Main Vac valve opened
10/4/2011	3:17:40 PM	Helium MFC set to  0.000000
10/4/2011	3:17:40 PM	H2 MFC set to  0.000000
10/4/2011	3:17:40 PM	BCl3 MFC set to  0.000000
10/4/2011	3:17:40 PM	PHl3 MFC set to  0.000000
10/4/2011	3:17:40 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:17:40 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:17:40 PM	Tube furnace set to 150
10/4/2011	3:18:10 PM	H2 valve closed
10/4/2011	3:18:10 PM	BCl3 valve closed
10/4/2011	3:18:10 PM	PH3 valve closed
10/4/2011	3:18:10 PM	SiCl4 pre valve closed
10/4/2011	3:18:10 PM	SiCl4 post valve closed
10/4/2011	3:18:10 PM	Bypass valve closed
10/4/2011	3:18:10 PM	Bubbler valve closed
10/4/2011	3:18:10 PM	Helium valve opened
10/4/2011	3:18:10 PM	Main Vac valve opened
10/4/2011	3:18:10 PM	Helium MFC set to  20.000000
10/4/2011	3:18:10 PM	H2 MFC set to  0.000000
10/4/2011	3:18:10 PM	BCl3 MFC set to  0.000000
10/4/2011	3:18:10 PM	PHl3 MFC set to  0.000000
10/4/2011	3:18:10 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:18:10 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:18:10 PM	Tube furnace set to 150
10/4/2011	3:18:40 PM	Helium valve closed
10/4/2011	3:18:40 PM	H2 valve closed
10/4/2011	3:18:40 PM	BCl3 valve closed
10/4/2011	3:18:40 PM	PH3 valve closed
10/4/2011	3:18:40 PM	SiCl4 pre valve closed
10/4/2011	3:18:40 PM	SiCl4 post valve closed
10/4/2011	3:18:40 PM	Bypass valve closed
10/4/2011	3:18:40 PM	Bubbler valve closed
10/4/2011	3:18:40 PM	Main Vac valve opened
10/4/2011	3:18:40 PM	Helium MFC set to  0.000000
10/4/2011	3:18:40 PM	H2 MFC set to  0.000000
10/4/2011	3:18:40 PM	BCl3 MFC set to  0.000000
10/4/2011	3:18:40 PM	PHl3 MFC set to  0.000000
10/4/2011	3:18:40 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:18:40 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:18:41 PM	Tube furnace set to 150
10/4/2011	3:19:11 PM	H2 valve closed
10/4/2011	3:19:11 PM	BCl3 valve closed
10/4/2011	3:19:11 PM	PH3 valve closed
10/4/2011	3:19:11 PM	SiCl4 pre valve closed
10/4/2011	3:19:11 PM	SiCl4 post valve closed
10/4/2011	3:19:11 PM	Bypass valve closed
10/4/2011	3:19:11 PM	Bubbler valve closed
10/4/2011	3:19:11 PM	Helium valve opened
10/4/2011	3:19:11 PM	Main Vac valve opened
10/4/2011	3:19:11 PM	Helium MFC set to  20.000000
10/4/2011	3:19:11 PM	H2 MFC set to  0.000000
10/4/2011	3:19:11 PM	BCl3 MFC set to  0.000000
10/4/2011	3:19:11 PM	PHl3 MFC set to  0.000000
10/4/2011	3:19:11 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:19:11 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:19:11 PM	Tube furnace set to 150
10/4/2011	3:19:41 PM	Helium valve closed
10/4/2011	3:19:41 PM	H2 valve closed
10/4/2011	3:19:41 PM	BCl3 valve closed
10/4/2011	3:19:41 PM	PH3 valve closed
10/4/2011	3:19:41 PM	SiCl4 pre valve closed
10/4/2011	3:19:41 PM	SiCl4 post valve closed
10/4/2011	3:19:41 PM	Bypass valve closed
10/4/2011	3:19:41 PM	Bubbler valve closed
10/4/2011	3:19:41 PM	Main Vac valve opened
10/4/2011	3:19:41 PM	Helium MFC set to  0.000000
10/4/2011	3:19:41 PM	H2 MFC set to  0.000000
10/4/2011	3:19:41 PM	BCl3 MFC set to  0.000000
10/4/2011	3:19:41 PM	PHl3 MFC set to  0.000000
10/4/2011	3:19:41 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:19:41 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:19:41 PM	Tube furnace set to 150
10/4/2011	3:20:11 PM	H2 valve closed
10/4/2011	3:20:11 PM	BCl3 valve closed
10/4/2011	3:20:11 PM	PH3 valve closed
10/4/2011	3:20:11 PM	SiCl4 pre valve closed
10/4/2011	3:20:11 PM	SiCl4 post valve closed
10/4/2011	3:20:11 PM	Bypass valve closed
10/4/2011	3:20:11 PM	Bubbler valve closed
10/4/2011	3:20:11 PM	Helium valve opened
10/4/2011	3:20:11 PM	Main Vac valve opened
10/4/2011	3:20:11 PM	Helium MFC set to  20.000000
10/4/2011	3:20:11 PM	H2 MFC set to  0.000000
10/4/2011	3:20:11 PM	BCl3 MFC set to  0.000000
10/4/2011	3:20:11 PM	PHl3 MFC set to  0.000000
10/4/2011	3:20:11 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:20:11 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:20:11 PM	Tube furnace set to 150
10/4/2011	3:20:41 PM	Helium valve closed
10/4/2011	3:20:41 PM	H2 valve closed
10/4/2011	3:20:41 PM	BCl3 valve closed
10/4/2011	3:20:41 PM	PH3 valve closed
10/4/2011	3:20:41 PM	SiCl4 pre valve closed
10/4/2011	3:20:41 PM	SiCl4 post valve closed
10/4/2011	3:20:41 PM	Bypass valve closed
10/4/2011	3:20:41 PM	Bubbler valve closed
10/4/2011	3:20:41 PM	Main Vac valve opened
10/4/2011	3:20:41 PM	Helium MFC set to  0.000000
10/4/2011	3:20:41 PM	H2 MFC set to  0.000000
10/4/2011	3:20:41 PM	BCl3 MFC set to  0.000000
10/4/2011	3:20:41 PM	PHl3 MFC set to  0.000000
10/4/2011	3:20:41 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:20:41 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:20:41 PM	Tube furnace set to 180
10/4/2011	3:20:46 PM	Run finished at 3:20 PM
10/4/2011	3:23:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2011	3:23:51 PM	Recipe started at 3:23 PM
10/4/2011	3:23:51 PM	Helium valve closed
10/4/2011	3:23:51 PM	H2 valve closed
10/4/2011	3:23:51 PM	BCl3 valve closed
10/4/2011	3:23:51 PM	PH3 valve closed
10/4/2011	3:23:51 PM	SiCl4 pre valve closed
10/4/2011	3:23:51 PM	SiCl4 post valve closed
10/4/2011	3:23:51 PM	Main Vac valve closed
10/4/2011	3:23:51 PM	Bypass valve closed
10/4/2011	3:23:51 PM	Bubbler valve closed
10/4/2011	3:23:51 PM	Helium MFC set to  0.000000
10/4/2011	3:23:51 PM	H2 MFC set to  0.000000
10/4/2011	3:23:51 PM	BCl3 MFC set to  0.000000
10/4/2011	3:23:51 PM	PHl3 MFC set to  0.000000
10/4/2011	3:23:51 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:23:51 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:23:51 PM	Tube furnace set to 0
10/4/2011	3:23:54 PM	H2 valve closed
10/4/2011	3:23:54 PM	BCl3 valve closed
10/4/2011	3:23:54 PM	PH3 valve closed
10/4/2011	3:23:54 PM	SiCl4 pre valve closed
10/4/2011	3:23:54 PM	SiCl4 post valve closed
10/4/2011	3:23:54 PM	Main Vac valve closed
10/4/2011	3:23:54 PM	Bypass valve closed
10/4/2011	3:23:54 PM	Bubbler valve closed
10/4/2011	3:23:54 PM	Helium valve opened
10/4/2011	3:23:54 PM	Helium MFC set to  500.000000
10/4/2011	3:23:54 PM	H2 MFC set to  0.000000
10/4/2011	3:23:54 PM	BCl3 MFC set to  0.000000
10/4/2011	3:23:54 PM	PHl3 MFC set to  0.000000
10/4/2011	3:23:54 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:23:54 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:23:54 PM	Tube furnace set to 0
10/4/2011	3:24:56 PM	Helium valve closed
10/4/2011	3:24:56 PM	H2 valve closed
10/4/2011	3:24:56 PM	BCl3 valve closed
10/4/2011	3:24:56 PM	PH3 valve closed
10/4/2011	3:24:56 PM	SiCl4 pre valve closed
10/4/2011	3:24:56 PM	SiCl4 post valve closed
10/4/2011	3:24:56 PM	Main Vac valve closed
10/4/2011	3:24:56 PM	Bypass valve closed
10/4/2011	3:24:56 PM	Bubbler valve closed
10/4/2011	3:24:56 PM	Helium MFC set to  0.000000
10/4/2011	3:24:56 PM	H2 MFC set to  0.000000
10/4/2011	3:24:56 PM	BCl3 MFC set to  0.000000
10/4/2011	3:24:56 PM	PHl3 MFC set to  0.000000
10/4/2011	3:24:56 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:24:56 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:24:56 PM	Tube furnace set to 0
10/4/2011	3:24:57 PM	Run finished at 3:24 PM
10/4/2011	3:24:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2011	3:33:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2011	3:33:49 PM	Recipe started at 3:33 PM
10/4/2011	3:33:50 PM	Helium valve closed
10/4/2011	3:33:50 PM	H2 valve closed
10/4/2011	3:33:50 PM	BCl3 valve closed
10/4/2011	3:33:50 PM	PH3 valve closed
10/4/2011	3:33:50 PM	SiCl4 pre valve closed
10/4/2011	3:33:50 PM	SiCl4 post valve closed
10/4/2011	3:33:50 PM	Main Vac valve closed
10/4/2011	3:33:50 PM	Bubbler valve closed
10/4/2011	3:33:50 PM	Bypass valve opened
10/4/2011	3:33:50 PM	Helium MFC set to  0.000000
10/4/2011	3:33:50 PM	H2 MFC set to  0.000000
10/4/2011	3:33:50 PM	BCl3 MFC set to  0.000000
10/4/2011	3:33:50 PM	PHl3 MFC set to  0.000000
10/4/2011	3:33:50 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:33:50 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:33:50 PM	Tube furnace set to 0
10/4/2011	3:34:59 PM	Helium valve closed
10/4/2011	3:34:59 PM	H2 valve closed
10/4/2011	3:34:59 PM	BCl3 valve closed
10/4/2011	3:34:59 PM	PH3 valve closed
10/4/2011	3:34:59 PM	SiCl4 pre valve closed
10/4/2011	3:34:59 PM	SiCl4 post valve closed
10/4/2011	3:34:59 PM	Main Vac valve closed
10/4/2011	3:34:59 PM	Bubbler valve closed
10/4/2011	3:34:59 PM	Bypass valve opened
10/4/2011	3:34:59 PM	Helium MFC set to  0.000000
10/4/2011	3:34:59 PM	H2 MFC set to  0.000000
10/4/2011	3:34:59 PM	BCl3 MFC set to  0.000000
10/4/2011	3:34:59 PM	PHl3 MFC set to  0.000000
10/4/2011	3:34:59 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:34:59 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:34:59 PM	Tube furnace set to 0
10/4/2011	3:35:08 PM	Helium valve closed
10/4/2011	3:35:08 PM	H2 valve closed
10/4/2011	3:35:08 PM	BCl3 valve closed
10/4/2011	3:35:08 PM	PH3 valve closed
10/4/2011	3:35:08 PM	SiCl4 pre valve closed
10/4/2011	3:35:08 PM	SiCl4 post valve closed
10/4/2011	3:35:08 PM	Bypass valve closed
10/4/2011	3:35:08 PM	Bubbler valve closed
10/4/2011	3:35:08 PM	Main Vac valve opened
10/4/2011	3:35:08 PM	Helium MFC set to  0.000000
10/4/2011	3:35:08 PM	H2 MFC set to  0.000000
10/4/2011	3:35:08 PM	BCl3 MFC set to  0.000000
10/4/2011	3:35:08 PM	PHl3 MFC set to  0.000000
10/4/2011	3:35:08 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:35:08 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:35:08 PM	Tube furnace set to 0
10/4/2011	3:35:09 PM	Run finished at 3:35 PM
10/4/2011	3:35:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2011	3:35:28 PM	Recipe started at 3:35 PM
10/4/2011	3:35:28 PM	Helium valve closed
10/4/2011	3:35:28 PM	H2 valve closed
10/4/2011	3:35:28 PM	BCl3 valve closed
10/4/2011	3:35:28 PM	PH3 valve closed
10/4/2011	3:35:28 PM	SiCl4 pre valve closed
10/4/2011	3:35:28 PM	SiCl4 post valve closed
10/4/2011	3:35:28 PM	Main Vac valve closed
10/4/2011	3:35:28 PM	Bubbler valve closed
10/4/2011	3:35:28 PM	Bypass valve opened
10/4/2011	3:35:28 PM	Helium MFC set to  0.000000
10/4/2011	3:35:28 PM	H2 MFC set to  0.000000
10/4/2011	3:35:28 PM	BCl3 MFC set to  0.000000
10/4/2011	3:35:28 PM	PHl3 MFC set to  0.000000
10/4/2011	3:35:28 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:35:28 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:35:28 PM	Tube furnace set to 150
10/4/2011	3:35:28 PM	Helium valve closed
10/4/2011	3:35:28 PM	H2 valve closed
10/4/2011	3:35:28 PM	BCl3 valve closed
10/4/2011	3:35:28 PM	PH3 valve closed
10/4/2011	3:35:28 PM	SiCl4 pre valve closed
10/4/2011	3:35:28 PM	SiCl4 post valve closed
10/4/2011	3:35:28 PM	Main Vac valve closed
10/4/2011	3:35:28 PM	Bubbler valve closed
10/4/2011	3:35:28 PM	Bypass valve opened
10/4/2011	3:35:28 PM	Helium MFC set to  0.000000
10/4/2011	3:35:28 PM	H2 MFC set to  0.000000
10/4/2011	3:35:28 PM	BCl3 MFC set to  0.000000
10/4/2011	3:35:28 PM	PHl3 MFC set to  0.000000
10/4/2011	3:35:28 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:35:28 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:35:28 PM	Tube furnace set to 150
10/4/2011	3:35:32 PM	Helium valve closed
10/4/2011	3:35:32 PM	H2 valve closed
10/4/2011	3:35:32 PM	BCl3 valve closed
10/4/2011	3:35:32 PM	PH3 valve closed
10/4/2011	3:35:32 PM	SiCl4 pre valve closed
10/4/2011	3:35:32 PM	SiCl4 post valve closed
10/4/2011	3:35:32 PM	Bypass valve closed
10/4/2011	3:35:32 PM	Bubbler valve closed
10/4/2011	3:35:32 PM	Main Vac valve opened
10/4/2011	3:35:32 PM	Helium MFC set to  0.000000
10/4/2011	3:35:32 PM	H2 MFC set to  0.000000
10/4/2011	3:35:32 PM	BCl3 MFC set to  0.000000
10/4/2011	3:35:32 PM	PHl3 MFC set to  0.000000
10/4/2011	3:35:32 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:35:32 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:35:33 PM	Tube furnace set to 150
10/4/2011	3:36:03 PM	H2 valve closed
10/4/2011	3:36:03 PM	BCl3 valve closed
10/4/2011	3:36:03 PM	PH3 valve closed
10/4/2011	3:36:03 PM	SiCl4 pre valve closed
10/4/2011	3:36:03 PM	SiCl4 post valve closed
10/4/2011	3:36:03 PM	Bypass valve closed
10/4/2011	3:36:03 PM	Bubbler valve closed
10/4/2011	3:36:03 PM	Helium valve opened
10/4/2011	3:36:03 PM	Main Vac valve opened
10/4/2011	3:36:03 PM	Helium MFC set to  20.000000
10/4/2011	3:36:03 PM	H2 MFC set to  0.000000
10/4/2011	3:36:03 PM	BCl3 MFC set to  0.000000
10/4/2011	3:36:03 PM	PHl3 MFC set to  0.000000
10/4/2011	3:36:03 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:36:03 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:36:03 PM	Tube furnace set to 150
10/4/2011	3:36:33 PM	Helium valve closed
10/4/2011	3:36:33 PM	H2 valve closed
10/4/2011	3:36:33 PM	BCl3 valve closed
10/4/2011	3:36:33 PM	PH3 valve closed
10/4/2011	3:36:33 PM	SiCl4 pre valve closed
10/4/2011	3:36:33 PM	SiCl4 post valve closed
10/4/2011	3:36:33 PM	Bypass valve closed
10/4/2011	3:36:33 PM	Bubbler valve closed
10/4/2011	3:36:33 PM	Main Vac valve opened
10/4/2011	3:36:33 PM	Helium MFC set to  0.000000
10/4/2011	3:36:33 PM	H2 MFC set to  0.000000
10/4/2011	3:36:33 PM	BCl3 MFC set to  0.000000
10/4/2011	3:36:33 PM	PHl3 MFC set to  0.000000
10/4/2011	3:36:33 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:36:33 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:36:33 PM	Tube furnace set to 150
10/4/2011	3:37:03 PM	H2 valve closed
10/4/2011	3:37:03 PM	BCl3 valve closed
10/4/2011	3:37:03 PM	PH3 valve closed
10/4/2011	3:37:03 PM	SiCl4 pre valve closed
10/4/2011	3:37:03 PM	SiCl4 post valve closed
10/4/2011	3:37:03 PM	Bypass valve closed
10/4/2011	3:37:03 PM	Bubbler valve closed
10/4/2011	3:37:03 PM	Helium valve opened
10/4/2011	3:37:03 PM	Main Vac valve opened
10/4/2011	3:37:03 PM	Helium MFC set to  20.000000
10/4/2011	3:37:03 PM	H2 MFC set to  0.000000
10/4/2011	3:37:03 PM	BCl3 MFC set to  0.000000
10/4/2011	3:37:03 PM	PHl3 MFC set to  0.000000
10/4/2011	3:37:03 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:37:03 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:37:03 PM	Tube furnace set to 150
10/4/2011	3:37:33 PM	Helium valve closed
10/4/2011	3:37:33 PM	H2 valve closed
10/4/2011	3:37:33 PM	BCl3 valve closed
10/4/2011	3:37:33 PM	PH3 valve closed
10/4/2011	3:37:33 PM	SiCl4 pre valve closed
10/4/2011	3:37:33 PM	SiCl4 post valve closed
10/4/2011	3:37:33 PM	Bypass valve closed
10/4/2011	3:37:33 PM	Bubbler valve closed
10/4/2011	3:37:33 PM	Main Vac valve opened
10/4/2011	3:37:33 PM	Helium MFC set to  0.000000
10/4/2011	3:37:33 PM	H2 MFC set to  0.000000
10/4/2011	3:37:33 PM	BCl3 MFC set to  0.000000
10/4/2011	3:37:33 PM	PHl3 MFC set to  0.000000
10/4/2011	3:37:33 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:37:33 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:37:33 PM	Tube furnace set to 150
10/4/2011	3:38:03 PM	H2 valve closed
10/4/2011	3:38:03 PM	BCl3 valve closed
10/4/2011	3:38:03 PM	PH3 valve closed
10/4/2011	3:38:03 PM	SiCl4 pre valve closed
10/4/2011	3:38:03 PM	SiCl4 post valve closed
10/4/2011	3:38:03 PM	Bypass valve closed
10/4/2011	3:38:03 PM	Bubbler valve closed
10/4/2011	3:38:04 PM	Helium valve opened
10/4/2011	3:38:04 PM	Main Vac valve opened
10/4/2011	3:38:04 PM	Helium MFC set to  20.000000
10/4/2011	3:38:04 PM	H2 MFC set to  0.000000
10/4/2011	3:38:04 PM	BCl3 MFC set to  0.000000
10/4/2011	3:38:04 PM	PHl3 MFC set to  0.000000
10/4/2011	3:38:04 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:38:04 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:38:04 PM	Tube furnace set to 150
10/4/2011	3:38:34 PM	Helium valve closed
10/4/2011	3:38:34 PM	H2 valve closed
10/4/2011	3:38:34 PM	BCl3 valve closed
10/4/2011	3:38:34 PM	PH3 valve closed
10/4/2011	3:38:34 PM	SiCl4 pre valve closed
10/4/2011	3:38:34 PM	SiCl4 post valve closed
10/4/2011	3:38:34 PM	Bypass valve closed
10/4/2011	3:38:34 PM	Bubbler valve closed
10/4/2011	3:38:34 PM	Main Vac valve opened
10/4/2011	3:38:34 PM	Helium MFC set to  0.000000
10/4/2011	3:38:34 PM	H2 MFC set to  0.000000
10/4/2011	3:38:34 PM	BCl3 MFC set to  0.000000
10/4/2011	3:38:34 PM	PHl3 MFC set to  0.000000
10/4/2011	3:38:34 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:38:34 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:38:34 PM	Tube furnace set to 150
10/4/2011	3:39:04 PM	H2 valve closed
10/4/2011	3:39:04 PM	BCl3 valve closed
10/4/2011	3:39:04 PM	PH3 valve closed
10/4/2011	3:39:04 PM	SiCl4 pre valve closed
10/4/2011	3:39:04 PM	SiCl4 post valve closed
10/4/2011	3:39:04 PM	Bypass valve closed
10/4/2011	3:39:04 PM	Bubbler valve closed
10/4/2011	3:39:04 PM	Helium valve opened
10/4/2011	3:39:04 PM	Main Vac valve opened
10/4/2011	3:39:04 PM	Helium MFC set to  20.000000
10/4/2011	3:39:04 PM	H2 MFC set to  0.000000
10/4/2011	3:39:04 PM	BCl3 MFC set to  0.000000
10/4/2011	3:39:04 PM	PHl3 MFC set to  0.000000
10/4/2011	3:39:04 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:39:04 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:39:04 PM	Tube furnace set to 150
10/4/2011	3:39:34 PM	Helium valve closed
10/4/2011	3:39:34 PM	H2 valve closed
10/4/2011	3:39:34 PM	BCl3 valve closed
10/4/2011	3:39:34 PM	PH3 valve closed
10/4/2011	3:39:34 PM	SiCl4 pre valve closed
10/4/2011	3:39:34 PM	SiCl4 post valve closed
10/4/2011	3:39:34 PM	Bypass valve closed
10/4/2011	3:39:34 PM	Bubbler valve closed
10/4/2011	3:39:34 PM	Main Vac valve opened
10/4/2011	3:39:34 PM	Helium MFC set to  0.000000
10/4/2011	3:39:34 PM	H2 MFC set to  0.000000
10/4/2011	3:39:34 PM	BCl3 MFC set to  0.000000
10/4/2011	3:39:34 PM	PHl3 MFC set to  0.000000
10/4/2011	3:39:34 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:39:34 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:39:34 PM	Tube furnace set to 150
10/4/2011	3:40:04 PM	H2 valve closed
10/4/2011	3:40:04 PM	BCl3 valve closed
10/4/2011	3:40:04 PM	PH3 valve closed
10/4/2011	3:40:04 PM	SiCl4 pre valve closed
10/4/2011	3:40:04 PM	SiCl4 post valve closed
10/4/2011	3:40:04 PM	Bypass valve closed
10/4/2011	3:40:04 PM	Bubbler valve closed
10/4/2011	3:40:04 PM	Helium valve opened
10/4/2011	3:40:04 PM	Main Vac valve opened
10/4/2011	3:40:04 PM	Helium MFC set to  20.000000
10/4/2011	3:40:04 PM	H2 MFC set to  0.000000
10/4/2011	3:40:04 PM	BCl3 MFC set to  0.000000
10/4/2011	3:40:04 PM	PHl3 MFC set to  0.000000
10/4/2011	3:40:04 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:40:04 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:40:04 PM	Tube furnace set to 150
10/4/2011	3:40:35 PM	Helium valve closed
10/4/2011	3:40:35 PM	H2 valve closed
10/4/2011	3:40:35 PM	BCl3 valve closed
10/4/2011	3:40:35 PM	PH3 valve closed
10/4/2011	3:40:35 PM	SiCl4 pre valve closed
10/4/2011	3:40:35 PM	SiCl4 post valve closed
10/4/2011	3:40:35 PM	Bypass valve closed
10/4/2011	3:40:35 PM	Bubbler valve closed
10/4/2011	3:40:35 PM	Main Vac valve opened
10/4/2011	3:40:35 PM	Helium MFC set to  0.000000
10/4/2011	3:40:35 PM	H2 MFC set to  0.000000
10/4/2011	3:40:35 PM	BCl3 MFC set to  0.000000
10/4/2011	3:40:35 PM	PHl3 MFC set to  0.000000
10/4/2011	3:40:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:40:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:40:35 PM	Tube furnace set to 150
10/4/2011	3:41:05 PM	H2 valve closed
10/4/2011	3:41:05 PM	BCl3 valve closed
10/4/2011	3:41:05 PM	PH3 valve closed
10/4/2011	3:41:05 PM	SiCl4 pre valve closed
10/4/2011	3:41:05 PM	SiCl4 post valve closed
10/4/2011	3:41:05 PM	Bypass valve closed
10/4/2011	3:41:05 PM	Bubbler valve closed
10/4/2011	3:41:05 PM	Helium valve opened
10/4/2011	3:41:05 PM	Main Vac valve opened
10/4/2011	3:41:05 PM	Helium MFC set to  20.000000
10/4/2011	3:41:05 PM	H2 MFC set to  0.000000
10/4/2011	3:41:05 PM	BCl3 MFC set to  0.000000
10/4/2011	3:41:05 PM	PHl3 MFC set to  0.000000
10/4/2011	3:41:05 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:41:05 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:41:05 PM	Tube furnace set to 150
10/4/2011	3:41:35 PM	Helium valve closed
10/4/2011	3:41:35 PM	H2 valve closed
10/4/2011	3:41:35 PM	BCl3 valve closed
10/4/2011	3:41:35 PM	PH3 valve closed
10/4/2011	3:41:35 PM	SiCl4 pre valve closed
10/4/2011	3:41:35 PM	SiCl4 post valve closed
10/4/2011	3:41:35 PM	Bypass valve closed
10/4/2011	3:41:35 PM	Bubbler valve closed
10/4/2011	3:41:35 PM	Main Vac valve opened
10/4/2011	3:41:35 PM	Helium MFC set to  0.000000
10/4/2011	3:41:35 PM	H2 MFC set to  0.000000
10/4/2011	3:41:35 PM	BCl3 MFC set to  0.000000
10/4/2011	3:41:35 PM	PHl3 MFC set to  0.000000
10/4/2011	3:41:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:41:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:41:35 PM	Tube furnace set to 150
10/4/2011	3:42:05 PM	H2 valve closed
10/4/2011	3:42:05 PM	BCl3 valve closed
10/4/2011	3:42:05 PM	PH3 valve closed
10/4/2011	3:42:05 PM	SiCl4 pre valve closed
10/4/2011	3:42:05 PM	SiCl4 post valve closed
10/4/2011	3:42:05 PM	Bypass valve closed
10/4/2011	3:42:05 PM	Bubbler valve closed
10/4/2011	3:42:05 PM	Helium valve opened
10/4/2011	3:42:05 PM	Main Vac valve opened
10/4/2011	3:42:05 PM	Helium MFC set to  20.000000
10/4/2011	3:42:05 PM	H2 MFC set to  0.000000
10/4/2011	3:42:05 PM	BCl3 MFC set to  0.000000
10/4/2011	3:42:05 PM	PHl3 MFC set to  0.000000
10/4/2011	3:42:05 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:42:05 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:42:05 PM	Tube furnace set to 150
10/4/2011	3:42:35 PM	Helium valve closed
10/4/2011	3:42:35 PM	H2 valve closed
10/4/2011	3:42:35 PM	BCl3 valve closed
10/4/2011	3:42:35 PM	PH3 valve closed
10/4/2011	3:42:35 PM	SiCl4 pre valve closed
10/4/2011	3:42:35 PM	SiCl4 post valve closed
10/4/2011	3:42:35 PM	Bypass valve closed
10/4/2011	3:42:35 PM	Bubbler valve closed
10/4/2011	3:42:35 PM	Main Vac valve opened
10/4/2011	3:42:35 PM	Helium MFC set to  0.000000
10/4/2011	3:42:35 PM	H2 MFC set to  0.000000
10/4/2011	3:42:35 PM	BCl3 MFC set to  0.000000
10/4/2011	3:42:35 PM	PHl3 MFC set to  0.000000
10/4/2011	3:42:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:42:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:42:36 PM	Tube furnace set to 150
10/4/2011	3:43:06 PM	H2 valve closed
10/4/2011	3:43:06 PM	BCl3 valve closed
10/4/2011	3:43:06 PM	PH3 valve closed
10/4/2011	3:43:06 PM	SiCl4 pre valve closed
10/4/2011	3:43:06 PM	SiCl4 post valve closed
10/4/2011	3:43:06 PM	Bypass valve closed
10/4/2011	3:43:06 PM	Bubbler valve closed
10/4/2011	3:43:06 PM	Helium valve opened
10/4/2011	3:43:06 PM	Main Vac valve opened
10/4/2011	3:43:06 PM	Helium MFC set to  20.000000
10/4/2011	3:43:06 PM	H2 MFC set to  0.000000
10/4/2011	3:43:06 PM	BCl3 MFC set to  0.000000
10/4/2011	3:43:06 PM	PHl3 MFC set to  0.000000
10/4/2011	3:43:06 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:43:06 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:43:06 PM	Tube furnace set to 150
10/4/2011	3:43:36 PM	Helium valve closed
10/4/2011	3:43:36 PM	H2 valve closed
10/4/2011	3:43:36 PM	BCl3 valve closed
10/4/2011	3:43:36 PM	PH3 valve closed
10/4/2011	3:43:36 PM	SiCl4 pre valve closed
10/4/2011	3:43:36 PM	SiCl4 post valve closed
10/4/2011	3:43:36 PM	Bypass valve closed
10/4/2011	3:43:36 PM	Bubbler valve closed
10/4/2011	3:43:36 PM	Main Vac valve opened
10/4/2011	3:43:36 PM	Helium MFC set to  0.000000
10/4/2011	3:43:36 PM	H2 MFC set to  0.000000
10/4/2011	3:43:36 PM	BCl3 MFC set to  0.000000
10/4/2011	3:43:36 PM	PHl3 MFC set to  0.000000
10/4/2011	3:43:36 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:43:36 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:43:36 PM	Tube furnace set to 150
10/4/2011	3:44:06 PM	H2 valve closed
10/4/2011	3:44:06 PM	BCl3 valve closed
10/4/2011	3:44:06 PM	PH3 valve closed
10/4/2011	3:44:06 PM	SiCl4 pre valve closed
10/4/2011	3:44:06 PM	SiCl4 post valve closed
10/4/2011	3:44:06 PM	Bypass valve closed
10/4/2011	3:44:06 PM	Bubbler valve closed
10/4/2011	3:44:06 PM	Helium valve opened
10/4/2011	3:44:06 PM	Main Vac valve opened
10/4/2011	3:44:06 PM	Helium MFC set to  20.000000
10/4/2011	3:44:06 PM	H2 MFC set to  0.000000
10/4/2011	3:44:06 PM	BCl3 MFC set to  0.000000
10/4/2011	3:44:06 PM	PHl3 MFC set to  0.000000
10/4/2011	3:44:06 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:44:06 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:44:06 PM	Tube furnace set to 150
10/4/2011	3:44:36 PM	Helium valve closed
10/4/2011	3:44:36 PM	H2 valve closed
10/4/2011	3:44:36 PM	BCl3 valve closed
10/4/2011	3:44:36 PM	PH3 valve closed
10/4/2011	3:44:36 PM	SiCl4 pre valve closed
10/4/2011	3:44:36 PM	SiCl4 post valve closed
10/4/2011	3:44:36 PM	Bypass valve closed
10/4/2011	3:44:36 PM	Bubbler valve closed
10/4/2011	3:44:36 PM	Main Vac valve opened
10/4/2011	3:44:36 PM	Helium MFC set to  0.000000
10/4/2011	3:44:36 PM	H2 MFC set to  0.000000
10/4/2011	3:44:36 PM	BCl3 MFC set to  0.000000
10/4/2011	3:44:36 PM	PHl3 MFC set to  0.000000
10/4/2011	3:44:36 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:44:36 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:44:36 PM	Tube furnace set to 150
10/4/2011	3:45:06 PM	H2 valve closed
10/4/2011	3:45:06 PM	BCl3 valve closed
10/4/2011	3:45:06 PM	PH3 valve closed
10/4/2011	3:45:06 PM	SiCl4 pre valve closed
10/4/2011	3:45:06 PM	SiCl4 post valve closed
10/4/2011	3:45:06 PM	Bypass valve closed
10/4/2011	3:45:06 PM	Bubbler valve closed
10/4/2011	3:45:06 PM	Helium valve opened
10/4/2011	3:45:06 PM	Main Vac valve opened
10/4/2011	3:45:06 PM	Helium MFC set to  20.000000
10/4/2011	3:45:06 PM	H2 MFC set to  0.000000
10/4/2011	3:45:06 PM	BCl3 MFC set to  0.000000
10/4/2011	3:45:06 PM	PHl3 MFC set to  0.000000
10/4/2011	3:45:06 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:45:06 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:45:07 PM	Tube furnace set to 150
10/4/2011	3:45:37 PM	Helium valve closed
10/4/2011	3:45:37 PM	H2 valve closed
10/4/2011	3:45:37 PM	BCl3 valve closed
10/4/2011	3:45:37 PM	PH3 valve closed
10/4/2011	3:45:37 PM	SiCl4 pre valve closed
10/4/2011	3:45:37 PM	SiCl4 post valve closed
10/4/2011	3:45:37 PM	Bypass valve closed
10/4/2011	3:45:37 PM	Bubbler valve closed
10/4/2011	3:45:37 PM	Main Vac valve opened
10/4/2011	3:45:37 PM	Helium MFC set to  0.000000
10/4/2011	3:45:37 PM	H2 MFC set to  0.000000
10/4/2011	3:45:37 PM	BCl3 MFC set to  0.000000
10/4/2011	3:45:37 PM	PHl3 MFC set to  0.000000
10/4/2011	3:45:37 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:45:37 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:45:37 PM	Tube furnace set to 150
10/4/2011	3:46:07 PM	H2 valve closed
10/4/2011	3:46:07 PM	BCl3 valve closed
10/4/2011	3:46:07 PM	PH3 valve closed
10/4/2011	3:46:07 PM	SiCl4 pre valve closed
10/4/2011	3:46:07 PM	SiCl4 post valve closed
10/4/2011	3:46:07 PM	Bypass valve closed
10/4/2011	3:46:07 PM	Bubbler valve closed
10/4/2011	3:46:07 PM	Helium valve opened
10/4/2011	3:46:07 PM	Main Vac valve opened
10/4/2011	3:46:07 PM	Helium MFC set to  20.000000
10/4/2011	3:46:07 PM	H2 MFC set to  0.000000
10/4/2011	3:46:07 PM	BCl3 MFC set to  0.000000
10/4/2011	3:46:07 PM	PHl3 MFC set to  0.000000
10/4/2011	3:46:07 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:46:07 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:46:07 PM	Tube furnace set to 150
10/4/2011	3:46:37 PM	Helium valve closed
10/4/2011	3:46:37 PM	H2 valve closed
10/4/2011	3:46:37 PM	BCl3 valve closed
10/4/2011	3:46:37 PM	PH3 valve closed
10/4/2011	3:46:37 PM	SiCl4 pre valve closed
10/4/2011	3:46:37 PM	SiCl4 post valve closed
10/4/2011	3:46:37 PM	Bypass valve closed
10/4/2011	3:46:37 PM	Bubbler valve closed
10/4/2011	3:46:37 PM	Main Vac valve opened
10/4/2011	3:46:37 PM	Helium MFC set to  0.000000
10/4/2011	3:46:37 PM	H2 MFC set to  0.000000
10/4/2011	3:46:37 PM	BCl3 MFC set to  0.000000
10/4/2011	3:46:37 PM	PHl3 MFC set to  0.000000
10/4/2011	3:46:37 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:46:37 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:46:37 PM	Tube furnace set to 150
10/4/2011	3:47:07 PM	H2 valve closed
10/4/2011	3:47:07 PM	BCl3 valve closed
10/4/2011	3:47:07 PM	PH3 valve closed
10/4/2011	3:47:07 PM	SiCl4 pre valve closed
10/4/2011	3:47:07 PM	SiCl4 post valve closed
10/4/2011	3:47:07 PM	Bypass valve closed
10/4/2011	3:47:07 PM	Bubbler valve closed
10/4/2011	3:47:07 PM	Helium valve opened
10/4/2011	3:47:07 PM	Main Vac valve opened
10/4/2011	3:47:07 PM	Helium MFC set to  20.000000
10/4/2011	3:47:07 PM	H2 MFC set to  0.000000
10/4/2011	3:47:07 PM	BCl3 MFC set to  0.000000
10/4/2011	3:47:07 PM	PHl3 MFC set to  0.000000
10/4/2011	3:47:07 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:47:07 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:47:07 PM	Tube furnace set to 150
10/4/2011	3:47:38 PM	Helium valve closed
10/4/2011	3:47:38 PM	H2 valve closed
10/4/2011	3:47:38 PM	BCl3 valve closed
10/4/2011	3:47:38 PM	PH3 valve closed
10/4/2011	3:47:38 PM	SiCl4 pre valve closed
10/4/2011	3:47:38 PM	SiCl4 post valve closed
10/4/2011	3:47:38 PM	Bypass valve closed
10/4/2011	3:47:38 PM	Bubbler valve closed
10/4/2011	3:47:38 PM	Main Vac valve opened
10/4/2011	3:47:38 PM	Helium MFC set to  0.000000
10/4/2011	3:47:38 PM	H2 MFC set to  0.000000
10/4/2011	3:47:38 PM	BCl3 MFC set to  0.000000
10/4/2011	3:47:38 PM	PHl3 MFC set to  0.000000
10/4/2011	3:47:38 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:47:38 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:47:38 PM	Tube furnace set to 150
10/4/2011	3:48:08 PM	H2 valve closed
10/4/2011	3:48:08 PM	BCl3 valve closed
10/4/2011	3:48:08 PM	PH3 valve closed
10/4/2011	3:48:08 PM	SiCl4 pre valve closed
10/4/2011	3:48:08 PM	SiCl4 post valve closed
10/4/2011	3:48:08 PM	Bypass valve closed
10/4/2011	3:48:08 PM	Bubbler valve closed
10/4/2011	3:48:08 PM	Helium valve opened
10/4/2011	3:48:08 PM	Main Vac valve opened
10/4/2011	3:48:08 PM	Helium MFC set to  20.000000
10/4/2011	3:48:08 PM	H2 MFC set to  0.000000
10/4/2011	3:48:08 PM	BCl3 MFC set to  0.000000
10/4/2011	3:48:08 PM	PHl3 MFC set to  0.000000
10/4/2011	3:48:08 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:48:08 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:48:08 PM	Tube furnace set to 150
10/4/2011	3:48:38 PM	Helium valve closed
10/4/2011	3:48:38 PM	H2 valve closed
10/4/2011	3:48:38 PM	BCl3 valve closed
10/4/2011	3:48:38 PM	PH3 valve closed
10/4/2011	3:48:38 PM	SiCl4 pre valve closed
10/4/2011	3:48:38 PM	SiCl4 post valve closed
10/4/2011	3:48:38 PM	Bypass valve closed
10/4/2011	3:48:38 PM	Bubbler valve closed
10/4/2011	3:48:38 PM	Main Vac valve opened
10/4/2011	3:48:38 PM	Helium MFC set to  0.000000
10/4/2011	3:48:38 PM	H2 MFC set to  0.000000
10/4/2011	3:48:38 PM	BCl3 MFC set to  0.000000
10/4/2011	3:48:38 PM	PHl3 MFC set to  0.000000
10/4/2011	3:48:38 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:48:38 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:48:38 PM	Tube furnace set to 150
10/4/2011	3:49:08 PM	H2 valve closed
10/4/2011	3:49:08 PM	BCl3 valve closed
10/4/2011	3:49:08 PM	PH3 valve closed
10/4/2011	3:49:08 PM	SiCl4 pre valve closed
10/4/2011	3:49:08 PM	SiCl4 post valve closed
10/4/2011	3:49:08 PM	Bypass valve closed
10/4/2011	3:49:08 PM	Bubbler valve closed
10/4/2011	3:49:08 PM	Helium valve opened
10/4/2011	3:49:08 PM	Main Vac valve opened
10/4/2011	3:49:08 PM	Helium MFC set to  20.000000
10/4/2011	3:49:08 PM	H2 MFC set to  0.000000
10/4/2011	3:49:08 PM	BCl3 MFC set to  0.000000
10/4/2011	3:49:08 PM	PHl3 MFC set to  0.000000
10/4/2011	3:49:08 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:49:08 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:49:08 PM	Tube furnace set to 150
10/4/2011	3:49:38 PM	Helium valve closed
10/4/2011	3:49:38 PM	H2 valve closed
10/4/2011	3:49:38 PM	BCl3 valve closed
10/4/2011	3:49:38 PM	PH3 valve closed
10/4/2011	3:49:38 PM	SiCl4 pre valve closed
10/4/2011	3:49:38 PM	SiCl4 post valve closed
10/4/2011	3:49:38 PM	Bypass valve closed
10/4/2011	3:49:38 PM	Bubbler valve closed
10/4/2011	3:49:38 PM	Main Vac valve opened
10/4/2011	3:49:38 PM	Helium MFC set to  0.000000
10/4/2011	3:49:38 PM	H2 MFC set to  0.000000
10/4/2011	3:49:38 PM	BCl3 MFC set to  0.000000
10/4/2011	3:49:38 PM	PHl3 MFC set to  0.000000
10/4/2011	3:49:38 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:49:38 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:49:39 PM	Tube furnace set to 150
10/4/2011	3:50:09 PM	H2 valve closed
10/4/2011	3:50:09 PM	BCl3 valve closed
10/4/2011	3:50:09 PM	PH3 valve closed
10/4/2011	3:50:09 PM	SiCl4 pre valve closed
10/4/2011	3:50:09 PM	SiCl4 post valve closed
10/4/2011	3:50:09 PM	Bypass valve closed
10/4/2011	3:50:09 PM	Bubbler valve closed
10/4/2011	3:50:09 PM	Helium valve opened
10/4/2011	3:50:09 PM	Main Vac valve opened
10/4/2011	3:50:09 PM	Helium MFC set to  20.000000
10/4/2011	3:50:09 PM	H2 MFC set to  0.000000
10/4/2011	3:50:09 PM	BCl3 MFC set to  0.000000
10/4/2011	3:50:09 PM	PHl3 MFC set to  0.000000
10/4/2011	3:50:09 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:50:09 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:50:09 PM	Tube furnace set to 150
10/4/2011	3:50:39 PM	Helium valve closed
10/4/2011	3:50:39 PM	H2 valve closed
10/4/2011	3:50:39 PM	BCl3 valve closed
10/4/2011	3:50:39 PM	PH3 valve closed
10/4/2011	3:50:39 PM	SiCl4 pre valve closed
10/4/2011	3:50:39 PM	SiCl4 post valve closed
10/4/2011	3:50:39 PM	Bypass valve closed
10/4/2011	3:50:39 PM	Bubbler valve closed
10/4/2011	3:50:39 PM	Main Vac valve opened
10/4/2011	3:50:39 PM	Helium MFC set to  0.000000
10/4/2011	3:50:39 PM	H2 MFC set to  0.000000
10/4/2011	3:50:39 PM	BCl3 MFC set to  0.000000
10/4/2011	3:50:39 PM	PHl3 MFC set to  0.000000
10/4/2011	3:50:39 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:50:39 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:50:39 PM	Tube furnace set to 150
10/4/2011	3:51:09 PM	H2 valve closed
10/4/2011	3:51:09 PM	BCl3 valve closed
10/4/2011	3:51:09 PM	PH3 valve closed
10/4/2011	3:51:09 PM	SiCl4 pre valve closed
10/4/2011	3:51:09 PM	SiCl4 post valve closed
10/4/2011	3:51:09 PM	Bypass valve closed
10/4/2011	3:51:09 PM	Bubbler valve closed
10/4/2011	3:51:09 PM	Helium valve opened
10/4/2011	3:51:09 PM	Main Vac valve opened
10/4/2011	3:51:09 PM	Helium MFC set to  20.000000
10/4/2011	3:51:09 PM	H2 MFC set to  0.000000
10/4/2011	3:51:09 PM	BCl3 MFC set to  0.000000
10/4/2011	3:51:09 PM	PHl3 MFC set to  0.000000
10/4/2011	3:51:09 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:51:09 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:51:09 PM	Tube furnace set to 150
10/4/2011	3:51:39 PM	Helium valve closed
10/4/2011	3:51:39 PM	H2 valve closed
10/4/2011	3:51:39 PM	BCl3 valve closed
10/4/2011	3:51:39 PM	PH3 valve closed
10/4/2011	3:51:39 PM	SiCl4 pre valve closed
10/4/2011	3:51:39 PM	SiCl4 post valve closed
10/4/2011	3:51:39 PM	Bypass valve closed
10/4/2011	3:51:39 PM	Bubbler valve closed
10/4/2011	3:51:39 PM	Main Vac valve opened
10/4/2011	3:51:39 PM	Helium MFC set to  0.000000
10/4/2011	3:51:39 PM	H2 MFC set to  0.000000
10/4/2011	3:51:39 PM	BCl3 MFC set to  0.000000
10/4/2011	3:51:39 PM	PHl3 MFC set to  0.000000
10/4/2011	3:51:39 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:51:39 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:51:39 PM	Tube furnace set to 150
10/4/2011	3:52:09 PM	H2 valve closed
10/4/2011	3:52:09 PM	BCl3 valve closed
10/4/2011	3:52:09 PM	PH3 valve closed
10/4/2011	3:52:09 PM	SiCl4 pre valve closed
10/4/2011	3:52:09 PM	SiCl4 post valve closed
10/4/2011	3:52:09 PM	Bypass valve closed
10/4/2011	3:52:09 PM	Bubbler valve closed
10/4/2011	3:52:09 PM	Helium valve opened
10/4/2011	3:52:09 PM	Main Vac valve opened
10/4/2011	3:52:09 PM	Helium MFC set to  20.000000
10/4/2011	3:52:09 PM	H2 MFC set to  0.000000
10/4/2011	3:52:09 PM	BCl3 MFC set to  0.000000
10/4/2011	3:52:09 PM	PHl3 MFC set to  0.000000
10/4/2011	3:52:09 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:52:09 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:52:10 PM	Tube furnace set to 150
10/4/2011	3:52:40 PM	Helium valve closed
10/4/2011	3:52:40 PM	H2 valve closed
10/4/2011	3:52:40 PM	BCl3 valve closed
10/4/2011	3:52:40 PM	PH3 valve closed
10/4/2011	3:52:40 PM	SiCl4 pre valve closed
10/4/2011	3:52:40 PM	SiCl4 post valve closed
10/4/2011	3:52:40 PM	Bypass valve closed
10/4/2011	3:52:40 PM	Bubbler valve closed
10/4/2011	3:52:40 PM	Main Vac valve opened
10/4/2011	3:52:40 PM	Helium MFC set to  0.000000
10/4/2011	3:52:40 PM	H2 MFC set to  0.000000
10/4/2011	3:52:40 PM	BCl3 MFC set to  0.000000
10/4/2011	3:52:40 PM	PHl3 MFC set to  0.000000
10/4/2011	3:52:40 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:52:40 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:52:40 PM	Tube furnace set to 150
10/4/2011	3:53:10 PM	H2 valve closed
10/4/2011	3:53:10 PM	BCl3 valve closed
10/4/2011	3:53:10 PM	PH3 valve closed
10/4/2011	3:53:10 PM	SiCl4 pre valve closed
10/4/2011	3:53:10 PM	SiCl4 post valve closed
10/4/2011	3:53:10 PM	Bypass valve closed
10/4/2011	3:53:10 PM	Bubbler valve closed
10/4/2011	3:53:10 PM	Helium valve opened
10/4/2011	3:53:10 PM	Main Vac valve opened
10/4/2011	3:53:10 PM	Helium MFC set to  20.000000
10/4/2011	3:53:10 PM	H2 MFC set to  0.000000
10/4/2011	3:53:10 PM	BCl3 MFC set to  0.000000
10/4/2011	3:53:10 PM	PHl3 MFC set to  0.000000
10/4/2011	3:53:10 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:53:10 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:53:10 PM	Tube furnace set to 150
10/4/2011	3:53:40 PM	Helium valve closed
10/4/2011	3:53:40 PM	H2 valve closed
10/4/2011	3:53:40 PM	BCl3 valve closed
10/4/2011	3:53:40 PM	PH3 valve closed
10/4/2011	3:53:40 PM	SiCl4 pre valve closed
10/4/2011	3:53:40 PM	SiCl4 post valve closed
10/4/2011	3:53:40 PM	Bypass valve closed
10/4/2011	3:53:40 PM	Bubbler valve closed
10/4/2011	3:53:40 PM	Main Vac valve opened
10/4/2011	3:53:40 PM	Helium MFC set to  0.000000
10/4/2011	3:53:40 PM	H2 MFC set to  0.000000
10/4/2011	3:53:40 PM	BCl3 MFC set to  0.000000
10/4/2011	3:53:40 PM	PHl3 MFC set to  0.000000
10/4/2011	3:53:40 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:53:40 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:53:40 PM	Tube furnace set to 150
10/4/2011	3:54:10 PM	H2 valve closed
10/4/2011	3:54:10 PM	BCl3 valve closed
10/4/2011	3:54:10 PM	PH3 valve closed
10/4/2011	3:54:10 PM	SiCl4 pre valve closed
10/4/2011	3:54:10 PM	SiCl4 post valve closed
10/4/2011	3:54:10 PM	Bypass valve closed
10/4/2011	3:54:10 PM	Bubbler valve closed
10/4/2011	3:54:10 PM	Helium valve opened
10/4/2011	3:54:10 PM	Main Vac valve opened
10/4/2011	3:54:10 PM	Helium MFC set to  20.000000
10/4/2011	3:54:10 PM	H2 MFC set to  0.000000
10/4/2011	3:54:10 PM	BCl3 MFC set to  0.000000
10/4/2011	3:54:10 PM	PHl3 MFC set to  0.000000
10/4/2011	3:54:10 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:54:10 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:54:11 PM	Tube furnace set to 150
10/4/2011	3:54:41 PM	Helium valve closed
10/4/2011	3:54:41 PM	H2 valve closed
10/4/2011	3:54:41 PM	BCl3 valve closed
10/4/2011	3:54:41 PM	PH3 valve closed
10/4/2011	3:54:41 PM	SiCl4 pre valve closed
10/4/2011	3:54:41 PM	SiCl4 post valve closed
10/4/2011	3:54:41 PM	Bypass valve closed
10/4/2011	3:54:41 PM	Bubbler valve closed
10/4/2011	3:54:41 PM	Main Vac valve opened
10/4/2011	3:54:41 PM	Helium MFC set to  0.000000
10/4/2011	3:54:41 PM	H2 MFC set to  0.000000
10/4/2011	3:54:41 PM	BCl3 MFC set to  0.000000
10/4/2011	3:54:41 PM	PHl3 MFC set to  0.000000
10/4/2011	3:54:41 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:54:41 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:54:41 PM	Tube furnace set to 150
10/4/2011	3:55:11 PM	H2 valve closed
10/4/2011	3:55:11 PM	BCl3 valve closed
10/4/2011	3:55:11 PM	PH3 valve closed
10/4/2011	3:55:11 PM	SiCl4 pre valve closed
10/4/2011	3:55:11 PM	SiCl4 post valve closed
10/4/2011	3:55:11 PM	Bypass valve closed
10/4/2011	3:55:11 PM	Bubbler valve closed
10/4/2011	3:55:11 PM	Helium valve opened
10/4/2011	3:55:11 PM	Main Vac valve opened
10/4/2011	3:55:11 PM	Helium MFC set to  20.000000
10/4/2011	3:55:11 PM	H2 MFC set to  0.000000
10/4/2011	3:55:11 PM	BCl3 MFC set to  0.000000
10/4/2011	3:55:11 PM	PHl3 MFC set to  0.000000
10/4/2011	3:55:11 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:55:11 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:55:11 PM	Tube furnace set to 150
10/4/2011	3:55:41 PM	Helium valve closed
10/4/2011	3:55:41 PM	H2 valve closed
10/4/2011	3:55:41 PM	BCl3 valve closed
10/4/2011	3:55:41 PM	PH3 valve closed
10/4/2011	3:55:41 PM	SiCl4 pre valve closed
10/4/2011	3:55:41 PM	SiCl4 post valve closed
10/4/2011	3:55:41 PM	Bypass valve closed
10/4/2011	3:55:41 PM	Bubbler valve closed
10/4/2011	3:55:41 PM	Main Vac valve opened
10/4/2011	3:55:41 PM	Helium MFC set to  0.000000
10/4/2011	3:55:41 PM	H2 MFC set to  0.000000
10/4/2011	3:55:41 PM	BCl3 MFC set to  0.000000
10/4/2011	3:55:41 PM	PHl3 MFC set to  0.000000
10/4/2011	3:55:41 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:55:41 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:55:41 PM	Tube furnace set to 180
10/4/2011	3:55:46 PM	Run finished at 3:55 PM
10/4/2011	3:56:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/4/2011	3:56:15 PM	Recipe started at 3:56 PM
10/4/2011	3:56:15 PM	Helium valve closed
10/4/2011	3:56:15 PM	H2 valve closed
10/4/2011	3:56:15 PM	BCl3 valve closed
10/4/2011	3:56:15 PM	PH3 valve closed
10/4/2011	3:56:15 PM	SiCl4 pre valve closed
10/4/2011	3:56:15 PM	SiCl4 post valve closed
10/4/2011	3:56:15 PM	Main Vac valve closed
10/4/2011	3:56:15 PM	Bubbler valve closed
10/4/2011	3:56:15 PM	Bypass valve opened
10/4/2011	3:56:15 PM	Helium MFC set to  0.000000
10/4/2011	3:56:15 PM	H2 MFC set to  0.000000
10/4/2011	3:56:15 PM	BCl3 MFC set to  0.000000
10/4/2011	3:56:15 PM	PHl3 MFC set to  0.000000
10/4/2011	3:56:15 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:56:15 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:56:15 PM	Tube furnace set to 0
10/4/2011	3:56:15 PM	Helium valve closed
10/4/2011	3:56:15 PM	H2 valve closed
10/4/2011	3:56:15 PM	BCl3 valve closed
10/4/2011	3:56:15 PM	PH3 valve closed
10/4/2011	3:56:15 PM	SiCl4 pre valve closed
10/4/2011	3:56:15 PM	SiCl4 post valve closed
10/4/2011	3:56:15 PM	Main Vac valve closed
10/4/2011	3:56:15 PM	Bubbler valve closed
10/4/2011	3:56:15 PM	Bypass valve opened
10/4/2011	3:56:15 PM	Helium MFC set to  0.000000
10/4/2011	3:56:15 PM	H2 MFC set to  0.000000
10/4/2011	3:56:15 PM	BCl3 MFC set to  0.000000
10/4/2011	3:56:15 PM	PHl3 MFC set to  0.000000
10/4/2011	3:56:15 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:56:15 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:56:15 PM	Tube furnace set to 0
10/4/2011	3:56:17 PM	Helium valve closed
10/4/2011	3:56:17 PM	H2 valve closed
10/4/2011	3:56:17 PM	BCl3 valve closed
10/4/2011	3:56:17 PM	PH3 valve closed
10/4/2011	3:56:17 PM	SiCl4 pre valve closed
10/4/2011	3:56:17 PM	SiCl4 post valve closed
10/4/2011	3:56:17 PM	Bypass valve closed
10/4/2011	3:56:17 PM	Bubbler valve closed
10/4/2011	3:56:17 PM	Main Vac valve opened
10/4/2011	3:56:17 PM	Helium MFC set to  0.000000
10/4/2011	3:56:17 PM	H2 MFC set to  0.000000
10/4/2011	3:56:17 PM	BCl3 MFC set to  0.000000
10/4/2011	3:56:17 PM	PHl3 MFC set to  0.000000
10/4/2011	3:56:17 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:56:17 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:56:17 PM	Tube furnace set to 0
10/4/2011	3:56:47 PM	H2 valve closed
10/4/2011	3:56:47 PM	BCl3 valve closed
10/4/2011	3:56:47 PM	PH3 valve closed
10/4/2011	3:56:47 PM	SiCl4 pre valve closed
10/4/2011	3:56:47 PM	SiCl4 post valve closed
10/4/2011	3:56:47 PM	Bypass valve closed
10/4/2011	3:56:47 PM	Bubbler valve closed
10/4/2011	3:56:47 PM	Helium valve opened
10/4/2011	3:56:48 PM	Main Vac valve opened
10/4/2011	3:56:48 PM	Helium MFC set to  20.000000
10/4/2011	3:56:48 PM	H2 MFC set to  0.000000
10/4/2011	3:56:48 PM	BCl3 MFC set to  0.000000
10/4/2011	3:56:48 PM	PHl3 MFC set to  0.000000
10/4/2011	3:56:48 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:56:48 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:56:48 PM	Tube furnace set to 0
10/4/2011	3:57:18 PM	Helium valve closed
10/4/2011	3:57:18 PM	H2 valve closed
10/4/2011	3:57:18 PM	BCl3 valve closed
10/4/2011	3:57:18 PM	PH3 valve closed
10/4/2011	3:57:18 PM	SiCl4 pre valve closed
10/4/2011	3:57:18 PM	SiCl4 post valve closed
10/4/2011	3:57:18 PM	Bypass valve closed
10/4/2011	3:57:18 PM	Bubbler valve closed
10/4/2011	3:57:18 PM	Main Vac valve opened
10/4/2011	3:57:18 PM	Helium MFC set to  0.000000
10/4/2011	3:57:18 PM	H2 MFC set to  0.000000
10/4/2011	3:57:18 PM	BCl3 MFC set to  0.000000
10/4/2011	3:57:18 PM	PHl3 MFC set to  0.000000
10/4/2011	3:57:18 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:57:18 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:57:18 PM	Tube furnace set to 0
10/4/2011	3:57:48 PM	H2 valve closed
10/4/2011	3:57:48 PM	BCl3 valve closed
10/4/2011	3:57:48 PM	PH3 valve closed
10/4/2011	3:57:48 PM	SiCl4 pre valve closed
10/4/2011	3:57:48 PM	SiCl4 post valve closed
10/4/2011	3:57:48 PM	Bypass valve closed
10/4/2011	3:57:48 PM	Bubbler valve closed
10/4/2011	3:57:48 PM	Helium valve opened
10/4/2011	3:57:48 PM	Main Vac valve opened
10/4/2011	3:57:48 PM	Helium MFC set to  20.000000
10/4/2011	3:57:48 PM	H2 MFC set to  0.000000
10/4/2011	3:57:48 PM	BCl3 MFC set to  0.000000
10/4/2011	3:57:48 PM	PHl3 MFC set to  0.000000
10/4/2011	3:57:48 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:57:48 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:57:48 PM	Tube furnace set to 0
10/4/2011	3:58:18 PM	Helium valve closed
10/4/2011	3:58:18 PM	H2 valve closed
10/4/2011	3:58:18 PM	BCl3 valve closed
10/4/2011	3:58:18 PM	PH3 valve closed
10/4/2011	3:58:18 PM	SiCl4 pre valve closed
10/4/2011	3:58:18 PM	SiCl4 post valve closed
10/4/2011	3:58:18 PM	Bypass valve closed
10/4/2011	3:58:18 PM	Bubbler valve closed
10/4/2011	3:58:18 PM	Main Vac valve opened
10/4/2011	3:58:18 PM	Helium MFC set to  0.000000
10/4/2011	3:58:18 PM	H2 MFC set to  0.000000
10/4/2011	3:58:18 PM	BCl3 MFC set to  0.000000
10/4/2011	3:58:18 PM	PHl3 MFC set to  0.000000
10/4/2011	3:58:18 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:58:18 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:58:18 PM	Tube furnace set to 0
10/4/2011	3:58:48 PM	H2 valve closed
10/4/2011	3:58:48 PM	BCl3 valve closed
10/4/2011	3:58:48 PM	PH3 valve closed
10/4/2011	3:58:48 PM	SiCl4 pre valve closed
10/4/2011	3:58:48 PM	SiCl4 post valve closed
10/4/2011	3:58:48 PM	Bypass valve closed
10/4/2011	3:58:48 PM	Bubbler valve closed
10/4/2011	3:58:48 PM	Helium valve opened
10/4/2011	3:58:48 PM	Main Vac valve opened
10/4/2011	3:58:48 PM	Helium MFC set to  20.000000
10/4/2011	3:58:48 PM	H2 MFC set to  0.000000
10/4/2011	3:58:48 PM	BCl3 MFC set to  0.000000
10/4/2011	3:58:48 PM	PHl3 MFC set to  0.000000
10/4/2011	3:58:48 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:58:48 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:58:48 PM	Tube furnace set to 0
10/4/2011	3:59:19 PM	Helium valve closed
10/4/2011	3:59:19 PM	H2 valve closed
10/4/2011	3:59:19 PM	BCl3 valve closed
10/4/2011	3:59:19 PM	PH3 valve closed
10/4/2011	3:59:19 PM	SiCl4 pre valve closed
10/4/2011	3:59:19 PM	SiCl4 post valve closed
10/4/2011	3:59:19 PM	Bypass valve closed
10/4/2011	3:59:19 PM	Bubbler valve closed
10/4/2011	3:59:19 PM	Main Vac valve opened
10/4/2011	3:59:19 PM	Helium MFC set to  0.000000
10/4/2011	3:59:19 PM	H2 MFC set to  0.000000
10/4/2011	3:59:19 PM	BCl3 MFC set to  0.000000
10/4/2011	3:59:19 PM	PHl3 MFC set to  0.000000
10/4/2011	3:59:19 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:59:19 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:59:19 PM	Tube furnace set to 0
10/4/2011	3:59:49 PM	H2 valve closed
10/4/2011	3:59:49 PM	BCl3 valve closed
10/4/2011	3:59:49 PM	PH3 valve closed
10/4/2011	3:59:49 PM	SiCl4 pre valve closed
10/4/2011	3:59:49 PM	SiCl4 post valve closed
10/4/2011	3:59:49 PM	Bypass valve closed
10/4/2011	3:59:49 PM	Bubbler valve closed
10/4/2011	3:59:49 PM	Helium valve opened
10/4/2011	3:59:49 PM	Main Vac valve opened
10/4/2011	3:59:49 PM	Helium MFC set to  20.000000
10/4/2011	3:59:49 PM	H2 MFC set to  0.000000
10/4/2011	3:59:49 PM	BCl3 MFC set to  0.000000
10/4/2011	3:59:49 PM	PHl3 MFC set to  0.000000
10/4/2011	3:59:49 PM	SiCl4 MFC set to  0.000000
10/4/2011	3:59:49 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	3:59:49 PM	Tube furnace set to 0
10/4/2011	4:00:19 PM	Helium valve closed
10/4/2011	4:00:19 PM	H2 valve closed
10/4/2011	4:00:19 PM	BCl3 valve closed
10/4/2011	4:00:19 PM	PH3 valve closed
10/4/2011	4:00:19 PM	SiCl4 pre valve closed
10/4/2011	4:00:19 PM	SiCl4 post valve closed
10/4/2011	4:00:19 PM	Bypass valve closed
10/4/2011	4:00:19 PM	Bubbler valve closed
10/4/2011	4:00:19 PM	Main Vac valve opened
10/4/2011	4:00:19 PM	Helium MFC set to  0.000000
10/4/2011	4:00:19 PM	H2 MFC set to  0.000000
10/4/2011	4:00:19 PM	BCl3 MFC set to  0.000000
10/4/2011	4:00:19 PM	PHl3 MFC set to  0.000000
10/4/2011	4:00:19 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:00:19 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:00:19 PM	Tube furnace set to 0
10/4/2011	4:00:49 PM	H2 valve closed
10/4/2011	4:00:49 PM	BCl3 valve closed
10/4/2011	4:00:49 PM	PH3 valve closed
10/4/2011	4:00:49 PM	SiCl4 pre valve closed
10/4/2011	4:00:49 PM	SiCl4 post valve closed
10/4/2011	4:00:49 PM	Bypass valve closed
10/4/2011	4:00:49 PM	Bubbler valve closed
10/4/2011	4:00:49 PM	Helium valve opened
10/4/2011	4:00:49 PM	Main Vac valve opened
10/4/2011	4:00:49 PM	Helium MFC set to  20.000000
10/4/2011	4:00:49 PM	H2 MFC set to  0.000000
10/4/2011	4:00:49 PM	BCl3 MFC set to  0.000000
10/4/2011	4:00:49 PM	PHl3 MFC set to  0.000000
10/4/2011	4:00:49 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:00:49 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:00:49 PM	Tube furnace set to 0
10/4/2011	4:01:19 PM	Helium valve closed
10/4/2011	4:01:19 PM	H2 valve closed
10/4/2011	4:01:19 PM	BCl3 valve closed
10/4/2011	4:01:19 PM	PH3 valve closed
10/4/2011	4:01:19 PM	SiCl4 pre valve closed
10/4/2011	4:01:19 PM	SiCl4 post valve closed
10/4/2011	4:01:19 PM	Bypass valve closed
10/4/2011	4:01:19 PM	Bubbler valve closed
10/4/2011	4:01:19 PM	Main Vac valve opened
10/4/2011	4:01:19 PM	Helium MFC set to  0.000000
10/4/2011	4:01:19 PM	H2 MFC set to  0.000000
10/4/2011	4:01:19 PM	BCl3 MFC set to  0.000000
10/4/2011	4:01:19 PM	PHl3 MFC set to  0.000000
10/4/2011	4:01:19 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:01:19 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:01:20 PM	Tube furnace set to 0
10/4/2011	4:01:50 PM	H2 valve closed
10/4/2011	4:01:50 PM	BCl3 valve closed
10/4/2011	4:01:50 PM	PH3 valve closed
10/4/2011	4:01:50 PM	SiCl4 pre valve closed
10/4/2011	4:01:50 PM	SiCl4 post valve closed
10/4/2011	4:01:50 PM	Bypass valve closed
10/4/2011	4:01:50 PM	Bubbler valve closed
10/4/2011	4:01:50 PM	Helium valve opened
10/4/2011	4:01:50 PM	Main Vac valve opened
10/4/2011	4:01:50 PM	Helium MFC set to  20.000000
10/4/2011	4:01:50 PM	H2 MFC set to  0.000000
10/4/2011	4:01:50 PM	BCl3 MFC set to  0.000000
10/4/2011	4:01:50 PM	PHl3 MFC set to  0.000000
10/4/2011	4:01:50 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:01:50 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:01:50 PM	Tube furnace set to 0
10/4/2011	4:02:20 PM	Helium valve closed
10/4/2011	4:02:20 PM	H2 valve closed
10/4/2011	4:02:20 PM	BCl3 valve closed
10/4/2011	4:02:20 PM	PH3 valve closed
10/4/2011	4:02:20 PM	SiCl4 pre valve closed
10/4/2011	4:02:20 PM	SiCl4 post valve closed
10/4/2011	4:02:20 PM	Bypass valve closed
10/4/2011	4:02:20 PM	Bubbler valve closed
10/4/2011	4:02:20 PM	Main Vac valve opened
10/4/2011	4:02:20 PM	Helium MFC set to  0.000000
10/4/2011	4:02:20 PM	H2 MFC set to  0.000000
10/4/2011	4:02:20 PM	BCl3 MFC set to  0.000000
10/4/2011	4:02:20 PM	PHl3 MFC set to  0.000000
10/4/2011	4:02:20 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:02:20 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:02:20 PM	Tube furnace set to 0
10/4/2011	4:02:50 PM	H2 valve closed
10/4/2011	4:02:50 PM	BCl3 valve closed
10/4/2011	4:02:50 PM	PH3 valve closed
10/4/2011	4:02:50 PM	SiCl4 pre valve closed
10/4/2011	4:02:50 PM	SiCl4 post valve closed
10/4/2011	4:02:50 PM	Bypass valve closed
10/4/2011	4:02:50 PM	Bubbler valve closed
10/4/2011	4:02:50 PM	Helium valve opened
10/4/2011	4:02:50 PM	Main Vac valve opened
10/4/2011	4:02:50 PM	Helium MFC set to  20.000000
10/4/2011	4:02:50 PM	H2 MFC set to  0.000000
10/4/2011	4:02:50 PM	BCl3 MFC set to  0.000000
10/4/2011	4:02:50 PM	PHl3 MFC set to  0.000000
10/4/2011	4:02:50 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:02:50 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:02:50 PM	Tube furnace set to 0
10/4/2011	4:03:20 PM	Helium valve closed
10/4/2011	4:03:20 PM	H2 valve closed
10/4/2011	4:03:20 PM	BCl3 valve closed
10/4/2011	4:03:20 PM	PH3 valve closed
10/4/2011	4:03:20 PM	SiCl4 pre valve closed
10/4/2011	4:03:20 PM	SiCl4 post valve closed
10/4/2011	4:03:20 PM	Bypass valve closed
10/4/2011	4:03:20 PM	Bubbler valve closed
10/4/2011	4:03:20 PM	Main Vac valve opened
10/4/2011	4:03:20 PM	Helium MFC set to  0.000000
10/4/2011	4:03:20 PM	H2 MFC set to  0.000000
10/4/2011	4:03:20 PM	BCl3 MFC set to  0.000000
10/4/2011	4:03:20 PM	PHl3 MFC set to  0.000000
10/4/2011	4:03:20 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:03:20 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:03:20 PM	Tube furnace set to 0
10/4/2011	4:03:50 PM	H2 valve closed
10/4/2011	4:03:50 PM	BCl3 valve closed
10/4/2011	4:03:50 PM	PH3 valve closed
10/4/2011	4:03:50 PM	SiCl4 pre valve closed
10/4/2011	4:03:50 PM	SiCl4 post valve closed
10/4/2011	4:03:50 PM	Bypass valve closed
10/4/2011	4:03:50 PM	Bubbler valve closed
10/4/2011	4:03:50 PM	Helium valve opened
10/4/2011	4:03:50 PM	Main Vac valve opened
10/4/2011	4:03:50 PM	Helium MFC set to  20.000000
10/4/2011	4:03:50 PM	H2 MFC set to  0.000000
10/4/2011	4:03:50 PM	BCl3 MFC set to  0.000000
10/4/2011	4:03:50 PM	PHl3 MFC set to  0.000000
10/4/2011	4:03:50 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:03:50 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:03:51 PM	Tube furnace set to 0
10/4/2011	4:04:21 PM	Helium valve closed
10/4/2011	4:04:21 PM	H2 valve closed
10/4/2011	4:04:21 PM	BCl3 valve closed
10/4/2011	4:04:21 PM	PH3 valve closed
10/4/2011	4:04:21 PM	SiCl4 pre valve closed
10/4/2011	4:04:21 PM	SiCl4 post valve closed
10/4/2011	4:04:21 PM	Bypass valve closed
10/4/2011	4:04:21 PM	Bubbler valve closed
10/4/2011	4:04:21 PM	Main Vac valve opened
10/4/2011	4:04:21 PM	Helium MFC set to  0.000000
10/4/2011	4:04:21 PM	H2 MFC set to  0.000000
10/4/2011	4:04:21 PM	BCl3 MFC set to  0.000000
10/4/2011	4:04:21 PM	PHl3 MFC set to  0.000000
10/4/2011	4:04:21 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:04:21 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:04:21 PM	Tube furnace set to 0
10/4/2011	4:04:51 PM	H2 valve closed
10/4/2011	4:04:51 PM	BCl3 valve closed
10/4/2011	4:04:51 PM	PH3 valve closed
10/4/2011	4:04:51 PM	SiCl4 pre valve closed
10/4/2011	4:04:51 PM	SiCl4 post valve closed
10/4/2011	4:04:51 PM	Bypass valve closed
10/4/2011	4:04:51 PM	Bubbler valve closed
10/4/2011	4:04:51 PM	Helium valve opened
10/4/2011	4:04:51 PM	Main Vac valve opened
10/4/2011	4:04:51 PM	Helium MFC set to  20.000000
10/4/2011	4:04:51 PM	H2 MFC set to  0.000000
10/4/2011	4:04:51 PM	BCl3 MFC set to  0.000000
10/4/2011	4:04:51 PM	PHl3 MFC set to  0.000000
10/4/2011	4:04:51 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:04:51 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:04:51 PM	Tube furnace set to 0
10/4/2011	4:05:21 PM	Helium valve closed
10/4/2011	4:05:21 PM	H2 valve closed
10/4/2011	4:05:21 PM	BCl3 valve closed
10/4/2011	4:05:21 PM	PH3 valve closed
10/4/2011	4:05:21 PM	SiCl4 pre valve closed
10/4/2011	4:05:21 PM	SiCl4 post valve closed
10/4/2011	4:05:21 PM	Bypass valve closed
10/4/2011	4:05:21 PM	Bubbler valve closed
10/4/2011	4:05:21 PM	Main Vac valve opened
10/4/2011	4:05:21 PM	Helium MFC set to  0.000000
10/4/2011	4:05:21 PM	H2 MFC set to  0.000000
10/4/2011	4:05:21 PM	BCl3 MFC set to  0.000000
10/4/2011	4:05:21 PM	PHl3 MFC set to  0.000000
10/4/2011	4:05:21 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:05:21 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:05:21 PM	Tube furnace set to 0
10/4/2011	4:05:51 PM	H2 valve closed
10/4/2011	4:05:51 PM	BCl3 valve closed
10/4/2011	4:05:51 PM	PH3 valve closed
10/4/2011	4:05:51 PM	SiCl4 pre valve closed
10/4/2011	4:05:51 PM	SiCl4 post valve closed
10/4/2011	4:05:51 PM	Bypass valve closed
10/4/2011	4:05:51 PM	Bubbler valve closed
10/4/2011	4:05:51 PM	Helium valve opened
10/4/2011	4:05:51 PM	Main Vac valve opened
10/4/2011	4:05:51 PM	Helium MFC set to  20.000000
10/4/2011	4:05:51 PM	H2 MFC set to  0.000000
10/4/2011	4:05:51 PM	BCl3 MFC set to  0.000000
10/4/2011	4:05:51 PM	PHl3 MFC set to  0.000000
10/4/2011	4:05:51 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:05:51 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:05:51 PM	Tube furnace set to 0
10/4/2011	4:06:10 PM	Helium valve closed
10/4/2011	4:06:10 PM	H2 valve closed
10/4/2011	4:06:10 PM	BCl3 valve closed
10/4/2011	4:06:10 PM	PH3 valve closed
10/4/2011	4:06:10 PM	SiCl4 pre valve closed
10/4/2011	4:06:10 PM	SiCl4 post valve closed
10/4/2011	4:06:10 PM	Bypass valve closed
10/4/2011	4:06:10 PM	Bubbler valve closed
10/4/2011	4:06:10 PM	Main Vac valve opened
10/4/2011	4:06:10 PM	Helium MFC set to  0.000000
10/4/2011	4:06:10 PM	H2 MFC set to  0.000000
10/4/2011	4:06:10 PM	BCl3 MFC set to  0.000000
10/4/2011	4:06:10 PM	PHl3 MFC set to  0.000000
10/4/2011	4:06:10 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:06:10 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:06:10 PM	Tube furnace set to 0
10/4/2011	4:06:11 PM	Run finished at 4:06 PM
10/4/2011	4:06:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/4/2011	4:12:35 PM	Recipe started at 4:12 PM
10/4/2011	4:12:35 PM	Helium valve closed
10/4/2011	4:12:35 PM	H2 valve closed
10/4/2011	4:12:35 PM	BCl3 valve closed
10/4/2011	4:12:35 PM	PH3 valve closed
10/4/2011	4:12:35 PM	SiCl4 pre valve closed
10/4/2011	4:12:35 PM	SiCl4 post valve closed
10/4/2011	4:12:35 PM	Main Vac valve closed
10/4/2011	4:12:35 PM	Bypass valve closed
10/4/2011	4:12:35 PM	Bubbler valve closed
10/4/2011	4:12:35 PM	Helium MFC set to  0.000000
10/4/2011	4:12:35 PM	H2 MFC set to  0.000000
10/4/2011	4:12:35 PM	BCl3 MFC set to  0.000000
10/4/2011	4:12:35 PM	PHl3 MFC set to  0.000000
10/4/2011	4:12:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:12:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:12:36 PM	Tube furnace set to 0
10/4/2011	4:12:39 PM	Helium valve closed
10/4/2011	4:12:39 PM	BCl3 valve closed
10/4/2011	4:12:39 PM	PH3 valve closed
10/4/2011	4:12:39 PM	SiCl4 pre valve closed
10/4/2011	4:12:39 PM	SiCl4 post valve closed
10/4/2011	4:12:39 PM	Main Vac valve closed
10/4/2011	4:12:39 PM	Bypass valve closed
10/4/2011	4:12:39 PM	Bubbler valve closed
10/4/2011	4:12:39 PM	H2 valve opened
10/4/2011	4:12:39 PM	Helium MFC set to  0.000000
10/4/2011	4:12:39 PM	H2 MFC set to  500.000000
10/4/2011	4:12:39 PM	BCl3 MFC set to  0.000000
10/4/2011	4:12:39 PM	PHl3 MFC set to  0.000000
10/4/2011	4:12:39 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:12:39 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:12:39 PM	Tube furnace set to 0
10/4/2011	4:12:48 PM	Run aborted at 4:12 PM
10/4/2011	4:12:48 PM	Helium valve closed
10/4/2011	4:12:48 PM	H2 valve closed
10/4/2011	4:12:48 PM	BCl3 valve closed
10/4/2011	4:12:48 PM	PH3 valve closed
10/4/2011	4:12:48 PM	SiCl4 pre valve closed
10/4/2011	4:12:48 PM	SiCl4 post valve closed
10/4/2011	4:12:48 PM	Bypass valve closed
10/4/2011	4:12:48 PM	Main Vac valve closed
10/4/2011	4:12:48 PM	Bubbler valve closed
10/4/2011	4:12:48 PM	Helium MFC set to  0.000000
10/4/2011	4:12:48 PM	H2 MFC set to  0.000000
10/4/2011	4:12:48 PM	BCl3 MFC set to  0.000000
10/4/2011	4:12:48 PM	PHl3 MFC set to  0.000000
10/4/2011	4:12:48 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:12:48 PM	Tube furnace set to 0
10/4/2011	4:12:58 PM	Recipe started at 4:12 PM
10/4/2011	4:12:58 PM	Helium valve closed
10/4/2011	4:12:58 PM	H2 valve closed
10/4/2011	4:12:58 PM	BCl3 valve closed
10/4/2011	4:12:58 PM	PH3 valve closed
10/4/2011	4:12:58 PM	SiCl4 pre valve closed
10/4/2011	4:12:58 PM	SiCl4 post valve closed
10/4/2011	4:12:58 PM	Main Vac valve closed
10/4/2011	4:12:58 PM	Bypass valve closed
10/4/2011	4:12:58 PM	Bubbler valve closed
10/4/2011	4:12:58 PM	Helium MFC set to  0.000000
10/4/2011	4:12:58 PM	H2 MFC set to  0.000000
10/4/2011	4:12:58 PM	BCl3 MFC set to  0.000000
10/4/2011	4:12:58 PM	PHl3 MFC set to  0.000000
10/4/2011	4:12:58 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:12:58 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:12:58 PM	Tube furnace set to 0
10/4/2011	4:13:01 PM	Helium valve closed
10/4/2011	4:13:01 PM	BCl3 valve closed
10/4/2011	4:13:01 PM	PH3 valve closed
10/4/2011	4:13:01 PM	SiCl4 pre valve closed
10/4/2011	4:13:01 PM	SiCl4 post valve closed
10/4/2011	4:13:01 PM	Main Vac valve closed
10/4/2011	4:13:01 PM	Bypass valve closed
10/4/2011	4:13:01 PM	Bubbler valve closed
10/4/2011	4:13:01 PM	H2 valve opened
10/4/2011	4:13:01 PM	Helium MFC set to  0.000000
10/4/2011	4:13:01 PM	H2 MFC set to  500.000000
10/4/2011	4:13:01 PM	BCl3 MFC set to  0.000000
10/4/2011	4:13:01 PM	PHl3 MFC set to  0.000000
10/4/2011	4:13:01 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:13:01 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:13:02 PM	Tube furnace set to 0
10/4/2011	4:13:57 PM	Helium valve closed
10/4/2011	4:13:57 PM	BCl3 valve closed
10/4/2011	4:13:57 PM	PH3 valve closed
10/4/2011	4:13:57 PM	SiCl4 pre valve closed
10/4/2011	4:13:57 PM	SiCl4 post valve closed
10/4/2011	4:13:57 PM	Main Vac valve closed
10/4/2011	4:13:57 PM	Bypass valve closed
10/4/2011	4:13:57 PM	H2 valve opened
10/4/2011	4:13:57 PM	Bubbler valve opened
10/4/2011	4:13:57 PM	Helium MFC set to  0.000000
10/4/2011	4:13:57 PM	H2 MFC set to  500.000000
10/4/2011	4:13:57 PM	BCl3 MFC set to  0.000000
10/4/2011	4:13:57 PM	PHl3 MFC set to  0.000000
10/4/2011	4:13:57 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:13:57 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:13:57 PM	Tube furnace set to 0
10/4/2011	4:13:59 PM	Helium valve closed
10/4/2011	4:13:59 PM	BCl3 valve closed
10/4/2011	4:13:59 PM	PH3 valve closed
10/4/2011	4:13:59 PM	SiCl4 pre valve closed
10/4/2011	4:13:59 PM	SiCl4 post valve closed
10/4/2011	4:13:59 PM	Main Vac valve closed
10/4/2011	4:13:59 PM	Bypass valve closed
10/4/2011	4:13:59 PM	H2 valve opened
10/4/2011	4:13:59 PM	Bubbler valve opened
10/4/2011	4:13:59 PM	Helium MFC set to  0.000000
10/4/2011	4:13:59 PM	H2 MFC set to  500.000000
10/4/2011	4:13:59 PM	BCl3 MFC set to  0.000000
10/4/2011	4:13:59 PM	PHl3 MFC set to  0.000000
10/4/2011	4:13:59 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:13:59 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:13:59 PM	Tube furnace set to 950
10/4/2011	4:28:59 PM	Helium valve closed
10/4/2011	4:28:59 PM	PH3 valve closed
10/4/2011	4:28:59 PM	SiCl4 pre valve closed
10/4/2011	4:28:59 PM	SiCl4 post valve closed
10/4/2011	4:28:59 PM	Main Vac valve closed
10/4/2011	4:28:59 PM	Bypass valve closed
10/4/2011	4:28:59 PM	H2 valve opened
10/4/2011	4:28:59 PM	BCl3 valve opened
10/4/2011	4:28:59 PM	Bubbler valve opened
10/4/2011	4:28:59 PM	Helium MFC set to  0.000000
10/4/2011	4:28:59 PM	H2 MFC set to  500.000000
10/4/2011	4:28:59 PM	BCl3 MFC set to  25.000000
10/4/2011	4:28:59 PM	PHl3 MFC set to  0.000000
10/4/2011	4:28:59 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:28:59 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:28:59 PM	Tube furnace set to 950
10/4/2011	4:58:59 PM	Helium valve closed
10/4/2011	4:58:59 PM	BCl3 valve closed
10/4/2011	4:58:59 PM	PH3 valve closed
10/4/2011	4:58:59 PM	SiCl4 pre valve closed
10/4/2011	4:58:59 PM	SiCl4 post valve closed
10/4/2011	4:58:59 PM	Main Vac valve closed
10/4/2011	4:58:59 PM	Bypass valve closed
10/4/2011	4:58:59 PM	H2 valve opened
10/4/2011	4:58:59 PM	Bubbler valve opened
10/4/2011	4:58:59 PM	Helium MFC set to  0.000000
10/4/2011	4:58:59 PM	H2 MFC set to  500.000000
10/4/2011	4:58:59 PM	BCl3 MFC set to  0.000000
10/4/2011	4:58:59 PM	PHl3 MFC set to  0.000000
10/4/2011	4:58:59 PM	SiCl4 MFC set to  0.000000
10/4/2011	4:58:59 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	4:58:59 PM	Tube furnace set to 750
10/4/2011	5:03:59 PM	H2 valve closed
10/4/2011	5:03:59 PM	BCl3 valve closed
10/4/2011	5:03:59 PM	PH3 valve closed
10/4/2011	5:03:59 PM	SiCl4 pre valve closed
10/4/2011	5:03:59 PM	SiCl4 post valve closed
10/4/2011	5:03:59 PM	Main Vac valve closed
10/4/2011	5:03:59 PM	Bypass valve closed
10/4/2011	5:03:59 PM	Helium valve opened
10/4/2011	5:03:59 PM	Bubbler valve opened
10/4/2011	5:03:59 PM	Helium MFC set to  500.000000
10/4/2011	5:03:59 PM	H2 MFC set to  0.000000
10/4/2011	5:03:59 PM	BCl3 MFC set to  0.000000
10/4/2011	5:03:59 PM	PHl3 MFC set to  0.000000
10/4/2011	5:03:59 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:03:59 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:03:59 PM	Tube furnace set to 0
10/4/2011	5:21:26 PM	Helium valve closed
10/4/2011	5:21:26 PM	H2 valve closed
10/4/2011	5:21:26 PM	BCl3 valve closed
10/4/2011	5:21:26 PM	PH3 valve closed
10/4/2011	5:21:26 PM	SiCl4 pre valve closed
10/4/2011	5:21:26 PM	SiCl4 post valve closed
10/4/2011	5:21:26 PM	Main Vac valve closed
10/4/2011	5:21:26 PM	Bypass valve closed
10/4/2011	5:21:26 PM	Bubbler valve closed
10/4/2011	5:21:26 PM	Helium MFC set to  0.000000
10/4/2011	5:21:26 PM	H2 MFC set to  0.000000
10/4/2011	5:21:26 PM	BCl3 MFC set to  0.000000
10/4/2011	5:21:26 PM	PHl3 MFC set to  0.000000
10/4/2011	5:21:26 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:21:26 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:21:26 PM	Tube furnace set to 0
10/4/2011	5:21:27 PM	Run finished at 5:21 PM
10/4/2011	5:21:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2011	5:21:32 PM	Recipe started at 5:21 PM
10/4/2011	5:21:32 PM	Helium valve closed
10/4/2011	5:21:32 PM	H2 valve closed
10/4/2011	5:21:32 PM	BCl3 valve closed
10/4/2011	5:21:32 PM	PH3 valve closed
10/4/2011	5:21:32 PM	SiCl4 pre valve closed
10/4/2011	5:21:32 PM	SiCl4 post valve closed
10/4/2011	5:21:32 PM	Main Vac valve closed
10/4/2011	5:21:32 PM	Bypass valve closed
10/4/2011	5:21:32 PM	Bubbler valve closed
10/4/2011	5:21:32 PM	Helium MFC set to  0.000000
10/4/2011	5:21:32 PM	H2 MFC set to  0.000000
10/4/2011	5:21:32 PM	BCl3 MFC set to  0.000000
10/4/2011	5:21:32 PM	PHl3 MFC set to  0.000000
10/4/2011	5:21:32 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:21:32 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:21:33 PM	Tube furnace set to 0
10/4/2011	5:21:36 PM	H2 valve closed
10/4/2011	5:21:36 PM	BCl3 valve closed
10/4/2011	5:21:36 PM	PH3 valve closed
10/4/2011	5:21:36 PM	SiCl4 pre valve closed
10/4/2011	5:21:36 PM	SiCl4 post valve closed
10/4/2011	5:21:36 PM	Main Vac valve closed
10/4/2011	5:21:36 PM	Bypass valve closed
10/4/2011	5:21:36 PM	Bubbler valve closed
10/4/2011	5:21:36 PM	Helium valve opened
10/4/2011	5:21:36 PM	Helium MFC set to  500.000000
10/4/2011	5:21:36 PM	H2 MFC set to  0.000000
10/4/2011	5:21:36 PM	BCl3 MFC set to  0.000000
10/4/2011	5:21:36 PM	PHl3 MFC set to  0.000000
10/4/2011	5:21:36 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:21:36 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:21:36 PM	Tube furnace set to 0
10/4/2011	5:21:36 PM	Helium valve closed
10/4/2011	5:21:36 PM	H2 valve closed
10/4/2011	5:21:36 PM	BCl3 valve closed
10/4/2011	5:21:36 PM	PH3 valve closed
10/4/2011	5:21:36 PM	SiCl4 pre valve closed
10/4/2011	5:21:36 PM	SiCl4 post valve closed
10/4/2011	5:21:36 PM	Main Vac valve closed
10/4/2011	5:21:36 PM	Bypass valve closed
10/4/2011	5:21:36 PM	Bubbler valve closed
10/4/2011	5:21:36 PM	Helium MFC set to  0.000000
10/4/2011	5:21:36 PM	H2 MFC set to  0.000000
10/4/2011	5:21:36 PM	BCl3 MFC set to  0.000000
10/4/2011	5:21:36 PM	PHl3 MFC set to  0.000000
10/4/2011	5:21:36 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:21:36 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:21:36 PM	Tube furnace set to 0
10/4/2011	5:21:37 PM	Run finished at 5:21 PM
10/4/2011	5:21:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2011	5:25:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2011	5:25:26 PM	Recipe started at 5:25 PM
10/4/2011	5:25:26 PM	Helium valve closed
10/4/2011	5:25:26 PM	H2 valve closed
10/4/2011	5:25:26 PM	BCl3 valve closed
10/4/2011	5:25:26 PM	PH3 valve closed
10/4/2011	5:25:26 PM	SiCl4 pre valve closed
10/4/2011	5:25:26 PM	SiCl4 post valve closed
10/4/2011	5:25:26 PM	Main Vac valve closed
10/4/2011	5:25:26 PM	Bubbler valve closed
10/4/2011	5:25:26 PM	Bypass valve opened
10/4/2011	5:25:26 PM	Helium MFC set to  0.000000
10/4/2011	5:25:26 PM	H2 MFC set to  0.000000
10/4/2011	5:25:26 PM	BCl3 MFC set to  0.000000
10/4/2011	5:25:26 PM	PHl3 MFC set to  0.000000
10/4/2011	5:25:26 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:25:26 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:25:26 PM	Tube furnace set to 0
10/4/2011	5:26:30 PM	Helium valve closed
10/4/2011	5:26:30 PM	H2 valve closed
10/4/2011	5:26:30 PM	BCl3 valve closed
10/4/2011	5:26:30 PM	PH3 valve closed
10/4/2011	5:26:30 PM	SiCl4 pre valve closed
10/4/2011	5:26:30 PM	SiCl4 post valve closed
10/4/2011	5:26:30 PM	Main Vac valve closed
10/4/2011	5:26:30 PM	Bubbler valve closed
10/4/2011	5:26:30 PM	Bypass valve opened
10/4/2011	5:26:31 PM	Helium MFC set to  0.000000
10/4/2011	5:26:31 PM	H2 MFC set to  0.000000
10/4/2011	5:26:31 PM	BCl3 MFC set to  0.000000
10/4/2011	5:26:31 PM	PHl3 MFC set to  0.000000
10/4/2011	5:26:31 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:26:31 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:26:31 PM	Tube furnace set to 0
10/4/2011	5:26:53 PM	Helium valve closed
10/4/2011	5:26:53 PM	H2 valve closed
10/4/2011	5:26:53 PM	BCl3 valve closed
10/4/2011	5:26:53 PM	PH3 valve closed
10/4/2011	5:26:53 PM	SiCl4 pre valve closed
10/4/2011	5:26:53 PM	SiCl4 post valve closed
10/4/2011	5:26:53 PM	Bypass valve closed
10/4/2011	5:26:53 PM	Bubbler valve closed
10/4/2011	5:26:53 PM	Main Vac valve opened
10/4/2011	5:26:53 PM	Helium MFC set to  0.000000
10/4/2011	5:26:53 PM	H2 MFC set to  0.000000
10/4/2011	5:26:53 PM	BCl3 MFC set to  0.000000
10/4/2011	5:26:53 PM	PHl3 MFC set to  0.000000
10/4/2011	5:26:53 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:26:53 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:26:53 PM	Tube furnace set to 0
10/4/2011	5:26:54 PM	Run finished at 5:26 PM
10/4/2011	5:26:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2011	5:26:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/4/2011	5:27:10 PM	Recipe started at 5:27 PM
10/4/2011	5:27:10 PM	Helium valve closed
10/4/2011	5:27:10 PM	H2 valve closed
10/4/2011	5:27:10 PM	BCl3 valve closed
10/4/2011	5:27:10 PM	PH3 valve closed
10/4/2011	5:27:10 PM	SiCl4 pre valve closed
10/4/2011	5:27:10 PM	SiCl4 post valve closed
10/4/2011	5:27:10 PM	Main Vac valve closed
10/4/2011	5:27:10 PM	Bubbler valve closed
10/4/2011	5:27:10 PM	Bypass valve opened
10/4/2011	5:27:10 PM	Helium MFC set to  0.000000
10/4/2011	5:27:10 PM	H2 MFC set to  0.000000
10/4/2011	5:27:10 PM	BCl3 MFC set to  0.000000
10/4/2011	5:27:10 PM	PHl3 MFC set to  0.000000
10/4/2011	5:27:10 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:27:10 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:27:10 PM	Tube furnace set to 0
10/4/2011	5:27:11 PM	Helium valve closed
10/4/2011	5:27:11 PM	H2 valve closed
10/4/2011	5:27:11 PM	BCl3 valve closed
10/4/2011	5:27:11 PM	PH3 valve closed
10/4/2011	5:27:11 PM	SiCl4 pre valve closed
10/4/2011	5:27:11 PM	SiCl4 post valve closed
10/4/2011	5:27:11 PM	Main Vac valve closed
10/4/2011	5:27:11 PM	Bubbler valve closed
10/4/2011	5:27:11 PM	Bypass valve opened
10/4/2011	5:27:11 PM	Helium MFC set to  0.000000
10/4/2011	5:27:11 PM	H2 MFC set to  0.000000
10/4/2011	5:27:11 PM	BCl3 MFC set to  0.000000
10/4/2011	5:27:11 PM	PHl3 MFC set to  0.000000
10/4/2011	5:27:11 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:27:11 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:27:11 PM	Tube furnace set to 0
10/4/2011	5:27:41 PM	Helium valve closed
10/4/2011	5:27:41 PM	H2 valve closed
10/4/2011	5:27:41 PM	BCl3 valve closed
10/4/2011	5:27:41 PM	PH3 valve closed
10/4/2011	5:27:41 PM	SiCl4 pre valve closed
10/4/2011	5:27:41 PM	SiCl4 post valve closed
10/4/2011	5:27:41 PM	Bypass valve closed
10/4/2011	5:27:41 PM	Bubbler valve closed
10/4/2011	5:27:41 PM	Main Vac valve opened
10/4/2011	5:27:41 PM	Helium MFC set to  0.000000
10/4/2011	5:27:41 PM	H2 MFC set to  0.000000
10/4/2011	5:27:41 PM	BCl3 MFC set to  0.000000
10/4/2011	5:27:41 PM	PHl3 MFC set to  0.000000
10/4/2011	5:27:41 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:27:41 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:27:41 PM	Tube furnace set to 0
10/4/2011	5:28:11 PM	H2 valve closed
10/4/2011	5:28:11 PM	BCl3 valve closed
10/4/2011	5:28:11 PM	PH3 valve closed
10/4/2011	5:28:11 PM	SiCl4 pre valve closed
10/4/2011	5:28:11 PM	SiCl4 post valve closed
10/4/2011	5:28:11 PM	Bypass valve closed
10/4/2011	5:28:11 PM	Bubbler valve closed
10/4/2011	5:28:11 PM	Helium valve opened
10/4/2011	5:28:11 PM	Main Vac valve opened
10/4/2011	5:28:11 PM	Helium MFC set to  20.000000
10/4/2011	5:28:11 PM	H2 MFC set to  0.000000
10/4/2011	5:28:11 PM	BCl3 MFC set to  0.000000
10/4/2011	5:28:11 PM	PHl3 MFC set to  0.000000
10/4/2011	5:28:11 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:28:11 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:28:11 PM	Tube furnace set to 0
10/4/2011	5:28:41 PM	Helium valve closed
10/4/2011	5:28:41 PM	H2 valve closed
10/4/2011	5:28:41 PM	BCl3 valve closed
10/4/2011	5:28:41 PM	PH3 valve closed
10/4/2011	5:28:41 PM	SiCl4 pre valve closed
10/4/2011	5:28:41 PM	SiCl4 post valve closed
10/4/2011	5:28:41 PM	Bypass valve closed
10/4/2011	5:28:41 PM	Bubbler valve closed
10/4/2011	5:28:41 PM	Main Vac valve opened
10/4/2011	5:28:41 PM	Helium MFC set to  0.000000
10/4/2011	5:28:41 PM	H2 MFC set to  0.000000
10/4/2011	5:28:41 PM	BCl3 MFC set to  0.000000
10/4/2011	5:28:41 PM	PHl3 MFC set to  0.000000
10/4/2011	5:28:41 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:28:41 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:28:41 PM	Tube furnace set to 0
10/4/2011	5:29:11 PM	H2 valve closed
10/4/2011	5:29:11 PM	BCl3 valve closed
10/4/2011	5:29:11 PM	PH3 valve closed
10/4/2011	5:29:11 PM	SiCl4 pre valve closed
10/4/2011	5:29:11 PM	SiCl4 post valve closed
10/4/2011	5:29:11 PM	Bypass valve closed
10/4/2011	5:29:11 PM	Bubbler valve closed
10/4/2011	5:29:11 PM	Helium valve opened
10/4/2011	5:29:11 PM	Main Vac valve opened
10/4/2011	5:29:11 PM	Helium MFC set to  20.000000
10/4/2011	5:29:11 PM	H2 MFC set to  0.000000
10/4/2011	5:29:11 PM	BCl3 MFC set to  0.000000
10/4/2011	5:29:11 PM	PHl3 MFC set to  0.000000
10/4/2011	5:29:11 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:29:11 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:29:12 PM	Tube furnace set to 0
10/4/2011	5:29:42 PM	Helium valve closed
10/4/2011	5:29:42 PM	H2 valve closed
10/4/2011	5:29:42 PM	BCl3 valve closed
10/4/2011	5:29:42 PM	PH3 valve closed
10/4/2011	5:29:42 PM	SiCl4 pre valve closed
10/4/2011	5:29:42 PM	SiCl4 post valve closed
10/4/2011	5:29:42 PM	Bypass valve closed
10/4/2011	5:29:42 PM	Bubbler valve closed
10/4/2011	5:29:42 PM	Main Vac valve opened
10/4/2011	5:29:42 PM	Helium MFC set to  0.000000
10/4/2011	5:29:42 PM	H2 MFC set to  0.000000
10/4/2011	5:29:42 PM	BCl3 MFC set to  0.000000
10/4/2011	5:29:42 PM	PHl3 MFC set to  0.000000
10/4/2011	5:29:42 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:29:42 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:29:42 PM	Tube furnace set to 0
10/4/2011	5:30:12 PM	H2 valve closed
10/4/2011	5:30:12 PM	BCl3 valve closed
10/4/2011	5:30:12 PM	PH3 valve closed
10/4/2011	5:30:12 PM	SiCl4 pre valve closed
10/4/2011	5:30:12 PM	SiCl4 post valve closed
10/4/2011	5:30:12 PM	Bypass valve closed
10/4/2011	5:30:12 PM	Bubbler valve closed
10/4/2011	5:30:12 PM	Helium valve opened
10/4/2011	5:30:12 PM	Main Vac valve opened
10/4/2011	5:30:12 PM	Helium MFC set to  20.000000
10/4/2011	5:30:12 PM	H2 MFC set to  0.000000
10/4/2011	5:30:12 PM	BCl3 MFC set to  0.000000
10/4/2011	5:30:12 PM	PHl3 MFC set to  0.000000
10/4/2011	5:30:12 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:30:12 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:30:12 PM	Tube furnace set to 0
10/4/2011	5:30:42 PM	Helium valve closed
10/4/2011	5:30:42 PM	H2 valve closed
10/4/2011	5:30:42 PM	BCl3 valve closed
10/4/2011	5:30:42 PM	PH3 valve closed
10/4/2011	5:30:42 PM	SiCl4 pre valve closed
10/4/2011	5:30:42 PM	SiCl4 post valve closed
10/4/2011	5:30:42 PM	Bypass valve closed
10/4/2011	5:30:42 PM	Bubbler valve closed
10/4/2011	5:30:42 PM	Main Vac valve opened
10/4/2011	5:30:42 PM	Helium MFC set to  0.000000
10/4/2011	5:30:42 PM	H2 MFC set to  0.000000
10/4/2011	5:30:42 PM	BCl3 MFC set to  0.000000
10/4/2011	5:30:42 PM	PHl3 MFC set to  0.000000
10/4/2011	5:30:42 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:30:42 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:30:42 PM	Tube furnace set to 0
10/4/2011	5:31:12 PM	H2 valve closed
10/4/2011	5:31:12 PM	BCl3 valve closed
10/4/2011	5:31:12 PM	PH3 valve closed
10/4/2011	5:31:12 PM	SiCl4 pre valve closed
10/4/2011	5:31:12 PM	SiCl4 post valve closed
10/4/2011	5:31:12 PM	Bypass valve closed
10/4/2011	5:31:12 PM	Bubbler valve closed
10/4/2011	5:31:12 PM	Helium valve opened
10/4/2011	5:31:12 PM	Main Vac valve opened
10/4/2011	5:31:12 PM	Helium MFC set to  20.000000
10/4/2011	5:31:12 PM	H2 MFC set to  0.000000
10/4/2011	5:31:12 PM	BCl3 MFC set to  0.000000
10/4/2011	5:31:12 PM	PHl3 MFC set to  0.000000
10/4/2011	5:31:12 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:31:12 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:31:12 PM	Tube furnace set to 0
10/4/2011	5:31:42 PM	Helium valve closed
10/4/2011	5:31:42 PM	H2 valve closed
10/4/2011	5:31:42 PM	BCl3 valve closed
10/4/2011	5:31:42 PM	PH3 valve closed
10/4/2011	5:31:42 PM	SiCl4 pre valve closed
10/4/2011	5:31:42 PM	SiCl4 post valve closed
10/4/2011	5:31:42 PM	Bypass valve closed
10/4/2011	5:31:42 PM	Bubbler valve closed
10/4/2011	5:31:42 PM	Main Vac valve opened
10/4/2011	5:31:42 PM	Helium MFC set to  0.000000
10/4/2011	5:31:42 PM	H2 MFC set to  0.000000
10/4/2011	5:31:42 PM	BCl3 MFC set to  0.000000
10/4/2011	5:31:42 PM	PHl3 MFC set to  0.000000
10/4/2011	5:31:42 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:31:42 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:31:43 PM	Tube furnace set to 0
10/4/2011	5:32:13 PM	H2 valve closed
10/4/2011	5:32:13 PM	BCl3 valve closed
10/4/2011	5:32:13 PM	PH3 valve closed
10/4/2011	5:32:13 PM	SiCl4 pre valve closed
10/4/2011	5:32:13 PM	SiCl4 post valve closed
10/4/2011	5:32:13 PM	Bypass valve closed
10/4/2011	5:32:13 PM	Bubbler valve closed
10/4/2011	5:32:13 PM	Helium valve opened
10/4/2011	5:32:13 PM	Main Vac valve opened
10/4/2011	5:32:13 PM	Helium MFC set to  20.000000
10/4/2011	5:32:13 PM	H2 MFC set to  0.000000
10/4/2011	5:32:13 PM	BCl3 MFC set to  0.000000
10/4/2011	5:32:13 PM	PHl3 MFC set to  0.000000
10/4/2011	5:32:13 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:32:13 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:32:13 PM	Tube furnace set to 0
10/4/2011	5:32:43 PM	Helium valve closed
10/4/2011	5:32:43 PM	H2 valve closed
10/4/2011	5:32:43 PM	BCl3 valve closed
10/4/2011	5:32:43 PM	PH3 valve closed
10/4/2011	5:32:43 PM	SiCl4 pre valve closed
10/4/2011	5:32:43 PM	SiCl4 post valve closed
10/4/2011	5:32:43 PM	Bypass valve closed
10/4/2011	5:32:43 PM	Bubbler valve closed
10/4/2011	5:32:43 PM	Main Vac valve opened
10/4/2011	5:32:43 PM	Helium MFC set to  0.000000
10/4/2011	5:32:43 PM	H2 MFC set to  0.000000
10/4/2011	5:32:43 PM	BCl3 MFC set to  0.000000
10/4/2011	5:32:43 PM	PHl3 MFC set to  0.000000
10/4/2011	5:32:43 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:32:43 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:32:43 PM	Tube furnace set to 0
10/4/2011	5:33:13 PM	H2 valve closed
10/4/2011	5:33:13 PM	BCl3 valve closed
10/4/2011	5:33:13 PM	PH3 valve closed
10/4/2011	5:33:13 PM	SiCl4 pre valve closed
10/4/2011	5:33:13 PM	SiCl4 post valve closed
10/4/2011	5:33:13 PM	Bypass valve closed
10/4/2011	5:33:13 PM	Bubbler valve closed
10/4/2011	5:33:13 PM	Helium valve opened
10/4/2011	5:33:13 PM	Main Vac valve opened
10/4/2011	5:33:13 PM	Helium MFC set to  20.000000
10/4/2011	5:33:13 PM	H2 MFC set to  0.000000
10/4/2011	5:33:13 PM	BCl3 MFC set to  0.000000
10/4/2011	5:33:13 PM	PHl3 MFC set to  0.000000
10/4/2011	5:33:13 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:33:13 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:33:13 PM	Tube furnace set to 0
10/4/2011	5:33:43 PM	Helium valve closed
10/4/2011	5:33:43 PM	H2 valve closed
10/4/2011	5:33:43 PM	BCl3 valve closed
10/4/2011	5:33:43 PM	PH3 valve closed
10/4/2011	5:33:43 PM	SiCl4 pre valve closed
10/4/2011	5:33:43 PM	SiCl4 post valve closed
10/4/2011	5:33:43 PM	Bypass valve closed
10/4/2011	5:33:43 PM	Bubbler valve closed
10/4/2011	5:33:43 PM	Main Vac valve opened
10/4/2011	5:33:43 PM	Helium MFC set to  0.000000
10/4/2011	5:33:43 PM	H2 MFC set to  0.000000
10/4/2011	5:33:43 PM	BCl3 MFC set to  0.000000
10/4/2011	5:33:43 PM	PHl3 MFC set to  0.000000
10/4/2011	5:33:43 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:33:43 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:33:43 PM	Tube furnace set to 0
10/4/2011	5:34:14 PM	H2 valve closed
10/4/2011	5:34:14 PM	BCl3 valve closed
10/4/2011	5:34:14 PM	PH3 valve closed
10/4/2011	5:34:14 PM	SiCl4 pre valve closed
10/4/2011	5:34:14 PM	SiCl4 post valve closed
10/4/2011	5:34:14 PM	Bypass valve closed
10/4/2011	5:34:14 PM	Bubbler valve closed
10/4/2011	5:34:14 PM	Helium valve opened
10/4/2011	5:34:14 PM	Main Vac valve opened
10/4/2011	5:34:14 PM	Helium MFC set to  20.000000
10/4/2011	5:34:14 PM	H2 MFC set to  0.000000
10/4/2011	5:34:14 PM	BCl3 MFC set to  0.000000
10/4/2011	5:34:14 PM	PHl3 MFC set to  0.000000
10/4/2011	5:34:14 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:34:14 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:34:14 PM	Tube furnace set to 0
10/4/2011	5:34:44 PM	Helium valve closed
10/4/2011	5:34:44 PM	H2 valve closed
10/4/2011	5:34:44 PM	BCl3 valve closed
10/4/2011	5:34:44 PM	PH3 valve closed
10/4/2011	5:34:44 PM	SiCl4 pre valve closed
10/4/2011	5:34:44 PM	SiCl4 post valve closed
10/4/2011	5:34:44 PM	Bypass valve closed
10/4/2011	5:34:44 PM	Bubbler valve closed
10/4/2011	5:34:44 PM	Main Vac valve opened
10/4/2011	5:34:44 PM	Helium MFC set to  0.000000
10/4/2011	5:34:44 PM	H2 MFC set to  0.000000
10/4/2011	5:34:44 PM	BCl3 MFC set to  0.000000
10/4/2011	5:34:44 PM	PHl3 MFC set to  0.000000
10/4/2011	5:34:44 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:34:44 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:34:44 PM	Tube furnace set to 0
10/4/2011	5:35:14 PM	H2 valve closed
10/4/2011	5:35:14 PM	BCl3 valve closed
10/4/2011	5:35:14 PM	PH3 valve closed
10/4/2011	5:35:14 PM	SiCl4 pre valve closed
10/4/2011	5:35:14 PM	SiCl4 post valve closed
10/4/2011	5:35:14 PM	Bypass valve closed
10/4/2011	5:35:14 PM	Bubbler valve closed
10/4/2011	5:35:14 PM	Helium valve opened
10/4/2011	5:35:14 PM	Main Vac valve opened
10/4/2011	5:35:14 PM	Helium MFC set to  20.000000
10/4/2011	5:35:14 PM	H2 MFC set to  0.000000
10/4/2011	5:35:14 PM	BCl3 MFC set to  0.000000
10/4/2011	5:35:14 PM	PHl3 MFC set to  0.000000
10/4/2011	5:35:14 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:35:14 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:35:14 PM	Tube furnace set to 0
10/4/2011	5:35:44 PM	Helium valve closed
10/4/2011	5:35:44 PM	H2 valve closed
10/4/2011	5:35:44 PM	BCl3 valve closed
10/4/2011	5:35:44 PM	PH3 valve closed
10/4/2011	5:35:44 PM	SiCl4 pre valve closed
10/4/2011	5:35:44 PM	SiCl4 post valve closed
10/4/2011	5:35:44 PM	Bypass valve closed
10/4/2011	5:35:44 PM	Bubbler valve closed
10/4/2011	5:35:44 PM	Main Vac valve opened
10/4/2011	5:35:44 PM	Helium MFC set to  0.000000
10/4/2011	5:35:44 PM	H2 MFC set to  0.000000
10/4/2011	5:35:44 PM	BCl3 MFC set to  0.000000
10/4/2011	5:35:44 PM	PHl3 MFC set to  0.000000
10/4/2011	5:35:44 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:35:44 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:35:44 PM	Tube furnace set to 0
10/4/2011	5:36:14 PM	H2 valve closed
10/4/2011	5:36:14 PM	BCl3 valve closed
10/4/2011	5:36:14 PM	PH3 valve closed
10/4/2011	5:36:14 PM	SiCl4 pre valve closed
10/4/2011	5:36:14 PM	SiCl4 post valve closed
10/4/2011	5:36:14 PM	Bypass valve closed
10/4/2011	5:36:14 PM	Bubbler valve closed
10/4/2011	5:36:14 PM	Helium valve opened
10/4/2011	5:36:14 PM	Main Vac valve opened
10/4/2011	5:36:14 PM	Helium MFC set to  20.000000
10/4/2011	5:36:14 PM	H2 MFC set to  0.000000
10/4/2011	5:36:14 PM	BCl3 MFC set to  0.000000
10/4/2011	5:36:14 PM	PHl3 MFC set to  0.000000
10/4/2011	5:36:14 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:36:14 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:36:15 PM	Tube furnace set to 0
10/4/2011	5:36:45 PM	Helium valve closed
10/4/2011	5:36:45 PM	H2 valve closed
10/4/2011	5:36:45 PM	BCl3 valve closed
10/4/2011	5:36:45 PM	PH3 valve closed
10/4/2011	5:36:45 PM	SiCl4 pre valve closed
10/4/2011	5:36:45 PM	SiCl4 post valve closed
10/4/2011	5:36:45 PM	Bypass valve closed
10/4/2011	5:36:45 PM	Bubbler valve closed
10/4/2011	5:36:45 PM	Main Vac valve opened
10/4/2011	5:36:45 PM	Helium MFC set to  0.000000
10/4/2011	5:36:45 PM	H2 MFC set to  0.000000
10/4/2011	5:36:45 PM	BCl3 MFC set to  0.000000
10/4/2011	5:36:45 PM	PHl3 MFC set to  0.000000
10/4/2011	5:36:45 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:36:45 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:36:45 PM	Tube furnace set to 0
10/4/2011	5:37:15 PM	H2 valve closed
10/4/2011	5:37:15 PM	BCl3 valve closed
10/4/2011	5:37:15 PM	PH3 valve closed
10/4/2011	5:37:15 PM	SiCl4 pre valve closed
10/4/2011	5:37:15 PM	SiCl4 post valve closed
10/4/2011	5:37:15 PM	Bypass valve closed
10/4/2011	5:37:15 PM	Bubbler valve closed
10/4/2011	5:37:15 PM	Helium valve opened
10/4/2011	5:37:15 PM	Main Vac valve opened
10/4/2011	5:37:15 PM	Helium MFC set to  20.000000
10/4/2011	5:37:15 PM	H2 MFC set to  0.000000
10/4/2011	5:37:15 PM	BCl3 MFC set to  0.000000
10/4/2011	5:37:15 PM	PHl3 MFC set to  0.000000
10/4/2011	5:37:15 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:37:15 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:37:15 PM	Tube furnace set to 0
10/4/2011	5:37:45 PM	Helium valve closed
10/4/2011	5:37:45 PM	H2 valve closed
10/4/2011	5:37:45 PM	BCl3 valve closed
10/4/2011	5:37:45 PM	PH3 valve closed
10/4/2011	5:37:45 PM	SiCl4 pre valve closed
10/4/2011	5:37:45 PM	SiCl4 post valve closed
10/4/2011	5:37:45 PM	Bypass valve closed
10/4/2011	5:37:45 PM	Bubbler valve closed
10/4/2011	5:37:45 PM	Main Vac valve opened
10/4/2011	5:37:45 PM	Helium MFC set to  0.000000
10/4/2011	5:37:45 PM	H2 MFC set to  0.000000
10/4/2011	5:37:45 PM	BCl3 MFC set to  0.000000
10/4/2011	5:37:45 PM	PHl3 MFC set to  0.000000
10/4/2011	5:37:45 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:37:45 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:37:45 PM	Tube furnace set to 0
10/4/2011	5:37:46 PM	Run finished at 5:37 PM
10/4/2011	5:37:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/4/2011	5:44:01 PM	Recipe started at 5:43 PM
10/4/2011	5:44:01 PM	Helium valve closed
10/4/2011	5:44:01 PM	H2 valve closed
10/4/2011	5:44:01 PM	BCl3 valve closed
10/4/2011	5:44:01 PM	PH3 valve closed
10/4/2011	5:44:01 PM	SiCl4 pre valve closed
10/4/2011	5:44:01 PM	SiCl4 post valve closed
10/4/2011	5:44:01 PM	Main Vac valve closed
10/4/2011	5:44:01 PM	Bubbler valve closed
10/4/2011	5:44:01 PM	Bypass valve opened
10/4/2011	5:44:01 PM	Helium MFC set to  0.000000
10/4/2011	5:44:01 PM	H2 MFC set to  0.000000
10/4/2011	5:44:01 PM	BCl3 MFC set to  0.000000
10/4/2011	5:44:01 PM	PHl3 MFC set to  0.000000
10/4/2011	5:44:01 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:44:01 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:44:02 PM	Tube furnace set to 150
10/4/2011	5:44:02 PM	Helium valve closed
10/4/2011	5:44:02 PM	H2 valve closed
10/4/2011	5:44:02 PM	BCl3 valve closed
10/4/2011	5:44:02 PM	PH3 valve closed
10/4/2011	5:44:02 PM	SiCl4 pre valve closed
10/4/2011	5:44:02 PM	SiCl4 post valve closed
10/4/2011	5:44:02 PM	Main Vac valve closed
10/4/2011	5:44:02 PM	Bubbler valve closed
10/4/2011	5:44:02 PM	Bypass valve opened
10/4/2011	5:44:02 PM	Helium MFC set to  0.000000
10/4/2011	5:44:02 PM	H2 MFC set to  0.000000
10/4/2011	5:44:02 PM	BCl3 MFC set to  0.000000
10/4/2011	5:44:02 PM	PHl3 MFC set to  0.000000
10/4/2011	5:44:02 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:44:02 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:44:02 PM	Tube furnace set to 150
10/4/2011	5:44:32 PM	Helium valve closed
10/4/2011	5:44:32 PM	H2 valve closed
10/4/2011	5:44:32 PM	BCl3 valve closed
10/4/2011	5:44:32 PM	PH3 valve closed
10/4/2011	5:44:32 PM	SiCl4 pre valve closed
10/4/2011	5:44:32 PM	SiCl4 post valve closed
10/4/2011	5:44:32 PM	Bypass valve closed
10/4/2011	5:44:32 PM	Bubbler valve closed
10/4/2011	5:44:32 PM	Main Vac valve opened
10/4/2011	5:44:32 PM	Helium MFC set to  0.000000
10/4/2011	5:44:32 PM	H2 MFC set to  0.000000
10/4/2011	5:44:32 PM	BCl3 MFC set to  0.000000
10/4/2011	5:44:32 PM	PHl3 MFC set to  0.000000
10/4/2011	5:44:32 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:44:32 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:44:32 PM	Tube furnace set to 150
10/4/2011	5:45:02 PM	H2 valve closed
10/4/2011	5:45:02 PM	BCl3 valve closed
10/4/2011	5:45:02 PM	PH3 valve closed
10/4/2011	5:45:02 PM	SiCl4 pre valve closed
10/4/2011	5:45:02 PM	SiCl4 post valve closed
10/4/2011	5:45:02 PM	Bypass valve closed
10/4/2011	5:45:02 PM	Bubbler valve closed
10/4/2011	5:45:02 PM	Helium valve opened
10/4/2011	5:45:02 PM	Main Vac valve opened
10/4/2011	5:45:02 PM	Helium MFC set to  20.000000
10/4/2011	5:45:02 PM	H2 MFC set to  0.000000
10/4/2011	5:45:02 PM	BCl3 MFC set to  0.000000
10/4/2011	5:45:02 PM	PHl3 MFC set to  0.000000
10/4/2011	5:45:02 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:45:02 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:45:02 PM	Tube furnace set to 150
10/4/2011	5:45:32 PM	Helium valve closed
10/4/2011	5:45:32 PM	H2 valve closed
10/4/2011	5:45:32 PM	BCl3 valve closed
10/4/2011	5:45:32 PM	PH3 valve closed
10/4/2011	5:45:32 PM	SiCl4 pre valve closed
10/4/2011	5:45:32 PM	SiCl4 post valve closed
10/4/2011	5:45:32 PM	Bypass valve closed
10/4/2011	5:45:32 PM	Bubbler valve closed
10/4/2011	5:45:32 PM	Main Vac valve opened
10/4/2011	5:45:32 PM	Helium MFC set to  0.000000
10/4/2011	5:45:32 PM	H2 MFC set to  0.000000
10/4/2011	5:45:32 PM	BCl3 MFC set to  0.000000
10/4/2011	5:45:32 PM	PHl3 MFC set to  0.000000
10/4/2011	5:45:32 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:45:32 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:45:33 PM	Tube furnace set to 150
10/4/2011	5:46:03 PM	H2 valve closed
10/4/2011	5:46:03 PM	BCl3 valve closed
10/4/2011	5:46:03 PM	PH3 valve closed
10/4/2011	5:46:03 PM	SiCl4 pre valve closed
10/4/2011	5:46:03 PM	SiCl4 post valve closed
10/4/2011	5:46:03 PM	Bypass valve closed
10/4/2011	5:46:03 PM	Bubbler valve closed
10/4/2011	5:46:03 PM	Helium valve opened
10/4/2011	5:46:03 PM	Main Vac valve opened
10/4/2011	5:46:03 PM	Helium MFC set to  20.000000
10/4/2011	5:46:03 PM	H2 MFC set to  0.000000
10/4/2011	5:46:03 PM	BCl3 MFC set to  0.000000
10/4/2011	5:46:03 PM	PHl3 MFC set to  0.000000
10/4/2011	5:46:03 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:46:03 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:46:03 PM	Tube furnace set to 150
10/4/2011	5:46:33 PM	Helium valve closed
10/4/2011	5:46:33 PM	H2 valve closed
10/4/2011	5:46:33 PM	BCl3 valve closed
10/4/2011	5:46:33 PM	PH3 valve closed
10/4/2011	5:46:33 PM	SiCl4 pre valve closed
10/4/2011	5:46:33 PM	SiCl4 post valve closed
10/4/2011	5:46:33 PM	Bypass valve closed
10/4/2011	5:46:33 PM	Bubbler valve closed
10/4/2011	5:46:33 PM	Main Vac valve opened
10/4/2011	5:46:33 PM	Helium MFC set to  0.000000
10/4/2011	5:46:33 PM	H2 MFC set to  0.000000
10/4/2011	5:46:33 PM	BCl3 MFC set to  0.000000
10/4/2011	5:46:33 PM	PHl3 MFC set to  0.000000
10/4/2011	5:46:33 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:46:33 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:46:33 PM	Tube furnace set to 150
10/4/2011	5:47:03 PM	H2 valve closed
10/4/2011	5:47:03 PM	BCl3 valve closed
10/4/2011	5:47:03 PM	PH3 valve closed
10/4/2011	5:47:03 PM	SiCl4 pre valve closed
10/4/2011	5:47:03 PM	SiCl4 post valve closed
10/4/2011	5:47:03 PM	Bypass valve closed
10/4/2011	5:47:03 PM	Bubbler valve closed
10/4/2011	5:47:03 PM	Helium valve opened
10/4/2011	5:47:03 PM	Main Vac valve opened
10/4/2011	5:47:03 PM	Helium MFC set to  20.000000
10/4/2011	5:47:03 PM	H2 MFC set to  0.000000
10/4/2011	5:47:03 PM	BCl3 MFC set to  0.000000
10/4/2011	5:47:03 PM	PHl3 MFC set to  0.000000
10/4/2011	5:47:03 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:47:03 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:47:03 PM	Tube furnace set to 150
10/4/2011	5:47:33 PM	Helium valve closed
10/4/2011	5:47:33 PM	H2 valve closed
10/4/2011	5:47:33 PM	BCl3 valve closed
10/4/2011	5:47:33 PM	PH3 valve closed
10/4/2011	5:47:33 PM	SiCl4 pre valve closed
10/4/2011	5:47:33 PM	SiCl4 post valve closed
10/4/2011	5:47:33 PM	Bypass valve closed
10/4/2011	5:47:33 PM	Bubbler valve closed
10/4/2011	5:47:33 PM	Main Vac valve opened
10/4/2011	5:47:33 PM	Helium MFC set to  0.000000
10/4/2011	5:47:33 PM	H2 MFC set to  0.000000
10/4/2011	5:47:33 PM	BCl3 MFC set to  0.000000
10/4/2011	5:47:33 PM	PHl3 MFC set to  0.000000
10/4/2011	5:47:33 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:47:33 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:47:33 PM	Tube furnace set to 150
10/4/2011	5:48:03 PM	H2 valve closed
10/4/2011	5:48:03 PM	BCl3 valve closed
10/4/2011	5:48:04 PM	PH3 valve closed
10/4/2011	5:48:04 PM	SiCl4 pre valve closed
10/4/2011	5:48:04 PM	SiCl4 post valve closed
10/4/2011	5:48:04 PM	Bypass valve closed
10/4/2011	5:48:04 PM	Bubbler valve closed
10/4/2011	5:48:04 PM	Helium valve opened
10/4/2011	5:48:04 PM	Main Vac valve opened
10/4/2011	5:48:04 PM	Helium MFC set to  20.000000
10/4/2011	5:48:04 PM	H2 MFC set to  0.000000
10/4/2011	5:48:04 PM	BCl3 MFC set to  0.000000
10/4/2011	5:48:04 PM	PHl3 MFC set to  0.000000
10/4/2011	5:48:04 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:48:04 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:48:04 PM	Tube furnace set to 150
10/4/2011	5:48:34 PM	Helium valve closed
10/4/2011	5:48:34 PM	H2 valve closed
10/4/2011	5:48:34 PM	BCl3 valve closed
10/4/2011	5:48:34 PM	PH3 valve closed
10/4/2011	5:48:34 PM	SiCl4 pre valve closed
10/4/2011	5:48:34 PM	SiCl4 post valve closed
10/4/2011	5:48:34 PM	Bypass valve closed
10/4/2011	5:48:34 PM	Bubbler valve closed
10/4/2011	5:48:34 PM	Main Vac valve opened
10/4/2011	5:48:34 PM	Helium MFC set to  0.000000
10/4/2011	5:48:34 PM	H2 MFC set to  0.000000
10/4/2011	5:48:34 PM	BCl3 MFC set to  0.000000
10/4/2011	5:48:34 PM	PHl3 MFC set to  0.000000
10/4/2011	5:48:34 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:48:34 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:48:34 PM	Tube furnace set to 150
10/4/2011	5:49:04 PM	H2 valve closed
10/4/2011	5:49:04 PM	BCl3 valve closed
10/4/2011	5:49:04 PM	PH3 valve closed
10/4/2011	5:49:04 PM	SiCl4 pre valve closed
10/4/2011	5:49:04 PM	SiCl4 post valve closed
10/4/2011	5:49:04 PM	Bypass valve closed
10/4/2011	5:49:04 PM	Bubbler valve closed
10/4/2011	5:49:04 PM	Helium valve opened
10/4/2011	5:49:04 PM	Main Vac valve opened
10/4/2011	5:49:04 PM	Helium MFC set to  20.000000
10/4/2011	5:49:04 PM	H2 MFC set to  0.000000
10/4/2011	5:49:04 PM	BCl3 MFC set to  0.000000
10/4/2011	5:49:04 PM	PHl3 MFC set to  0.000000
10/4/2011	5:49:04 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:49:04 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:49:04 PM	Tube furnace set to 150
10/4/2011	5:49:34 PM	Helium valve closed
10/4/2011	5:49:34 PM	H2 valve closed
10/4/2011	5:49:34 PM	BCl3 valve closed
10/4/2011	5:49:34 PM	PH3 valve closed
10/4/2011	5:49:34 PM	SiCl4 pre valve closed
10/4/2011	5:49:34 PM	SiCl4 post valve closed
10/4/2011	5:49:34 PM	Bypass valve closed
10/4/2011	5:49:34 PM	Bubbler valve closed
10/4/2011	5:49:34 PM	Main Vac valve opened
10/4/2011	5:49:34 PM	Helium MFC set to  0.000000
10/4/2011	5:49:34 PM	H2 MFC set to  0.000000
10/4/2011	5:49:34 PM	BCl3 MFC set to  0.000000
10/4/2011	5:49:34 PM	PHl3 MFC set to  0.000000
10/4/2011	5:49:34 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:49:34 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:49:34 PM	Tube furnace set to 150
10/4/2011	5:50:04 PM	H2 valve closed
10/4/2011	5:50:04 PM	BCl3 valve closed
10/4/2011	5:50:04 PM	PH3 valve closed
10/4/2011	5:50:04 PM	SiCl4 pre valve closed
10/4/2011	5:50:04 PM	SiCl4 post valve closed
10/4/2011	5:50:04 PM	Bypass valve closed
10/4/2011	5:50:04 PM	Bubbler valve closed
10/4/2011	5:50:04 PM	Helium valve opened
10/4/2011	5:50:04 PM	Main Vac valve opened
10/4/2011	5:50:04 PM	Helium MFC set to  20.000000
10/4/2011	5:50:04 PM	H2 MFC set to  0.000000
10/4/2011	5:50:04 PM	BCl3 MFC set to  0.000000
10/4/2011	5:50:04 PM	PHl3 MFC set to  0.000000
10/4/2011	5:50:04 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:50:04 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:50:04 PM	Tube furnace set to 150
10/4/2011	5:50:35 PM	Helium valve closed
10/4/2011	5:50:35 PM	H2 valve closed
10/4/2011	5:50:35 PM	BCl3 valve closed
10/4/2011	5:50:35 PM	PH3 valve closed
10/4/2011	5:50:35 PM	SiCl4 pre valve closed
10/4/2011	5:50:35 PM	SiCl4 post valve closed
10/4/2011	5:50:35 PM	Bypass valve closed
10/4/2011	5:50:35 PM	Bubbler valve closed
10/4/2011	5:50:35 PM	Main Vac valve opened
10/4/2011	5:50:35 PM	Helium MFC set to  0.000000
10/4/2011	5:50:35 PM	H2 MFC set to  0.000000
10/4/2011	5:50:35 PM	BCl3 MFC set to  0.000000
10/4/2011	5:50:35 PM	PHl3 MFC set to  0.000000
10/4/2011	5:50:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:50:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:50:35 PM	Tube furnace set to 150
10/4/2011	5:51:05 PM	H2 valve closed
10/4/2011	5:51:05 PM	BCl3 valve closed
10/4/2011	5:51:05 PM	PH3 valve closed
10/4/2011	5:51:05 PM	SiCl4 pre valve closed
10/4/2011	5:51:05 PM	SiCl4 post valve closed
10/4/2011	5:51:05 PM	Bypass valve closed
10/4/2011	5:51:05 PM	Bubbler valve closed
10/4/2011	5:51:05 PM	Helium valve opened
10/4/2011	5:51:05 PM	Main Vac valve opened
10/4/2011	5:51:05 PM	Helium MFC set to  20.000000
10/4/2011	5:51:05 PM	H2 MFC set to  0.000000
10/4/2011	5:51:05 PM	BCl3 MFC set to  0.000000
10/4/2011	5:51:05 PM	PHl3 MFC set to  0.000000
10/4/2011	5:51:05 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:51:05 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:51:05 PM	Tube furnace set to 150
10/4/2011	5:51:35 PM	Helium valve closed
10/4/2011	5:51:35 PM	H2 valve closed
10/4/2011	5:51:35 PM	BCl3 valve closed
10/4/2011	5:51:35 PM	PH3 valve closed
10/4/2011	5:51:35 PM	SiCl4 pre valve closed
10/4/2011	5:51:35 PM	SiCl4 post valve closed
10/4/2011	5:51:35 PM	Bypass valve closed
10/4/2011	5:51:35 PM	Bubbler valve closed
10/4/2011	5:51:35 PM	Main Vac valve opened
10/4/2011	5:51:35 PM	Helium MFC set to  0.000000
10/4/2011	5:51:35 PM	H2 MFC set to  0.000000
10/4/2011	5:51:35 PM	BCl3 MFC set to  0.000000
10/4/2011	5:51:35 PM	PHl3 MFC set to  0.000000
10/4/2011	5:51:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:51:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:51:35 PM	Tube furnace set to 150
10/4/2011	5:52:05 PM	H2 valve closed
10/4/2011	5:52:05 PM	BCl3 valve closed
10/4/2011	5:52:05 PM	PH3 valve closed
10/4/2011	5:52:05 PM	SiCl4 pre valve closed
10/4/2011	5:52:05 PM	SiCl4 post valve closed
10/4/2011	5:52:05 PM	Bypass valve closed
10/4/2011	5:52:05 PM	Bubbler valve closed
10/4/2011	5:52:05 PM	Helium valve opened
10/4/2011	5:52:05 PM	Main Vac valve opened
10/4/2011	5:52:05 PM	Helium MFC set to  20.000000
10/4/2011	5:52:05 PM	H2 MFC set to  0.000000
10/4/2011	5:52:05 PM	BCl3 MFC set to  0.000000
10/4/2011	5:52:05 PM	PHl3 MFC set to  0.000000
10/4/2011	5:52:05 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:52:05 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:52:05 PM	Tube furnace set to 150
10/4/2011	5:52:35 PM	Helium valve closed
10/4/2011	5:52:35 PM	H2 valve closed
10/4/2011	5:52:35 PM	BCl3 valve closed
10/4/2011	5:52:35 PM	PH3 valve closed
10/4/2011	5:52:35 PM	SiCl4 pre valve closed
10/4/2011	5:52:35 PM	SiCl4 post valve closed
10/4/2011	5:52:35 PM	Bypass valve closed
10/4/2011	5:52:35 PM	Bubbler valve closed
10/4/2011	5:52:35 PM	Main Vac valve opened
10/4/2011	5:52:35 PM	Helium MFC set to  0.000000
10/4/2011	5:52:35 PM	H2 MFC set to  0.000000
10/4/2011	5:52:35 PM	BCl3 MFC set to  0.000000
10/4/2011	5:52:35 PM	PHl3 MFC set to  0.000000
10/4/2011	5:52:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:52:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:52:36 PM	Tube furnace set to 150
10/4/2011	5:53:06 PM	H2 valve closed
10/4/2011	5:53:06 PM	BCl3 valve closed
10/4/2011	5:53:06 PM	PH3 valve closed
10/4/2011	5:53:06 PM	SiCl4 pre valve closed
10/4/2011	5:53:06 PM	SiCl4 post valve closed
10/4/2011	5:53:06 PM	Bypass valve closed
10/4/2011	5:53:06 PM	Bubbler valve closed
10/4/2011	5:53:06 PM	Helium valve opened
10/4/2011	5:53:06 PM	Main Vac valve opened
10/4/2011	5:53:06 PM	Helium MFC set to  20.000000
10/4/2011	5:53:06 PM	H2 MFC set to  0.000000
10/4/2011	5:53:06 PM	BCl3 MFC set to  0.000000
10/4/2011	5:53:06 PM	PHl3 MFC set to  0.000000
10/4/2011	5:53:06 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:53:06 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:53:06 PM	Tube furnace set to 150
10/4/2011	5:53:36 PM	Helium valve closed
10/4/2011	5:53:36 PM	H2 valve closed
10/4/2011	5:53:36 PM	BCl3 valve closed
10/4/2011	5:53:36 PM	PH3 valve closed
10/4/2011	5:53:36 PM	SiCl4 pre valve closed
10/4/2011	5:53:36 PM	SiCl4 post valve closed
10/4/2011	5:53:36 PM	Bypass valve closed
10/4/2011	5:53:36 PM	Bubbler valve closed
10/4/2011	5:53:36 PM	Main Vac valve opened
10/4/2011	5:53:36 PM	Helium MFC set to  0.000000
10/4/2011	5:53:36 PM	H2 MFC set to  0.000000
10/4/2011	5:53:36 PM	BCl3 MFC set to  0.000000
10/4/2011	5:53:36 PM	PHl3 MFC set to  0.000000
10/4/2011	5:53:36 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:53:36 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:53:36 PM	Tube furnace set to 150
10/4/2011	5:54:06 PM	H2 valve closed
10/4/2011	5:54:06 PM	BCl3 valve closed
10/4/2011	5:54:06 PM	PH3 valve closed
10/4/2011	5:54:06 PM	SiCl4 pre valve closed
10/4/2011	5:54:06 PM	SiCl4 post valve closed
10/4/2011	5:54:06 PM	Bypass valve closed
10/4/2011	5:54:06 PM	Bubbler valve closed
10/4/2011	5:54:06 PM	Helium valve opened
10/4/2011	5:54:06 PM	Main Vac valve opened
10/4/2011	5:54:06 PM	Helium MFC set to  20.000000
10/4/2011	5:54:06 PM	H2 MFC set to  0.000000
10/4/2011	5:54:06 PM	BCl3 MFC set to  0.000000
10/4/2011	5:54:06 PM	PHl3 MFC set to  0.000000
10/4/2011	5:54:06 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:54:06 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:54:06 PM	Tube furnace set to 150
10/4/2011	5:54:36 PM	Helium valve closed
10/4/2011	5:54:36 PM	H2 valve closed
10/4/2011	5:54:36 PM	BCl3 valve closed
10/4/2011	5:54:36 PM	PH3 valve closed
10/4/2011	5:54:36 PM	SiCl4 pre valve closed
10/4/2011	5:54:36 PM	SiCl4 post valve closed
10/4/2011	5:54:36 PM	Bypass valve closed
10/4/2011	5:54:36 PM	Bubbler valve closed
10/4/2011	5:54:36 PM	Main Vac valve opened
10/4/2011	5:54:36 PM	Helium MFC set to  0.000000
10/4/2011	5:54:36 PM	H2 MFC set to  0.000000
10/4/2011	5:54:36 PM	BCl3 MFC set to  0.000000
10/4/2011	5:54:36 PM	PHl3 MFC set to  0.000000
10/4/2011	5:54:36 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:54:36 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:54:36 PM	Tube furnace set to 150
10/4/2011	5:55:06 PM	H2 valve closed
10/4/2011	5:55:06 PM	BCl3 valve closed
10/4/2011	5:55:06 PM	PH3 valve closed
10/4/2011	5:55:06 PM	SiCl4 pre valve closed
10/4/2011	5:55:06 PM	SiCl4 post valve closed
10/4/2011	5:55:06 PM	Bypass valve closed
10/4/2011	5:55:06 PM	Bubbler valve closed
10/4/2011	5:55:06 PM	Helium valve opened
10/4/2011	5:55:06 PM	Main Vac valve opened
10/4/2011	5:55:06 PM	Helium MFC set to  20.000000
10/4/2011	5:55:06 PM	H2 MFC set to  0.000000
10/4/2011	5:55:06 PM	BCl3 MFC set to  0.000000
10/4/2011	5:55:06 PM	PHl3 MFC set to  0.000000
10/4/2011	5:55:06 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:55:06 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:55:07 PM	Tube furnace set to 150
10/4/2011	5:55:37 PM	Helium valve closed
10/4/2011	5:55:37 PM	H2 valve closed
10/4/2011	5:55:37 PM	BCl3 valve closed
10/4/2011	5:55:37 PM	PH3 valve closed
10/4/2011	5:55:37 PM	SiCl4 pre valve closed
10/4/2011	5:55:37 PM	SiCl4 post valve closed
10/4/2011	5:55:37 PM	Bypass valve closed
10/4/2011	5:55:37 PM	Bubbler valve closed
10/4/2011	5:55:37 PM	Main Vac valve opened
10/4/2011	5:55:37 PM	Helium MFC set to  0.000000
10/4/2011	5:55:37 PM	H2 MFC set to  0.000000
10/4/2011	5:55:37 PM	BCl3 MFC set to  0.000000
10/4/2011	5:55:37 PM	PHl3 MFC set to  0.000000
10/4/2011	5:55:37 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:55:37 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:55:37 PM	Tube furnace set to 150
10/4/2011	5:56:07 PM	H2 valve closed
10/4/2011	5:56:07 PM	BCl3 valve closed
10/4/2011	5:56:07 PM	PH3 valve closed
10/4/2011	5:56:07 PM	SiCl4 pre valve closed
10/4/2011	5:56:07 PM	SiCl4 post valve closed
10/4/2011	5:56:07 PM	Bypass valve closed
10/4/2011	5:56:07 PM	Bubbler valve closed
10/4/2011	5:56:07 PM	Helium valve opened
10/4/2011	5:56:07 PM	Main Vac valve opened
10/4/2011	5:56:07 PM	Helium MFC set to  20.000000
10/4/2011	5:56:07 PM	H2 MFC set to  0.000000
10/4/2011	5:56:07 PM	BCl3 MFC set to  0.000000
10/4/2011	5:56:07 PM	PHl3 MFC set to  0.000000
10/4/2011	5:56:07 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:56:07 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:56:07 PM	Tube furnace set to 150
10/4/2011	5:56:37 PM	Helium valve closed
10/4/2011	5:56:37 PM	H2 valve closed
10/4/2011	5:56:37 PM	BCl3 valve closed
10/4/2011	5:56:37 PM	PH3 valve closed
10/4/2011	5:56:37 PM	SiCl4 pre valve closed
10/4/2011	5:56:37 PM	SiCl4 post valve closed
10/4/2011	5:56:37 PM	Bypass valve closed
10/4/2011	5:56:37 PM	Bubbler valve closed
10/4/2011	5:56:37 PM	Main Vac valve opened
10/4/2011	5:56:37 PM	Helium MFC set to  0.000000
10/4/2011	5:56:37 PM	H2 MFC set to  0.000000
10/4/2011	5:56:37 PM	BCl3 MFC set to  0.000000
10/4/2011	5:56:37 PM	PHl3 MFC set to  0.000000
10/4/2011	5:56:37 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:56:37 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:56:37 PM	Tube furnace set to 150
10/4/2011	5:57:07 PM	H2 valve closed
10/4/2011	5:57:07 PM	BCl3 valve closed
10/4/2011	5:57:07 PM	PH3 valve closed
10/4/2011	5:57:07 PM	SiCl4 pre valve closed
10/4/2011	5:57:07 PM	SiCl4 post valve closed
10/4/2011	5:57:07 PM	Bypass valve closed
10/4/2011	5:57:07 PM	Bubbler valve closed
10/4/2011	5:57:07 PM	Helium valve opened
10/4/2011	5:57:07 PM	Main Vac valve opened
10/4/2011	5:57:07 PM	Helium MFC set to  20.000000
10/4/2011	5:57:07 PM	H2 MFC set to  0.000000
10/4/2011	5:57:07 PM	BCl3 MFC set to  0.000000
10/4/2011	5:57:07 PM	PHl3 MFC set to  0.000000
10/4/2011	5:57:07 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:57:07 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:57:07 PM	Tube furnace set to 150
10/4/2011	5:57:37 PM	Helium valve closed
10/4/2011	5:57:37 PM	H2 valve closed
10/4/2011	5:57:37 PM	BCl3 valve closed
10/4/2011	5:57:37 PM	PH3 valve closed
10/4/2011	5:57:37 PM	SiCl4 pre valve closed
10/4/2011	5:57:37 PM	SiCl4 post valve closed
10/4/2011	5:57:37 PM	Bypass valve closed
10/4/2011	5:57:37 PM	Bubbler valve closed
10/4/2011	5:57:37 PM	Main Vac valve opened
10/4/2011	5:57:37 PM	Helium MFC set to  0.000000
10/4/2011	5:57:37 PM	H2 MFC set to  0.000000
10/4/2011	5:57:37 PM	BCl3 MFC set to  0.000000
10/4/2011	5:57:37 PM	PHl3 MFC set to  0.000000
10/4/2011	5:57:37 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:57:37 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:57:38 PM	Tube furnace set to 150
10/4/2011	5:58:08 PM	H2 valve closed
10/4/2011	5:58:08 PM	BCl3 valve closed
10/4/2011	5:58:08 PM	PH3 valve closed
10/4/2011	5:58:08 PM	SiCl4 pre valve closed
10/4/2011	5:58:08 PM	SiCl4 post valve closed
10/4/2011	5:58:08 PM	Bypass valve closed
10/4/2011	5:58:08 PM	Bubbler valve closed
10/4/2011	5:58:08 PM	Helium valve opened
10/4/2011	5:58:08 PM	Main Vac valve opened
10/4/2011	5:58:08 PM	Helium MFC set to  20.000000
10/4/2011	5:58:08 PM	H2 MFC set to  0.000000
10/4/2011	5:58:08 PM	BCl3 MFC set to  0.000000
10/4/2011	5:58:08 PM	PHl3 MFC set to  0.000000
10/4/2011	5:58:08 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:58:08 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:58:08 PM	Tube furnace set to 150
10/4/2011	5:58:38 PM	Helium valve closed
10/4/2011	5:58:38 PM	H2 valve closed
10/4/2011	5:58:38 PM	BCl3 valve closed
10/4/2011	5:58:38 PM	PH3 valve closed
10/4/2011	5:58:38 PM	SiCl4 pre valve closed
10/4/2011	5:58:38 PM	SiCl4 post valve closed
10/4/2011	5:58:38 PM	Bypass valve closed
10/4/2011	5:58:38 PM	Bubbler valve closed
10/4/2011	5:58:38 PM	Main Vac valve opened
10/4/2011	5:58:38 PM	Helium MFC set to  0.000000
10/4/2011	5:58:38 PM	H2 MFC set to  0.000000
10/4/2011	5:58:38 PM	BCl3 MFC set to  0.000000
10/4/2011	5:58:38 PM	PHl3 MFC set to  0.000000
10/4/2011	5:58:38 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:58:38 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:58:38 PM	Tube furnace set to 150
10/4/2011	5:59:08 PM	H2 valve closed
10/4/2011	5:59:08 PM	BCl3 valve closed
10/4/2011	5:59:08 PM	PH3 valve closed
10/4/2011	5:59:08 PM	SiCl4 pre valve closed
10/4/2011	5:59:08 PM	SiCl4 post valve closed
10/4/2011	5:59:08 PM	Bypass valve closed
10/4/2011	5:59:08 PM	Bubbler valve closed
10/4/2011	5:59:08 PM	Helium valve opened
10/4/2011	5:59:08 PM	Main Vac valve opened
10/4/2011	5:59:08 PM	Helium MFC set to  20.000000
10/4/2011	5:59:08 PM	H2 MFC set to  0.000000
10/4/2011	5:59:08 PM	BCl3 MFC set to  0.000000
10/4/2011	5:59:08 PM	PHl3 MFC set to  0.000000
10/4/2011	5:59:08 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:59:08 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:59:08 PM	Tube furnace set to 150
10/4/2011	5:59:38 PM	Helium valve closed
10/4/2011	5:59:38 PM	H2 valve closed
10/4/2011	5:59:38 PM	BCl3 valve closed
10/4/2011	5:59:38 PM	PH3 valve closed
10/4/2011	5:59:38 PM	SiCl4 pre valve closed
10/4/2011	5:59:38 PM	SiCl4 post valve closed
10/4/2011	5:59:38 PM	Bypass valve closed
10/4/2011	5:59:38 PM	Bubbler valve closed
10/4/2011	5:59:38 PM	Main Vac valve opened
10/4/2011	5:59:38 PM	Helium MFC set to  0.000000
10/4/2011	5:59:38 PM	H2 MFC set to  0.000000
10/4/2011	5:59:38 PM	BCl3 MFC set to  0.000000
10/4/2011	5:59:38 PM	PHl3 MFC set to  0.000000
10/4/2011	5:59:38 PM	SiCl4 MFC set to  0.000000
10/4/2011	5:59:38 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	5:59:38 PM	Tube furnace set to 150
10/4/2011	6:00:08 PM	H2 valve closed
10/4/2011	6:00:08 PM	BCl3 valve closed
10/4/2011	6:00:08 PM	PH3 valve closed
10/4/2011	6:00:08 PM	SiCl4 pre valve closed
10/4/2011	6:00:08 PM	SiCl4 post valve closed
10/4/2011	6:00:08 PM	Bypass valve closed
10/4/2011	6:00:08 PM	Bubbler valve closed
10/4/2011	6:00:08 PM	Helium valve opened
10/4/2011	6:00:08 PM	Main Vac valve opened
10/4/2011	6:00:08 PM	Helium MFC set to  20.000000
10/4/2011	6:00:08 PM	H2 MFC set to  0.000000
10/4/2011	6:00:08 PM	BCl3 MFC set to  0.000000
10/4/2011	6:00:08 PM	PHl3 MFC set to  0.000000
10/4/2011	6:00:08 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:00:08 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:00:09 PM	Tube furnace set to 150
10/4/2011	6:00:39 PM	Helium valve closed
10/4/2011	6:00:39 PM	H2 valve closed
10/4/2011	6:00:39 PM	BCl3 valve closed
10/4/2011	6:00:39 PM	PH3 valve closed
10/4/2011	6:00:39 PM	SiCl4 pre valve closed
10/4/2011	6:00:39 PM	SiCl4 post valve closed
10/4/2011	6:00:39 PM	Bypass valve closed
10/4/2011	6:00:39 PM	Bubbler valve closed
10/4/2011	6:00:39 PM	Main Vac valve opened
10/4/2011	6:00:39 PM	Helium MFC set to  0.000000
10/4/2011	6:00:39 PM	H2 MFC set to  0.000000
10/4/2011	6:00:39 PM	BCl3 MFC set to  0.000000
10/4/2011	6:00:39 PM	PHl3 MFC set to  0.000000
10/4/2011	6:00:39 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:00:39 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:00:39 PM	Tube furnace set to 150
10/4/2011	6:01:09 PM	H2 valve closed
10/4/2011	6:01:09 PM	BCl3 valve closed
10/4/2011	6:01:09 PM	PH3 valve closed
10/4/2011	6:01:09 PM	SiCl4 pre valve closed
10/4/2011	6:01:09 PM	SiCl4 post valve closed
10/4/2011	6:01:09 PM	Bypass valve closed
10/4/2011	6:01:09 PM	Bubbler valve closed
10/4/2011	6:01:09 PM	Helium valve opened
10/4/2011	6:01:09 PM	Main Vac valve opened
10/4/2011	6:01:09 PM	Helium MFC set to  20.000000
10/4/2011	6:01:09 PM	H2 MFC set to  0.000000
10/4/2011	6:01:09 PM	BCl3 MFC set to  0.000000
10/4/2011	6:01:09 PM	PHl3 MFC set to  0.000000
10/4/2011	6:01:09 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:01:09 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:01:09 PM	Tube furnace set to 150
10/4/2011	6:01:39 PM	Helium valve closed
10/4/2011	6:01:39 PM	H2 valve closed
10/4/2011	6:01:39 PM	BCl3 valve closed
10/4/2011	6:01:39 PM	PH3 valve closed
10/4/2011	6:01:39 PM	SiCl4 pre valve closed
10/4/2011	6:01:39 PM	SiCl4 post valve closed
10/4/2011	6:01:39 PM	Bypass valve closed
10/4/2011	6:01:39 PM	Bubbler valve closed
10/4/2011	6:01:39 PM	Main Vac valve opened
10/4/2011	6:01:39 PM	Helium MFC set to  0.000000
10/4/2011	6:01:39 PM	H2 MFC set to  0.000000
10/4/2011	6:01:39 PM	BCl3 MFC set to  0.000000
10/4/2011	6:01:39 PM	PHl3 MFC set to  0.000000
10/4/2011	6:01:39 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:01:39 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:01:39 PM	Tube furnace set to 150
10/4/2011	6:02:09 PM	H2 valve closed
10/4/2011	6:02:09 PM	BCl3 valve closed
10/4/2011	6:02:09 PM	PH3 valve closed
10/4/2011	6:02:09 PM	SiCl4 pre valve closed
10/4/2011	6:02:09 PM	SiCl4 post valve closed
10/4/2011	6:02:09 PM	Bypass valve closed
10/4/2011	6:02:09 PM	Bubbler valve closed
10/4/2011	6:02:09 PM	Helium valve opened
10/4/2011	6:02:09 PM	Main Vac valve opened
10/4/2011	6:02:09 PM	Helium MFC set to  20.000000
10/4/2011	6:02:09 PM	H2 MFC set to  0.000000
10/4/2011	6:02:09 PM	BCl3 MFC set to  0.000000
10/4/2011	6:02:09 PM	PHl3 MFC set to  0.000000
10/4/2011	6:02:09 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:02:09 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:02:10 PM	Tube furnace set to 150
10/4/2011	6:02:40 PM	Helium valve closed
10/4/2011	6:02:40 PM	H2 valve closed
10/4/2011	6:02:40 PM	BCl3 valve closed
10/4/2011	6:02:40 PM	PH3 valve closed
10/4/2011	6:02:40 PM	SiCl4 pre valve closed
10/4/2011	6:02:40 PM	SiCl4 post valve closed
10/4/2011	6:02:40 PM	Bypass valve closed
10/4/2011	6:02:40 PM	Bubbler valve closed
10/4/2011	6:02:40 PM	Main Vac valve opened
10/4/2011	6:02:40 PM	Helium MFC set to  0.000000
10/4/2011	6:02:40 PM	H2 MFC set to  0.000000
10/4/2011	6:02:40 PM	BCl3 MFC set to  0.000000
10/4/2011	6:02:40 PM	PHl3 MFC set to  0.000000
10/4/2011	6:02:40 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:02:40 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:02:40 PM	Tube furnace set to 150
10/4/2011	6:03:10 PM	H2 valve closed
10/4/2011	6:03:10 PM	BCl3 valve closed
10/4/2011	6:03:10 PM	PH3 valve closed
10/4/2011	6:03:10 PM	SiCl4 pre valve closed
10/4/2011	6:03:10 PM	SiCl4 post valve closed
10/4/2011	6:03:10 PM	Bypass valve closed
10/4/2011	6:03:10 PM	Bubbler valve closed
10/4/2011	6:03:10 PM	Helium valve opened
10/4/2011	6:03:10 PM	Main Vac valve opened
10/4/2011	6:03:10 PM	Helium MFC set to  20.000000
10/4/2011	6:03:10 PM	H2 MFC set to  0.000000
10/4/2011	6:03:10 PM	BCl3 MFC set to  0.000000
10/4/2011	6:03:10 PM	PHl3 MFC set to  0.000000
10/4/2011	6:03:10 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:03:10 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:03:10 PM	Tube furnace set to 150
10/4/2011	6:03:40 PM	Helium valve closed
10/4/2011	6:03:40 PM	H2 valve closed
10/4/2011	6:03:40 PM	BCl3 valve closed
10/4/2011	6:03:40 PM	PH3 valve closed
10/4/2011	6:03:40 PM	SiCl4 pre valve closed
10/4/2011	6:03:40 PM	SiCl4 post valve closed
10/4/2011	6:03:40 PM	Bypass valve closed
10/4/2011	6:03:40 PM	Bubbler valve closed
10/4/2011	6:03:40 PM	Main Vac valve opened
10/4/2011	6:03:40 PM	Helium MFC set to  0.000000
10/4/2011	6:03:40 PM	H2 MFC set to  0.000000
10/4/2011	6:03:40 PM	BCl3 MFC set to  0.000000
10/4/2011	6:03:40 PM	PHl3 MFC set to  0.000000
10/4/2011	6:03:40 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:03:40 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:03:40 PM	Tube furnace set to 150
10/4/2011	6:04:10 PM	H2 valve closed
10/4/2011	6:04:10 PM	BCl3 valve closed
10/4/2011	6:04:10 PM	PH3 valve closed
10/4/2011	6:04:10 PM	SiCl4 pre valve closed
10/4/2011	6:04:10 PM	SiCl4 post valve closed
10/4/2011	6:04:10 PM	Bypass valve closed
10/4/2011	6:04:10 PM	Bubbler valve closed
10/4/2011	6:04:10 PM	Helium valve opened
10/4/2011	6:04:10 PM	Main Vac valve opened
10/4/2011	6:04:10 PM	Helium MFC set to  20.000000
10/4/2011	6:04:10 PM	H2 MFC set to  0.000000
10/4/2011	6:04:10 PM	BCl3 MFC set to  0.000000
10/4/2011	6:04:10 PM	PHl3 MFC set to  0.000000
10/4/2011	6:04:10 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:04:10 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:04:10 PM	Tube furnace set to 150
10/4/2011	6:04:40 PM	Helium valve closed
10/4/2011	6:04:40 PM	H2 valve closed
10/4/2011	6:04:40 PM	BCl3 valve closed
10/4/2011	6:04:40 PM	PH3 valve closed
10/4/2011	6:04:40 PM	SiCl4 pre valve closed
10/4/2011	6:04:40 PM	SiCl4 post valve closed
10/4/2011	6:04:40 PM	Bypass valve closed
10/4/2011	6:04:40 PM	Bubbler valve closed
10/4/2011	6:04:40 PM	Main Vac valve opened
10/4/2011	6:04:40 PM	Helium MFC set to  0.000000
10/4/2011	6:04:40 PM	H2 MFC set to  0.000000
10/4/2011	6:04:40 PM	BCl3 MFC set to  0.000000
10/4/2011	6:04:40 PM	PHl3 MFC set to  0.000000
10/4/2011	6:04:40 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:04:40 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:04:41 PM	Tube furnace set to 180
10/4/2011	6:04:46 PM	Run finished at 6:04 PM
10/4/2011	6:09:48 PM	Main Vac valve closed
10/4/2011	6:09:54 PM	Main Vac valve opened
10/4/2011	6:11:53 PM	Recipe started at 6:11 PM
10/4/2011	6:11:53 PM	Helium valve closed
10/4/2011	6:11:53 PM	H2 valve closed
10/4/2011	6:11:53 PM	BCl3 valve closed
10/4/2011	6:11:53 PM	PH3 valve closed
10/4/2011	6:11:53 PM	SiCl4 pre valve closed
10/4/2011	6:11:53 PM	SiCl4 post valve closed
10/4/2011	6:11:53 PM	Main Vac valve closed
10/4/2011	6:11:53 PM	Bypass valve closed
10/4/2011	6:11:53 PM	Bubbler valve closed
10/4/2011	6:11:53 PM	Helium MFC set to  0.000000
10/4/2011	6:11:53 PM	H2 MFC set to  0.000000
10/4/2011	6:11:53 PM	BCl3 MFC set to  0.000000
10/4/2011	6:11:53 PM	PHl3 MFC set to  0.000000
10/4/2011	6:11:53 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:11:53 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:11:53 PM	Tube furnace set to 0
10/4/2011	6:11:56 PM	Helium valve closed
10/4/2011	6:11:56 PM	BCl3 valve closed
10/4/2011	6:11:56 PM	PH3 valve closed
10/4/2011	6:11:56 PM	SiCl4 pre valve closed
10/4/2011	6:11:56 PM	SiCl4 post valve closed
10/4/2011	6:11:56 PM	Main Vac valve closed
10/4/2011	6:11:56 PM	Bypass valve closed
10/4/2011	6:11:56 PM	Bubbler valve closed
10/4/2011	6:11:56 PM	H2 valve opened
10/4/2011	6:11:56 PM	Helium MFC set to  0.000000
10/4/2011	6:11:56 PM	H2 MFC set to  500.000000
10/4/2011	6:11:56 PM	BCl3 MFC set to  0.000000
10/4/2011	6:11:56 PM	PHl3 MFC set to  0.000000
10/4/2011	6:11:56 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:11:56 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:11:56 PM	Tube furnace set to 0
10/4/2011	6:12:59 PM	Helium valve closed
10/4/2011	6:12:59 PM	BCl3 valve closed
10/4/2011	6:12:59 PM	PH3 valve closed
10/4/2011	6:12:59 PM	SiCl4 pre valve closed
10/4/2011	6:12:59 PM	SiCl4 post valve closed
10/4/2011	6:12:59 PM	Main Vac valve closed
10/4/2011	6:12:59 PM	Bypass valve closed
10/4/2011	6:13:00 PM	H2 valve opened
10/4/2011	6:13:00 PM	Bubbler valve opened
10/4/2011	6:13:00 PM	Helium MFC set to  0.000000
10/4/2011	6:13:00 PM	H2 MFC set to  500.000000
10/4/2011	6:13:00 PM	BCl3 MFC set to  0.000000
10/4/2011	6:13:00 PM	PHl3 MFC set to  0.000000
10/4/2011	6:13:00 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:13:00 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:13:00 PM	Tube furnace set to 0
10/4/2011	6:13:01 PM	Helium valve closed
10/4/2011	6:13:01 PM	BCl3 valve closed
10/4/2011	6:13:01 PM	PH3 valve closed
10/4/2011	6:13:01 PM	SiCl4 pre valve closed
10/4/2011	6:13:01 PM	SiCl4 post valve closed
10/4/2011	6:13:01 PM	Main Vac valve closed
10/4/2011	6:13:01 PM	Bypass valve closed
10/4/2011	6:13:01 PM	H2 valve opened
10/4/2011	6:13:01 PM	Bubbler valve opened
10/4/2011	6:13:01 PM	Helium MFC set to  0.000000
10/4/2011	6:13:01 PM	H2 MFC set to  500.000000
10/4/2011	6:13:01 PM	BCl3 MFC set to  0.000000
10/4/2011	6:13:01 PM	PHl3 MFC set to  0.000000
10/4/2011	6:13:01 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:13:01 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:13:01 PM	Tube furnace set to 950
10/4/2011	6:28:01 PM	Helium valve closed
10/4/2011	6:28:01 PM	PH3 valve closed
10/4/2011	6:28:01 PM	SiCl4 pre valve closed
10/4/2011	6:28:01 PM	SiCl4 post valve closed
10/4/2011	6:28:01 PM	Main Vac valve closed
10/4/2011	6:28:01 PM	Bypass valve closed
10/4/2011	6:28:01 PM	H2 valve opened
10/4/2011	6:28:01 PM	BCl3 valve opened
10/4/2011	6:28:01 PM	Bubbler valve opened
10/4/2011	6:28:01 PM	Helium MFC set to  0.000000
10/4/2011	6:28:01 PM	H2 MFC set to  500.000000
10/4/2011	6:28:01 PM	BCl3 MFC set to  50.000000
10/4/2011	6:28:01 PM	PHl3 MFC set to  0.000000
10/4/2011	6:28:01 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:28:01 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:28:01 PM	Tube furnace set to 950
10/4/2011	6:58:01 PM	Helium valve closed
10/4/2011	6:58:01 PM	BCl3 valve closed
10/4/2011	6:58:01 PM	PH3 valve closed
10/4/2011	6:58:01 PM	SiCl4 pre valve closed
10/4/2011	6:58:01 PM	SiCl4 post valve closed
10/4/2011	6:58:01 PM	Main Vac valve closed
10/4/2011	6:58:01 PM	Bypass valve closed
10/4/2011	6:58:01 PM	H2 valve opened
10/4/2011	6:58:01 PM	Bubbler valve opened
10/4/2011	6:58:01 PM	Helium MFC set to  0.000000
10/4/2011	6:58:01 PM	H2 MFC set to  500.000000
10/4/2011	6:58:01 PM	BCl3 MFC set to  0.000000
10/4/2011	6:58:01 PM	PHl3 MFC set to  0.000000
10/4/2011	6:58:01 PM	SiCl4 MFC set to  0.000000
10/4/2011	6:58:01 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	6:58:01 PM	Tube furnace set to 750
10/4/2011	7:03:01 PM	H2 valve closed
10/4/2011	7:03:01 PM	BCl3 valve closed
10/4/2011	7:03:01 PM	PH3 valve closed
10/4/2011	7:03:01 PM	SiCl4 pre valve closed
10/4/2011	7:03:01 PM	SiCl4 post valve closed
10/4/2011	7:03:01 PM	Main Vac valve closed
10/4/2011	7:03:01 PM	Bypass valve closed
10/4/2011	7:03:01 PM	Helium valve opened
10/4/2011	7:03:01 PM	Bubbler valve opened
10/4/2011	7:03:01 PM	Helium MFC set to  500.000000
10/4/2011	7:03:01 PM	H2 MFC set to  0.000000
10/4/2011	7:03:01 PM	BCl3 MFC set to  0.000000
10/4/2011	7:03:01 PM	PHl3 MFC set to  0.000000
10/4/2011	7:03:01 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:03:01 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:03:01 PM	Tube furnace set to 0
10/4/2011	7:14:39 PM	Helium valve closed
10/4/2011	7:14:39 PM	H2 valve closed
10/4/2011	7:14:39 PM	BCl3 valve closed
10/4/2011	7:14:39 PM	PH3 valve closed
10/4/2011	7:14:39 PM	SiCl4 pre valve closed
10/4/2011	7:14:39 PM	SiCl4 post valve closed
10/4/2011	7:14:39 PM	Main Vac valve closed
10/4/2011	7:14:39 PM	Bypass valve closed
10/4/2011	7:14:39 PM	Bubbler valve closed
10/4/2011	7:14:39 PM	Helium MFC set to  0.000000
10/4/2011	7:14:39 PM	H2 MFC set to  0.000000
10/4/2011	7:14:39 PM	BCl3 MFC set to  0.000000
10/4/2011	7:14:39 PM	PHl3 MFC set to  0.000000
10/4/2011	7:14:39 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:14:39 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:14:39 PM	Tube furnace set to 0
10/4/2011	7:14:40 PM	Run finished at 7:14 PM
10/4/2011	7:14:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2011	7:14:44 PM	Recipe started at 7:14 PM
10/4/2011	7:14:44 PM	Helium valve closed
10/4/2011	7:14:44 PM	H2 valve closed
10/4/2011	7:14:44 PM	BCl3 valve closed
10/4/2011	7:14:44 PM	PH3 valve closed
10/4/2011	7:14:44 PM	SiCl4 pre valve closed
10/4/2011	7:14:44 PM	SiCl4 post valve closed
10/4/2011	7:14:44 PM	Main Vac valve closed
10/4/2011	7:14:44 PM	Bypass valve closed
10/4/2011	7:14:44 PM	Bubbler valve closed
10/4/2011	7:14:44 PM	Helium MFC set to  0.000000
10/4/2011	7:14:44 PM	H2 MFC set to  0.000000
10/4/2011	7:14:44 PM	BCl3 MFC set to  0.000000
10/4/2011	7:14:44 PM	PHl3 MFC set to  0.000000
10/4/2011	7:14:44 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:14:44 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:14:44 PM	Tube furnace set to 0
10/4/2011	7:14:47 PM	H2 valve closed
10/4/2011	7:14:47 PM	BCl3 valve closed
10/4/2011	7:14:47 PM	PH3 valve closed
10/4/2011	7:14:47 PM	SiCl4 pre valve closed
10/4/2011	7:14:47 PM	SiCl4 post valve closed
10/4/2011	7:14:47 PM	Main Vac valve closed
10/4/2011	7:14:47 PM	Bypass valve closed
10/4/2011	7:14:47 PM	Bubbler valve closed
10/4/2011	7:14:47 PM	Helium valve opened
10/4/2011	7:14:47 PM	Helium MFC set to  500.000000
10/4/2011	7:14:47 PM	H2 MFC set to  0.000000
10/4/2011	7:14:47 PM	BCl3 MFC set to  0.000000
10/4/2011	7:14:47 PM	PHl3 MFC set to  0.000000
10/4/2011	7:14:47 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:14:47 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:14:47 PM	Tube furnace set to 0
10/4/2011	7:14:48 PM	Helium valve closed
10/4/2011	7:14:48 PM	H2 valve closed
10/4/2011	7:14:48 PM	BCl3 valve closed
10/4/2011	7:14:48 PM	PH3 valve closed
10/4/2011	7:14:48 PM	SiCl4 pre valve closed
10/4/2011	7:14:48 PM	SiCl4 post valve closed
10/4/2011	7:14:48 PM	Main Vac valve closed
10/4/2011	7:14:48 PM	Bypass valve closed
10/4/2011	7:14:48 PM	Bubbler valve closed
10/4/2011	7:14:48 PM	Helium MFC set to  0.000000
10/4/2011	7:14:48 PM	H2 MFC set to  0.000000
10/4/2011	7:14:48 PM	BCl3 MFC set to  0.000000
10/4/2011	7:14:48 PM	PHl3 MFC set to  0.000000
10/4/2011	7:14:48 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:14:48 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:14:48 PM	Tube furnace set to 0
10/4/2011	7:14:49 PM	Run finished at 7:14 PM
10/4/2011	7:14:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2011	7:18:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2011	7:18:35 PM	Recipe started at 7:18 PM
10/4/2011	7:18:35 PM	Helium valve closed
10/4/2011	7:18:35 PM	H2 valve closed
10/4/2011	7:18:35 PM	BCl3 valve closed
10/4/2011	7:18:35 PM	PH3 valve closed
10/4/2011	7:18:35 PM	SiCl4 pre valve closed
10/4/2011	7:18:35 PM	SiCl4 post valve closed
10/4/2011	7:18:35 PM	Main Vac valve closed
10/4/2011	7:18:35 PM	Bubbler valve closed
10/4/2011	7:18:35 PM	Bypass valve opened
10/4/2011	7:18:35 PM	Helium MFC set to  0.000000
10/4/2011	7:18:35 PM	H2 MFC set to  0.000000
10/4/2011	7:18:35 PM	BCl3 MFC set to  0.000000
10/4/2011	7:18:35 PM	PHl3 MFC set to  0.000000
10/4/2011	7:18:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:18:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:18:35 PM	Tube furnace set to 0
10/4/2011	7:19:39 PM	Helium valve closed
10/4/2011	7:19:39 PM	H2 valve closed
10/4/2011	7:19:39 PM	BCl3 valve closed
10/4/2011	7:19:39 PM	PH3 valve closed
10/4/2011	7:19:39 PM	SiCl4 pre valve closed
10/4/2011	7:19:39 PM	SiCl4 post valve closed
10/4/2011	7:19:39 PM	Main Vac valve closed
10/4/2011	7:19:39 PM	Bubbler valve closed
10/4/2011	7:19:39 PM	Bypass valve opened
10/4/2011	7:19:39 PM	Helium MFC set to  0.000000
10/4/2011	7:19:39 PM	H2 MFC set to  0.000000
10/4/2011	7:19:39 PM	BCl3 MFC set to  0.000000
10/4/2011	7:19:39 PM	PHl3 MFC set to  0.000000
10/4/2011	7:19:39 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:19:39 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:19:39 PM	Tube furnace set to 0
10/4/2011	7:20:39 PM	Helium valve closed
10/4/2011	7:20:39 PM	H2 valve closed
10/4/2011	7:20:39 PM	BCl3 valve closed
10/4/2011	7:20:39 PM	PH3 valve closed
10/4/2011	7:20:39 PM	SiCl4 pre valve closed
10/4/2011	7:20:39 PM	SiCl4 post valve closed
10/4/2011	7:20:39 PM	Bypass valve closed
10/4/2011	7:20:39 PM	Bubbler valve closed
10/4/2011	7:20:39 PM	Main Vac valve opened
10/4/2011	7:20:39 PM	Helium MFC set to  0.000000
10/4/2011	7:20:39 PM	H2 MFC set to  0.000000
10/4/2011	7:20:39 PM	BCl3 MFC set to  0.000000
10/4/2011	7:20:39 PM	PHl3 MFC set to  0.000000
10/4/2011	7:20:39 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:20:39 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:20:39 PM	Tube furnace set to 0
10/4/2011	7:20:40 PM	Run finished at 7:20 PM
10/4/2011	7:20:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2011	7:21:59 PM	Recipe started at 7:21 PM
10/4/2011	7:21:59 PM	Helium valve closed
10/4/2011	7:21:59 PM	H2 valve closed
10/4/2011	7:21:59 PM	BCl3 valve closed
10/4/2011	7:21:59 PM	PH3 valve closed
10/4/2011	7:21:59 PM	SiCl4 pre valve closed
10/4/2011	7:21:59 PM	SiCl4 post valve closed
10/4/2011	7:21:59 PM	Main Vac valve closed
10/4/2011	7:21:59 PM	Bubbler valve closed
10/4/2011	7:21:59 PM	Bypass valve opened
10/4/2011	7:21:59 PM	Helium MFC set to  0.000000
10/4/2011	7:21:59 PM	H2 MFC set to  0.000000
10/4/2011	7:21:59 PM	BCl3 MFC set to  0.000000
10/4/2011	7:21:59 PM	PHl3 MFC set to  0.000000
10/4/2011	7:21:59 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:21:59 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:21:59 PM	Tube furnace set to 150
10/4/2011	7:22:00 PM	Helium valve closed
10/4/2011	7:22:00 PM	H2 valve closed
10/4/2011	7:22:00 PM	BCl3 valve closed
10/4/2011	7:22:00 PM	PH3 valve closed
10/4/2011	7:22:00 PM	SiCl4 pre valve closed
10/4/2011	7:22:00 PM	SiCl4 post valve closed
10/4/2011	7:22:00 PM	Main Vac valve closed
10/4/2011	7:22:00 PM	Bubbler valve closed
10/4/2011	7:22:00 PM	Bypass valve opened
10/4/2011	7:22:00 PM	Helium MFC set to  0.000000
10/4/2011	7:22:00 PM	H2 MFC set to  0.000000
10/4/2011	7:22:00 PM	BCl3 MFC set to  0.000000
10/4/2011	7:22:00 PM	PHl3 MFC set to  0.000000
10/4/2011	7:22:00 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:22:00 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:22:00 PM	Tube furnace set to 150
10/4/2011	7:22:04 PM	Helium valve closed
10/4/2011	7:22:04 PM	H2 valve closed
10/4/2011	7:22:04 PM	BCl3 valve closed
10/4/2011	7:22:04 PM	PH3 valve closed
10/4/2011	7:22:04 PM	SiCl4 pre valve closed
10/4/2011	7:22:04 PM	SiCl4 post valve closed
10/4/2011	7:22:04 PM	Bypass valve closed
10/4/2011	7:22:04 PM	Bubbler valve closed
10/4/2011	7:22:04 PM	Main Vac valve opened
10/4/2011	7:22:04 PM	Helium MFC set to  0.000000
10/4/2011	7:22:04 PM	H2 MFC set to  0.000000
10/4/2011	7:22:04 PM	BCl3 MFC set to  0.000000
10/4/2011	7:22:04 PM	PHl3 MFC set to  0.000000
10/4/2011	7:22:04 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:22:04 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:22:04 PM	Tube furnace set to 150
10/4/2011	7:22:34 PM	H2 valve closed
10/4/2011	7:22:34 PM	BCl3 valve closed
10/4/2011	7:22:34 PM	PH3 valve closed
10/4/2011	7:22:34 PM	SiCl4 pre valve closed
10/4/2011	7:22:34 PM	SiCl4 post valve closed
10/4/2011	7:22:34 PM	Bypass valve closed
10/4/2011	7:22:34 PM	Bubbler valve closed
10/4/2011	7:22:34 PM	Helium valve opened
10/4/2011	7:22:34 PM	Main Vac valve opened
10/4/2011	7:22:34 PM	Helium MFC set to  20.000000
10/4/2011	7:22:34 PM	H2 MFC set to  0.000000
10/4/2011	7:22:34 PM	BCl3 MFC set to  0.000000
10/4/2011	7:22:34 PM	PHl3 MFC set to  0.000000
10/4/2011	7:22:34 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:22:34 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:22:34 PM	Tube furnace set to 150
10/4/2011	7:23:04 PM	Helium valve closed
10/4/2011	7:23:04 PM	H2 valve closed
10/4/2011	7:23:04 PM	BCl3 valve closed
10/4/2011	7:23:04 PM	PH3 valve closed
10/4/2011	7:23:04 PM	SiCl4 pre valve closed
10/4/2011	7:23:04 PM	SiCl4 post valve closed
10/4/2011	7:23:04 PM	Bypass valve closed
10/4/2011	7:23:04 PM	Bubbler valve closed
10/4/2011	7:23:04 PM	Main Vac valve opened
10/4/2011	7:23:04 PM	Helium MFC set to  0.000000
10/4/2011	7:23:04 PM	H2 MFC set to  0.000000
10/4/2011	7:23:04 PM	BCl3 MFC set to  0.000000
10/4/2011	7:23:04 PM	PHl3 MFC set to  0.000000
10/4/2011	7:23:04 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:23:04 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:23:04 PM	Tube furnace set to 150
10/4/2011	7:23:34 PM	H2 valve closed
10/4/2011	7:23:34 PM	BCl3 valve closed
10/4/2011	7:23:34 PM	PH3 valve closed
10/4/2011	7:23:34 PM	SiCl4 pre valve closed
10/4/2011	7:23:34 PM	SiCl4 post valve closed
10/4/2011	7:23:34 PM	Bypass valve closed
10/4/2011	7:23:34 PM	Bubbler valve closed
10/4/2011	7:23:34 PM	Helium valve opened
10/4/2011	7:23:34 PM	Main Vac valve opened
10/4/2011	7:23:34 PM	Helium MFC set to  20.000000
10/4/2011	7:23:34 PM	H2 MFC set to  0.000000
10/4/2011	7:23:34 PM	BCl3 MFC set to  0.000000
10/4/2011	7:23:34 PM	PHl3 MFC set to  0.000000
10/4/2011	7:23:34 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:23:34 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:23:35 PM	Tube furnace set to 150
10/4/2011	7:24:05 PM	Helium valve closed
10/4/2011	7:24:05 PM	H2 valve closed
10/4/2011	7:24:05 PM	BCl3 valve closed
10/4/2011	7:24:05 PM	PH3 valve closed
10/4/2011	7:24:05 PM	SiCl4 pre valve closed
10/4/2011	7:24:05 PM	SiCl4 post valve closed
10/4/2011	7:24:05 PM	Bypass valve closed
10/4/2011	7:24:05 PM	Bubbler valve closed
10/4/2011	7:24:05 PM	Main Vac valve opened
10/4/2011	7:24:05 PM	Helium MFC set to  0.000000
10/4/2011	7:24:05 PM	H2 MFC set to  0.000000
10/4/2011	7:24:05 PM	BCl3 MFC set to  0.000000
10/4/2011	7:24:05 PM	PHl3 MFC set to  0.000000
10/4/2011	7:24:05 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:24:05 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:24:05 PM	Tube furnace set to 150
10/4/2011	7:24:35 PM	H2 valve closed
10/4/2011	7:24:35 PM	BCl3 valve closed
10/4/2011	7:24:35 PM	PH3 valve closed
10/4/2011	7:24:35 PM	SiCl4 pre valve closed
10/4/2011	7:24:35 PM	SiCl4 post valve closed
10/4/2011	7:24:35 PM	Bypass valve closed
10/4/2011	7:24:35 PM	Bubbler valve closed
10/4/2011	7:24:35 PM	Helium valve opened
10/4/2011	7:24:35 PM	Main Vac valve opened
10/4/2011	7:24:35 PM	Helium MFC set to  20.000000
10/4/2011	7:24:35 PM	H2 MFC set to  0.000000
10/4/2011	7:24:35 PM	BCl3 MFC set to  0.000000
10/4/2011	7:24:35 PM	PHl3 MFC set to  0.000000
10/4/2011	7:24:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:24:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:24:35 PM	Tube furnace set to 150
10/4/2011	7:25:05 PM	Helium valve closed
10/4/2011	7:25:05 PM	H2 valve closed
10/4/2011	7:25:05 PM	BCl3 valve closed
10/4/2011	7:25:05 PM	PH3 valve closed
10/4/2011	7:25:05 PM	SiCl4 pre valve closed
10/4/2011	7:25:05 PM	SiCl4 post valve closed
10/4/2011	7:25:05 PM	Bypass valve closed
10/4/2011	7:25:05 PM	Bubbler valve closed
10/4/2011	7:25:05 PM	Main Vac valve opened
10/4/2011	7:25:05 PM	Helium MFC set to  0.000000
10/4/2011	7:25:05 PM	H2 MFC set to  0.000000
10/4/2011	7:25:05 PM	BCl3 MFC set to  0.000000
10/4/2011	7:25:05 PM	PHl3 MFC set to  0.000000
10/4/2011	7:25:05 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:25:05 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:25:05 PM	Tube furnace set to 150
10/4/2011	7:25:35 PM	H2 valve closed
10/4/2011	7:25:35 PM	BCl3 valve closed
10/4/2011	7:25:35 PM	PH3 valve closed
10/4/2011	7:25:35 PM	SiCl4 pre valve closed
10/4/2011	7:25:35 PM	SiCl4 post valve closed
10/4/2011	7:25:35 PM	Bypass valve closed
10/4/2011	7:25:35 PM	Bubbler valve closed
10/4/2011	7:25:35 PM	Helium valve opened
10/4/2011	7:25:35 PM	Main Vac valve opened
10/4/2011	7:25:35 PM	Helium MFC set to  20.000000
10/4/2011	7:25:35 PM	H2 MFC set to  0.000000
10/4/2011	7:25:35 PM	BCl3 MFC set to  0.000000
10/4/2011	7:25:35 PM	PHl3 MFC set to  0.000000
10/4/2011	7:25:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:25:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:25:35 PM	Tube furnace set to 150
10/4/2011	7:26:05 PM	Helium valve closed
10/4/2011	7:26:05 PM	H2 valve closed
10/4/2011	7:26:05 PM	BCl3 valve closed
10/4/2011	7:26:05 PM	PH3 valve closed
10/4/2011	7:26:05 PM	SiCl4 pre valve closed
10/4/2011	7:26:05 PM	SiCl4 post valve closed
10/4/2011	7:26:05 PM	Bypass valve closed
10/4/2011	7:26:05 PM	Bubbler valve closed
10/4/2011	7:26:05 PM	Main Vac valve opened
10/4/2011	7:26:05 PM	Helium MFC set to  0.000000
10/4/2011	7:26:05 PM	H2 MFC set to  0.000000
10/4/2011	7:26:05 PM	BCl3 MFC set to  0.000000
10/4/2011	7:26:05 PM	PHl3 MFC set to  0.000000
10/4/2011	7:26:05 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:26:05 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:26:06 PM	Tube furnace set to 150
10/4/2011	7:26:36 PM	H2 valve closed
10/4/2011	7:26:36 PM	BCl3 valve closed
10/4/2011	7:26:36 PM	PH3 valve closed
10/4/2011	7:26:36 PM	SiCl4 pre valve closed
10/4/2011	7:26:36 PM	SiCl4 post valve closed
10/4/2011	7:26:36 PM	Bypass valve closed
10/4/2011	7:26:36 PM	Bubbler valve closed
10/4/2011	7:26:36 PM	Helium valve opened
10/4/2011	7:26:36 PM	Main Vac valve opened
10/4/2011	7:26:36 PM	Helium MFC set to  20.000000
10/4/2011	7:26:36 PM	H2 MFC set to  0.000000
10/4/2011	7:26:36 PM	BCl3 MFC set to  0.000000
10/4/2011	7:26:36 PM	PHl3 MFC set to  0.000000
10/4/2011	7:26:36 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:26:36 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:26:36 PM	Tube furnace set to 150
10/4/2011	7:27:06 PM	Helium valve closed
10/4/2011	7:27:06 PM	H2 valve closed
10/4/2011	7:27:06 PM	BCl3 valve closed
10/4/2011	7:27:06 PM	PH3 valve closed
10/4/2011	7:27:06 PM	SiCl4 pre valve closed
10/4/2011	7:27:06 PM	SiCl4 post valve closed
10/4/2011	7:27:06 PM	Bypass valve closed
10/4/2011	7:27:06 PM	Bubbler valve closed
10/4/2011	7:27:06 PM	Main Vac valve opened
10/4/2011	7:27:06 PM	Helium MFC set to  0.000000
10/4/2011	7:27:06 PM	H2 MFC set to  0.000000
10/4/2011	7:27:06 PM	BCl3 MFC set to  0.000000
10/4/2011	7:27:06 PM	PHl3 MFC set to  0.000000
10/4/2011	7:27:06 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:27:06 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:27:06 PM	Tube furnace set to 150
10/4/2011	7:27:36 PM	H2 valve closed
10/4/2011	7:27:36 PM	BCl3 valve closed
10/4/2011	7:27:36 PM	PH3 valve closed
10/4/2011	7:27:36 PM	SiCl4 pre valve closed
10/4/2011	7:27:36 PM	SiCl4 post valve closed
10/4/2011	7:27:36 PM	Bypass valve closed
10/4/2011	7:27:36 PM	Bubbler valve closed
10/4/2011	7:27:36 PM	Helium valve opened
10/4/2011	7:27:36 PM	Main Vac valve opened
10/4/2011	7:27:36 PM	Helium MFC set to  20.000000
10/4/2011	7:27:36 PM	H2 MFC set to  0.000000
10/4/2011	7:27:36 PM	BCl3 MFC set to  0.000000
10/4/2011	7:27:36 PM	PHl3 MFC set to  0.000000
10/4/2011	7:27:36 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:27:36 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:27:36 PM	Tube furnace set to 150
10/4/2011	7:28:06 PM	Helium valve closed
10/4/2011	7:28:06 PM	H2 valve closed
10/4/2011	7:28:06 PM	BCl3 valve closed
10/4/2011	7:28:06 PM	PH3 valve closed
10/4/2011	7:28:06 PM	SiCl4 pre valve closed
10/4/2011	7:28:06 PM	SiCl4 post valve closed
10/4/2011	7:28:06 PM	Bypass valve closed
10/4/2011	7:28:06 PM	Bubbler valve closed
10/4/2011	7:28:06 PM	Main Vac valve opened
10/4/2011	7:28:06 PM	Helium MFC set to  0.000000
10/4/2011	7:28:06 PM	H2 MFC set to  0.000000
10/4/2011	7:28:06 PM	BCl3 MFC set to  0.000000
10/4/2011	7:28:06 PM	PHl3 MFC set to  0.000000
10/4/2011	7:28:06 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:28:06 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:28:07 PM	Tube furnace set to 150
10/4/2011	7:28:37 PM	H2 valve closed
10/4/2011	7:28:37 PM	BCl3 valve closed
10/4/2011	7:28:37 PM	PH3 valve closed
10/4/2011	7:28:37 PM	SiCl4 pre valve closed
10/4/2011	7:28:37 PM	SiCl4 post valve closed
10/4/2011	7:28:37 PM	Bypass valve closed
10/4/2011	7:28:37 PM	Bubbler valve closed
10/4/2011	7:28:37 PM	Helium valve opened
10/4/2011	7:28:37 PM	Main Vac valve opened
10/4/2011	7:28:37 PM	Helium MFC set to  20.000000
10/4/2011	7:28:37 PM	H2 MFC set to  0.000000
10/4/2011	7:28:37 PM	BCl3 MFC set to  0.000000
10/4/2011	7:28:37 PM	PHl3 MFC set to  0.000000
10/4/2011	7:28:37 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:28:37 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:28:37 PM	Tube furnace set to 150
10/4/2011	7:29:07 PM	Helium valve closed
10/4/2011	7:29:07 PM	H2 valve closed
10/4/2011	7:29:07 PM	BCl3 valve closed
10/4/2011	7:29:07 PM	PH3 valve closed
10/4/2011	7:29:07 PM	SiCl4 pre valve closed
10/4/2011	7:29:07 PM	SiCl4 post valve closed
10/4/2011	7:29:07 PM	Bypass valve closed
10/4/2011	7:29:07 PM	Bubbler valve closed
10/4/2011	7:29:07 PM	Main Vac valve opened
10/4/2011	7:29:07 PM	Helium MFC set to  0.000000
10/4/2011	7:29:07 PM	H2 MFC set to  0.000000
10/4/2011	7:29:07 PM	BCl3 MFC set to  0.000000
10/4/2011	7:29:07 PM	PHl3 MFC set to  0.000000
10/4/2011	7:29:07 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:29:07 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:29:07 PM	Tube furnace set to 150
10/4/2011	7:29:37 PM	H2 valve closed
10/4/2011	7:29:37 PM	BCl3 valve closed
10/4/2011	7:29:37 PM	PH3 valve closed
10/4/2011	7:29:37 PM	SiCl4 pre valve closed
10/4/2011	7:29:37 PM	SiCl4 post valve closed
10/4/2011	7:29:37 PM	Bypass valve closed
10/4/2011	7:29:37 PM	Bubbler valve closed
10/4/2011	7:29:37 PM	Helium valve opened
10/4/2011	7:29:37 PM	Main Vac valve opened
10/4/2011	7:29:37 PM	Helium MFC set to  20.000000
10/4/2011	7:29:37 PM	H2 MFC set to  0.000000
10/4/2011	7:29:37 PM	BCl3 MFC set to  0.000000
10/4/2011	7:29:37 PM	PHl3 MFC set to  0.000000
10/4/2011	7:29:37 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:29:37 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:29:37 PM	Tube furnace set to 150
10/4/2011	7:30:07 PM	Helium valve closed
10/4/2011	7:30:07 PM	H2 valve closed
10/4/2011	7:30:07 PM	BCl3 valve closed
10/4/2011	7:30:07 PM	PH3 valve closed
10/4/2011	7:30:07 PM	SiCl4 pre valve closed
10/4/2011	7:30:07 PM	SiCl4 post valve closed
10/4/2011	7:30:07 PM	Bypass valve closed
10/4/2011	7:30:07 PM	Bubbler valve closed
10/4/2011	7:30:07 PM	Main Vac valve opened
10/4/2011	7:30:07 PM	Helium MFC set to  0.000000
10/4/2011	7:30:07 PM	H2 MFC set to  0.000000
10/4/2011	7:30:07 PM	BCl3 MFC set to  0.000000
10/4/2011	7:30:07 PM	PHl3 MFC set to  0.000000
10/4/2011	7:30:07 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:30:07 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:30:07 PM	Tube furnace set to 150
10/4/2011	7:30:37 PM	H2 valve closed
10/4/2011	7:30:37 PM	BCl3 valve closed
10/4/2011	7:30:37 PM	PH3 valve closed
10/4/2011	7:30:37 PM	SiCl4 pre valve closed
10/4/2011	7:30:37 PM	SiCl4 post valve closed
10/4/2011	7:30:37 PM	Bypass valve closed
10/4/2011	7:30:37 PM	Bubbler valve closed
10/4/2011	7:30:37 PM	Helium valve opened
10/4/2011	7:30:37 PM	Main Vac valve opened
10/4/2011	7:30:37 PM	Helium MFC set to  20.000000
10/4/2011	7:30:37 PM	H2 MFC set to  0.000000
10/4/2011	7:30:37 PM	BCl3 MFC set to  0.000000
10/4/2011	7:30:37 PM	PHl3 MFC set to  0.000000
10/4/2011	7:30:37 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:30:37 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:30:38 PM	Tube furnace set to 150
10/4/2011	7:31:08 PM	Helium valve closed
10/4/2011	7:31:08 PM	H2 valve closed
10/4/2011	7:31:08 PM	BCl3 valve closed
10/4/2011	7:31:08 PM	PH3 valve closed
10/4/2011	7:31:08 PM	SiCl4 pre valve closed
10/4/2011	7:31:08 PM	SiCl4 post valve closed
10/4/2011	7:31:08 PM	Bypass valve closed
10/4/2011	7:31:08 PM	Bubbler valve closed
10/4/2011	7:31:08 PM	Main Vac valve opened
10/4/2011	7:31:08 PM	Helium MFC set to  0.000000
10/4/2011	7:31:08 PM	H2 MFC set to  0.000000
10/4/2011	7:31:08 PM	BCl3 MFC set to  0.000000
10/4/2011	7:31:08 PM	PHl3 MFC set to  0.000000
10/4/2011	7:31:08 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:31:08 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:31:08 PM	Tube furnace set to 150
10/4/2011	7:31:38 PM	H2 valve closed
10/4/2011	7:31:38 PM	BCl3 valve closed
10/4/2011	7:31:38 PM	PH3 valve closed
10/4/2011	7:31:38 PM	SiCl4 pre valve closed
10/4/2011	7:31:38 PM	SiCl4 post valve closed
10/4/2011	7:31:38 PM	Bypass valve closed
10/4/2011	7:31:38 PM	Bubbler valve closed
10/4/2011	7:31:38 PM	Helium valve opened
10/4/2011	7:31:38 PM	Main Vac valve opened
10/4/2011	7:31:38 PM	Helium MFC set to  20.000000
10/4/2011	7:31:38 PM	H2 MFC set to  0.000000
10/4/2011	7:31:38 PM	BCl3 MFC set to  0.000000
10/4/2011	7:31:38 PM	PHl3 MFC set to  0.000000
10/4/2011	7:31:38 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:31:38 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:31:38 PM	Tube furnace set to 150
10/4/2011	7:32:08 PM	Helium valve closed
10/4/2011	7:32:08 PM	H2 valve closed
10/4/2011	7:32:08 PM	BCl3 valve closed
10/4/2011	7:32:08 PM	PH3 valve closed
10/4/2011	7:32:08 PM	SiCl4 pre valve closed
10/4/2011	7:32:08 PM	SiCl4 post valve closed
10/4/2011	7:32:08 PM	Bypass valve closed
10/4/2011	7:32:08 PM	Bubbler valve closed
10/4/2011	7:32:08 PM	Main Vac valve opened
10/4/2011	7:32:08 PM	Helium MFC set to  0.000000
10/4/2011	7:32:08 PM	H2 MFC set to  0.000000
10/4/2011	7:32:08 PM	BCl3 MFC set to  0.000000
10/4/2011	7:32:08 PM	PHl3 MFC set to  0.000000
10/4/2011	7:32:08 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:32:08 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:32:08 PM	Tube furnace set to 150
10/4/2011	7:32:38 PM	H2 valve closed
10/4/2011	7:32:38 PM	BCl3 valve closed
10/4/2011	7:32:38 PM	PH3 valve closed
10/4/2011	7:32:38 PM	SiCl4 pre valve closed
10/4/2011	7:32:38 PM	SiCl4 post valve closed
10/4/2011	7:32:38 PM	Bypass valve closed
10/4/2011	7:32:38 PM	Bubbler valve closed
10/4/2011	7:32:38 PM	Helium valve opened
10/4/2011	7:32:38 PM	Main Vac valve opened
10/4/2011	7:32:38 PM	Helium MFC set to  20.000000
10/4/2011	7:32:38 PM	H2 MFC set to  0.000000
10/4/2011	7:32:38 PM	BCl3 MFC set to  0.000000
10/4/2011	7:32:38 PM	PHl3 MFC set to  0.000000
10/4/2011	7:32:38 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:32:38 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:32:38 PM	Tube furnace set to 150
10/4/2011	7:33:08 PM	Helium valve closed
10/4/2011	7:33:08 PM	H2 valve closed
10/4/2011	7:33:08 PM	BCl3 valve closed
10/4/2011	7:33:08 PM	PH3 valve closed
10/4/2011	7:33:08 PM	SiCl4 pre valve closed
10/4/2011	7:33:08 PM	SiCl4 post valve closed
10/4/2011	7:33:09 PM	Bypass valve closed
10/4/2011	7:33:09 PM	Bubbler valve closed
10/4/2011	7:33:09 PM	Main Vac valve opened
10/4/2011	7:33:09 PM	Helium MFC set to  0.000000
10/4/2011	7:33:09 PM	H2 MFC set to  0.000000
10/4/2011	7:33:09 PM	BCl3 MFC set to  0.000000
10/4/2011	7:33:09 PM	PHl3 MFC set to  0.000000
10/4/2011	7:33:09 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:33:09 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:33:09 PM	Tube furnace set to 150
10/4/2011	7:33:39 PM	H2 valve closed
10/4/2011	7:33:39 PM	BCl3 valve closed
10/4/2011	7:33:39 PM	PH3 valve closed
10/4/2011	7:33:39 PM	SiCl4 pre valve closed
10/4/2011	7:33:39 PM	SiCl4 post valve closed
10/4/2011	7:33:39 PM	Bypass valve closed
10/4/2011	7:33:39 PM	Bubbler valve closed
10/4/2011	7:33:39 PM	Helium valve opened
10/4/2011	7:33:39 PM	Main Vac valve opened
10/4/2011	7:33:39 PM	Helium MFC set to  20.000000
10/4/2011	7:33:39 PM	H2 MFC set to  0.000000
10/4/2011	7:33:39 PM	BCl3 MFC set to  0.000000
10/4/2011	7:33:39 PM	PHl3 MFC set to  0.000000
10/4/2011	7:33:39 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:33:39 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:33:39 PM	Tube furnace set to 150
10/4/2011	7:33:58 PM	Run aborted at 7:33 PM
10/4/2011	7:33:58 PM	Helium valve closed
10/4/2011	7:33:58 PM	H2 valve closed
10/4/2011	7:33:58 PM	BCl3 valve closed
10/4/2011	7:33:58 PM	PH3 valve closed
10/4/2011	7:33:58 PM	SiCl4 pre valve closed
10/4/2011	7:33:58 PM	SiCl4 post valve closed
10/4/2011	7:33:58 PM	Bypass valve closed
10/4/2011	7:33:58 PM	Main Vac valve closed
10/4/2011	7:33:58 PM	Bubbler valve closed
10/4/2011	7:33:58 PM	Helium MFC set to  0.000000
10/4/2011	7:33:58 PM	H2 MFC set to  0.000000
10/4/2011	7:33:58 PM	BCl3 MFC set to  0.000000
10/4/2011	7:33:58 PM	PHl3 MFC set to  0.000000
10/4/2011	7:33:58 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:33:58 PM	Tube furnace set to 0
10/4/2011	7:34:02 PM	Main Vac valve opened
10/4/2011	7:34:29 PM	Recipe started at 7:34 PM
10/4/2011	7:34:30 PM	Helium valve closed
10/4/2011	7:34:30 PM	H2 valve closed
10/4/2011	7:34:30 PM	BCl3 valve closed
10/4/2011	7:34:30 PM	PH3 valve closed
10/4/2011	7:34:30 PM	SiCl4 pre valve closed
10/4/2011	7:34:30 PM	SiCl4 post valve closed
10/4/2011	7:34:30 PM	Main Vac valve closed
10/4/2011	7:34:30 PM	Bubbler valve closed
10/4/2011	7:34:30 PM	Bypass valve opened
10/4/2011	7:34:30 PM	Helium MFC set to  0.000000
10/4/2011	7:34:30 PM	H2 MFC set to  0.000000
10/4/2011	7:34:30 PM	BCl3 MFC set to  0.000000
10/4/2011	7:34:30 PM	PHl3 MFC set to  0.000000
10/4/2011	7:34:30 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:34:30 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:34:30 PM	Tube furnace set to 150
10/4/2011	7:34:30 PM	Helium valve closed
10/4/2011	7:34:30 PM	H2 valve closed
10/4/2011	7:34:30 PM	BCl3 valve closed
10/4/2011	7:34:30 PM	PH3 valve closed
10/4/2011	7:34:30 PM	SiCl4 pre valve closed
10/4/2011	7:34:30 PM	SiCl4 post valve closed
10/4/2011	7:34:30 PM	Main Vac valve closed
10/4/2011	7:34:30 PM	Bubbler valve closed
10/4/2011	7:34:30 PM	Bypass valve opened
10/4/2011	7:34:30 PM	Helium MFC set to  0.000000
10/4/2011	7:34:30 PM	H2 MFC set to  0.000000
10/4/2011	7:34:30 PM	BCl3 MFC set to  0.000000
10/4/2011	7:34:30 PM	PHl3 MFC set to  0.000000
10/4/2011	7:34:30 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:34:30 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:34:30 PM	Tube furnace set to 150
10/4/2011	7:35:00 PM	Helium valve closed
10/4/2011	7:35:00 PM	H2 valve closed
10/4/2011	7:35:00 PM	BCl3 valve closed
10/4/2011	7:35:00 PM	PH3 valve closed
10/4/2011	7:35:00 PM	SiCl4 pre valve closed
10/4/2011	7:35:00 PM	SiCl4 post valve closed
10/4/2011	7:35:00 PM	Bypass valve closed
10/4/2011	7:35:00 PM	Bubbler valve closed
10/4/2011	7:35:00 PM	Main Vac valve opened
10/4/2011	7:35:00 PM	Helium MFC set to  0.000000
10/4/2011	7:35:00 PM	H2 MFC set to  0.000000
10/4/2011	7:35:00 PM	BCl3 MFC set to  0.000000
10/4/2011	7:35:00 PM	PHl3 MFC set to  0.000000
10/4/2011	7:35:00 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:35:00 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:35:00 PM	Tube furnace set to 150
10/4/2011	7:35:30 PM	H2 valve closed
10/4/2011	7:35:30 PM	BCl3 valve closed
10/4/2011	7:35:30 PM	PH3 valve closed
10/4/2011	7:35:30 PM	SiCl4 pre valve closed
10/4/2011	7:35:30 PM	SiCl4 post valve closed
10/4/2011	7:35:30 PM	Bypass valve closed
10/4/2011	7:35:30 PM	Bubbler valve closed
10/4/2011	7:35:30 PM	Helium valve opened
10/4/2011	7:35:30 PM	Main Vac valve opened
10/4/2011	7:35:30 PM	Helium MFC set to  20.000000
10/4/2011	7:35:30 PM	H2 MFC set to  0.000000
10/4/2011	7:35:30 PM	BCl3 MFC set to  0.000000
10/4/2011	7:35:30 PM	PHl3 MFC set to  0.000000
10/4/2011	7:35:30 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:35:30 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:35:31 PM	Tube furnace set to 150
10/4/2011	7:36:01 PM	Helium valve closed
10/4/2011	7:36:01 PM	H2 valve closed
10/4/2011	7:36:01 PM	BCl3 valve closed
10/4/2011	7:36:01 PM	PH3 valve closed
10/4/2011	7:36:01 PM	SiCl4 pre valve closed
10/4/2011	7:36:01 PM	SiCl4 post valve closed
10/4/2011	7:36:01 PM	Bypass valve closed
10/4/2011	7:36:01 PM	Bubbler valve closed
10/4/2011	7:36:01 PM	Main Vac valve opened
10/4/2011	7:36:01 PM	Helium MFC set to  0.000000
10/4/2011	7:36:01 PM	H2 MFC set to  0.000000
10/4/2011	7:36:01 PM	BCl3 MFC set to  0.000000
10/4/2011	7:36:01 PM	PHl3 MFC set to  0.000000
10/4/2011	7:36:01 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:36:01 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:36:01 PM	Tube furnace set to 150
10/4/2011	7:36:31 PM	H2 valve closed
10/4/2011	7:36:31 PM	BCl3 valve closed
10/4/2011	7:36:31 PM	PH3 valve closed
10/4/2011	7:36:31 PM	SiCl4 pre valve closed
10/4/2011	7:36:31 PM	SiCl4 post valve closed
10/4/2011	7:36:31 PM	Bypass valve closed
10/4/2011	7:36:31 PM	Bubbler valve closed
10/4/2011	7:36:31 PM	Helium valve opened
10/4/2011	7:36:31 PM	Main Vac valve opened
10/4/2011	7:36:31 PM	Helium MFC set to  20.000000
10/4/2011	7:36:31 PM	H2 MFC set to  0.000000
10/4/2011	7:36:31 PM	BCl3 MFC set to  0.000000
10/4/2011	7:36:31 PM	PHl3 MFC set to  0.000000
10/4/2011	7:36:31 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:36:31 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:36:31 PM	Tube furnace set to 150
10/4/2011	7:37:01 PM	Helium valve closed
10/4/2011	7:37:01 PM	H2 valve closed
10/4/2011	7:37:01 PM	BCl3 valve closed
10/4/2011	7:37:01 PM	PH3 valve closed
10/4/2011	7:37:01 PM	SiCl4 pre valve closed
10/4/2011	7:37:01 PM	SiCl4 post valve closed
10/4/2011	7:37:01 PM	Bypass valve closed
10/4/2011	7:37:01 PM	Bubbler valve closed
10/4/2011	7:37:01 PM	Main Vac valve opened
10/4/2011	7:37:01 PM	Helium MFC set to  0.000000
10/4/2011	7:37:01 PM	H2 MFC set to  0.000000
10/4/2011	7:37:01 PM	BCl3 MFC set to  0.000000
10/4/2011	7:37:01 PM	PHl3 MFC set to  0.000000
10/4/2011	7:37:01 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:37:01 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:37:01 PM	Tube furnace set to 150
10/4/2011	7:37:31 PM	H2 valve closed
10/4/2011	7:37:31 PM	BCl3 valve closed
10/4/2011	7:37:31 PM	PH3 valve closed
10/4/2011	7:37:31 PM	SiCl4 pre valve closed
10/4/2011	7:37:31 PM	SiCl4 post valve closed
10/4/2011	7:37:31 PM	Bypass valve closed
10/4/2011	7:37:31 PM	Bubbler valve closed
10/4/2011	7:37:31 PM	Helium valve opened
10/4/2011	7:37:31 PM	Main Vac valve opened
10/4/2011	7:37:31 PM	Helium MFC set to  20.000000
10/4/2011	7:37:31 PM	H2 MFC set to  0.000000
10/4/2011	7:37:31 PM	BCl3 MFC set to  0.000000
10/4/2011	7:37:31 PM	PHl3 MFC set to  0.000000
10/4/2011	7:37:31 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:37:31 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:37:31 PM	Tube furnace set to 150
10/4/2011	7:38:01 PM	Helium valve closed
10/4/2011	7:38:01 PM	H2 valve closed
10/4/2011	7:38:01 PM	BCl3 valve closed
10/4/2011	7:38:01 PM	PH3 valve closed
10/4/2011	7:38:01 PM	SiCl4 pre valve closed
10/4/2011	7:38:01 PM	SiCl4 post valve closed
10/4/2011	7:38:01 PM	Bypass valve closed
10/4/2011	7:38:01 PM	Bubbler valve closed
10/4/2011	7:38:01 PM	Main Vac valve opened
10/4/2011	7:38:01 PM	Helium MFC set to  0.000000
10/4/2011	7:38:01 PM	H2 MFC set to  0.000000
10/4/2011	7:38:01 PM	BCl3 MFC set to  0.000000
10/4/2011	7:38:01 PM	PHl3 MFC set to  0.000000
10/4/2011	7:38:01 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:38:01 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:38:02 PM	Tube furnace set to 150
10/4/2011	7:38:32 PM	H2 valve closed
10/4/2011	7:38:32 PM	BCl3 valve closed
10/4/2011	7:38:32 PM	PH3 valve closed
10/4/2011	7:38:32 PM	SiCl4 pre valve closed
10/4/2011	7:38:32 PM	SiCl4 post valve closed
10/4/2011	7:38:32 PM	Bypass valve closed
10/4/2011	7:38:32 PM	Bubbler valve closed
10/4/2011	7:38:32 PM	Helium valve opened
10/4/2011	7:38:32 PM	Main Vac valve opened
10/4/2011	7:38:32 PM	Helium MFC set to  20.000000
10/4/2011	7:38:32 PM	H2 MFC set to  0.000000
10/4/2011	7:38:32 PM	BCl3 MFC set to  0.000000
10/4/2011	7:38:32 PM	PHl3 MFC set to  0.000000
10/4/2011	7:38:32 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:38:32 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:38:32 PM	Tube furnace set to 150
10/4/2011	7:39:02 PM	Helium valve closed
10/4/2011	7:39:02 PM	H2 valve closed
10/4/2011	7:39:02 PM	BCl3 valve closed
10/4/2011	7:39:02 PM	PH3 valve closed
10/4/2011	7:39:02 PM	SiCl4 pre valve closed
10/4/2011	7:39:02 PM	SiCl4 post valve closed
10/4/2011	7:39:02 PM	Bypass valve closed
10/4/2011	7:39:02 PM	Bubbler valve closed
10/4/2011	7:39:02 PM	Main Vac valve opened
10/4/2011	7:39:02 PM	Helium MFC set to  0.000000
10/4/2011	7:39:02 PM	H2 MFC set to  0.000000
10/4/2011	7:39:02 PM	BCl3 MFC set to  0.000000
10/4/2011	7:39:02 PM	PHl3 MFC set to  0.000000
10/4/2011	7:39:02 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:39:02 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:39:02 PM	Tube furnace set to 150
10/4/2011	7:39:32 PM	H2 valve closed
10/4/2011	7:39:32 PM	BCl3 valve closed
10/4/2011	7:39:32 PM	PH3 valve closed
10/4/2011	7:39:32 PM	SiCl4 pre valve closed
10/4/2011	7:39:32 PM	SiCl4 post valve closed
10/4/2011	7:39:32 PM	Bypass valve closed
10/4/2011	7:39:32 PM	Bubbler valve closed
10/4/2011	7:39:32 PM	Helium valve opened
10/4/2011	7:39:32 PM	Main Vac valve opened
10/4/2011	7:39:32 PM	Helium MFC set to  20.000000
10/4/2011	7:39:32 PM	H2 MFC set to  0.000000
10/4/2011	7:39:32 PM	BCl3 MFC set to  0.000000
10/4/2011	7:39:32 PM	PHl3 MFC set to  0.000000
10/4/2011	7:39:32 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:39:32 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:39:32 PM	Tube furnace set to 150
10/4/2011	7:40:02 PM	Helium valve closed
10/4/2011	7:40:02 PM	H2 valve closed
10/4/2011	7:40:02 PM	BCl3 valve closed
10/4/2011	7:40:02 PM	PH3 valve closed
10/4/2011	7:40:02 PM	SiCl4 pre valve closed
10/4/2011	7:40:02 PM	SiCl4 post valve closed
10/4/2011	7:40:02 PM	Bypass valve closed
10/4/2011	7:40:02 PM	Bubbler valve closed
10/4/2011	7:40:02 PM	Main Vac valve opened
10/4/2011	7:40:02 PM	Helium MFC set to  0.000000
10/4/2011	7:40:02 PM	H2 MFC set to  0.000000
10/4/2011	7:40:02 PM	BCl3 MFC set to  0.000000
10/4/2011	7:40:02 PM	PHl3 MFC set to  0.000000
10/4/2011	7:40:02 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:40:02 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:40:02 PM	Tube furnace set to 150
10/4/2011	7:40:32 PM	H2 valve closed
10/4/2011	7:40:32 PM	BCl3 valve closed
10/4/2011	7:40:32 PM	PH3 valve closed
10/4/2011	7:40:32 PM	SiCl4 pre valve closed
10/4/2011	7:40:32 PM	SiCl4 post valve closed
10/4/2011	7:40:32 PM	Bypass valve closed
10/4/2011	7:40:32 PM	Bubbler valve closed
10/4/2011	7:40:32 PM	Helium valve opened
10/4/2011	7:40:32 PM	Main Vac valve opened
10/4/2011	7:40:32 PM	Helium MFC set to  20.000000
10/4/2011	7:40:32 PM	H2 MFC set to  0.000000
10/4/2011	7:40:32 PM	BCl3 MFC set to  0.000000
10/4/2011	7:40:32 PM	PHl3 MFC set to  0.000000
10/4/2011	7:40:32 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:40:32 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:40:33 PM	Tube furnace set to 150
10/4/2011	7:41:03 PM	Helium valve closed
10/4/2011	7:41:03 PM	H2 valve closed
10/4/2011	7:41:03 PM	BCl3 valve closed
10/4/2011	7:41:03 PM	PH3 valve closed
10/4/2011	7:41:03 PM	SiCl4 pre valve closed
10/4/2011	7:41:03 PM	SiCl4 post valve closed
10/4/2011	7:41:03 PM	Bypass valve closed
10/4/2011	7:41:03 PM	Bubbler valve closed
10/4/2011	7:41:03 PM	Main Vac valve opened
10/4/2011	7:41:03 PM	Helium MFC set to  0.000000
10/4/2011	7:41:03 PM	H2 MFC set to  0.000000
10/4/2011	7:41:03 PM	BCl3 MFC set to  0.000000
10/4/2011	7:41:03 PM	PHl3 MFC set to  0.000000
10/4/2011	7:41:03 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:41:03 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:41:03 PM	Tube furnace set to 150
10/4/2011	7:41:33 PM	H2 valve closed
10/4/2011	7:41:33 PM	BCl3 valve closed
10/4/2011	7:41:33 PM	PH3 valve closed
10/4/2011	7:41:33 PM	SiCl4 pre valve closed
10/4/2011	7:41:33 PM	SiCl4 post valve closed
10/4/2011	7:41:33 PM	Bypass valve closed
10/4/2011	7:41:33 PM	Bubbler valve closed
10/4/2011	7:41:33 PM	Helium valve opened
10/4/2011	7:41:33 PM	Main Vac valve opened
10/4/2011	7:41:33 PM	Helium MFC set to  20.000000
10/4/2011	7:41:33 PM	H2 MFC set to  0.000000
10/4/2011	7:41:33 PM	BCl3 MFC set to  0.000000
10/4/2011	7:41:33 PM	PHl3 MFC set to  0.000000
10/4/2011	7:41:33 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:41:33 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:41:33 PM	Tube furnace set to 150
10/4/2011	7:42:03 PM	Helium valve closed
10/4/2011	7:42:03 PM	H2 valve closed
10/4/2011	7:42:03 PM	BCl3 valve closed
10/4/2011	7:42:03 PM	PH3 valve closed
10/4/2011	7:42:03 PM	SiCl4 pre valve closed
10/4/2011	7:42:03 PM	SiCl4 post valve closed
10/4/2011	7:42:03 PM	Bypass valve closed
10/4/2011	7:42:03 PM	Bubbler valve closed
10/4/2011	7:42:03 PM	Main Vac valve opened
10/4/2011	7:42:03 PM	Helium MFC set to  0.000000
10/4/2011	7:42:03 PM	H2 MFC set to  0.000000
10/4/2011	7:42:03 PM	BCl3 MFC set to  0.000000
10/4/2011	7:42:03 PM	PHl3 MFC set to  0.000000
10/4/2011	7:42:03 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:42:03 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:42:03 PM	Tube furnace set to 150
10/4/2011	7:42:33 PM	H2 valve closed
10/4/2011	7:42:33 PM	BCl3 valve closed
10/4/2011	7:42:33 PM	PH3 valve closed
10/4/2011	7:42:33 PM	SiCl4 pre valve closed
10/4/2011	7:42:33 PM	SiCl4 post valve closed
10/4/2011	7:42:33 PM	Bypass valve closed
10/4/2011	7:42:33 PM	Bubbler valve closed
10/4/2011	7:42:33 PM	Helium valve opened
10/4/2011	7:42:33 PM	Main Vac valve opened
10/4/2011	7:42:33 PM	Helium MFC set to  20.000000
10/4/2011	7:42:33 PM	H2 MFC set to  0.000000
10/4/2011	7:42:33 PM	BCl3 MFC set to  0.000000
10/4/2011	7:42:33 PM	PHl3 MFC set to  0.000000
10/4/2011	7:42:33 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:42:33 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:42:33 PM	Tube furnace set to 150
10/4/2011	7:43:03 PM	Helium valve closed
10/4/2011	7:43:03 PM	H2 valve closed
10/4/2011	7:43:03 PM	BCl3 valve closed
10/4/2011	7:43:03 PM	PH3 valve closed
10/4/2011	7:43:03 PM	SiCl4 pre valve closed
10/4/2011	7:43:03 PM	SiCl4 post valve closed
10/4/2011	7:43:03 PM	Bypass valve closed
10/4/2011	7:43:03 PM	Bubbler valve closed
10/4/2011	7:43:03 PM	Main Vac valve opened
10/4/2011	7:43:03 PM	Helium MFC set to  0.000000
10/4/2011	7:43:03 PM	H2 MFC set to  0.000000
10/4/2011	7:43:03 PM	BCl3 MFC set to  0.000000
10/4/2011	7:43:03 PM	PHl3 MFC set to  0.000000
10/4/2011	7:43:03 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:43:03 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:43:04 PM	Tube furnace set to 150
10/4/2011	7:43:34 PM	H2 valve closed
10/4/2011	7:43:34 PM	BCl3 valve closed
10/4/2011	7:43:34 PM	PH3 valve closed
10/4/2011	7:43:34 PM	SiCl4 pre valve closed
10/4/2011	7:43:34 PM	SiCl4 post valve closed
10/4/2011	7:43:34 PM	Bypass valve closed
10/4/2011	7:43:34 PM	Bubbler valve closed
10/4/2011	7:43:34 PM	Helium valve opened
10/4/2011	7:43:34 PM	Main Vac valve opened
10/4/2011	7:43:34 PM	Helium MFC set to  20.000000
10/4/2011	7:43:34 PM	H2 MFC set to  0.000000
10/4/2011	7:43:34 PM	BCl3 MFC set to  0.000000
10/4/2011	7:43:34 PM	PHl3 MFC set to  0.000000
10/4/2011	7:43:34 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:43:34 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:43:34 PM	Tube furnace set to 150
10/4/2011	7:44:04 PM	Helium valve closed
10/4/2011	7:44:04 PM	H2 valve closed
10/4/2011	7:44:04 PM	BCl3 valve closed
10/4/2011	7:44:04 PM	PH3 valve closed
10/4/2011	7:44:04 PM	SiCl4 pre valve closed
10/4/2011	7:44:04 PM	SiCl4 post valve closed
10/4/2011	7:44:04 PM	Bypass valve closed
10/4/2011	7:44:04 PM	Bubbler valve closed
10/4/2011	7:44:04 PM	Main Vac valve opened
10/4/2011	7:44:04 PM	Helium MFC set to  0.000000
10/4/2011	7:44:04 PM	H2 MFC set to  0.000000
10/4/2011	7:44:04 PM	BCl3 MFC set to  0.000000
10/4/2011	7:44:04 PM	PHl3 MFC set to  0.000000
10/4/2011	7:44:04 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:44:04 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:44:04 PM	Tube furnace set to 150
10/4/2011	7:44:34 PM	H2 valve closed
10/4/2011	7:44:34 PM	BCl3 valve closed
10/4/2011	7:44:34 PM	PH3 valve closed
10/4/2011	7:44:34 PM	SiCl4 pre valve closed
10/4/2011	7:44:34 PM	SiCl4 post valve closed
10/4/2011	7:44:34 PM	Bypass valve closed
10/4/2011	7:44:34 PM	Bubbler valve closed
10/4/2011	7:44:34 PM	Helium valve opened
10/4/2011	7:44:34 PM	Main Vac valve opened
10/4/2011	7:44:34 PM	Helium MFC set to  20.000000
10/4/2011	7:44:34 PM	H2 MFC set to  0.000000
10/4/2011	7:44:34 PM	BCl3 MFC set to  0.000000
10/4/2011	7:44:34 PM	PHl3 MFC set to  0.000000
10/4/2011	7:44:34 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:44:34 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:44:34 PM	Tube furnace set to 150
10/4/2011	7:45:04 PM	Helium valve closed
10/4/2011	7:45:04 PM	H2 valve closed
10/4/2011	7:45:04 PM	BCl3 valve closed
10/4/2011	7:45:04 PM	PH3 valve closed
10/4/2011	7:45:04 PM	SiCl4 pre valve closed
10/4/2011	7:45:04 PM	SiCl4 post valve closed
10/4/2011	7:45:04 PM	Bypass valve closed
10/4/2011	7:45:04 PM	Bubbler valve closed
10/4/2011	7:45:04 PM	Main Vac valve opened
10/4/2011	7:45:04 PM	Helium MFC set to  0.000000
10/4/2011	7:45:04 PM	H2 MFC set to  0.000000
10/4/2011	7:45:04 PM	BCl3 MFC set to  0.000000
10/4/2011	7:45:04 PM	PHl3 MFC set to  0.000000
10/4/2011	7:45:04 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:45:04 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:45:04 PM	Tube furnace set to 150
10/4/2011	7:45:34 PM	H2 valve closed
10/4/2011	7:45:34 PM	BCl3 valve closed
10/4/2011	7:45:34 PM	PH3 valve closed
10/4/2011	7:45:34 PM	SiCl4 pre valve closed
10/4/2011	7:45:35 PM	SiCl4 post valve closed
10/4/2011	7:45:35 PM	Bypass valve closed
10/4/2011	7:45:35 PM	Bubbler valve closed
10/4/2011	7:45:35 PM	Helium valve opened
10/4/2011	7:45:35 PM	Main Vac valve opened
10/4/2011	7:45:35 PM	Helium MFC set to  20.000000
10/4/2011	7:45:35 PM	H2 MFC set to  0.000000
10/4/2011	7:45:35 PM	BCl3 MFC set to  0.000000
10/4/2011	7:45:35 PM	PHl3 MFC set to  0.000000
10/4/2011	7:45:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:45:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:45:35 PM	Tube furnace set to 150
10/4/2011	7:46:05 PM	Helium valve closed
10/4/2011	7:46:05 PM	H2 valve closed
10/4/2011	7:46:05 PM	BCl3 valve closed
10/4/2011	7:46:05 PM	PH3 valve closed
10/4/2011	7:46:05 PM	SiCl4 pre valve closed
10/4/2011	7:46:05 PM	SiCl4 post valve closed
10/4/2011	7:46:05 PM	Bypass valve closed
10/4/2011	7:46:05 PM	Bubbler valve closed
10/4/2011	7:46:05 PM	Main Vac valve opened
10/4/2011	7:46:05 PM	Helium MFC set to  0.000000
10/4/2011	7:46:05 PM	H2 MFC set to  0.000000
10/4/2011	7:46:05 PM	BCl3 MFC set to  0.000000
10/4/2011	7:46:05 PM	PHl3 MFC set to  0.000000
10/4/2011	7:46:05 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:46:05 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:46:05 PM	Tube furnace set to 150
10/4/2011	7:46:35 PM	H2 valve closed
10/4/2011	7:46:35 PM	BCl3 valve closed
10/4/2011	7:46:35 PM	PH3 valve closed
10/4/2011	7:46:35 PM	SiCl4 pre valve closed
10/4/2011	7:46:35 PM	SiCl4 post valve closed
10/4/2011	7:46:35 PM	Bypass valve closed
10/4/2011	7:46:35 PM	Bubbler valve closed
10/4/2011	7:46:35 PM	Helium valve opened
10/4/2011	7:46:35 PM	Main Vac valve opened
10/4/2011	7:46:35 PM	Helium MFC set to  20.000000
10/4/2011	7:46:35 PM	H2 MFC set to  0.000000
10/4/2011	7:46:35 PM	BCl3 MFC set to  0.000000
10/4/2011	7:46:35 PM	PHl3 MFC set to  0.000000
10/4/2011	7:46:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:46:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:46:35 PM	Tube furnace set to 150
10/4/2011	7:47:05 PM	Helium valve closed
10/4/2011	7:47:05 PM	H2 valve closed
10/4/2011	7:47:05 PM	BCl3 valve closed
10/4/2011	7:47:05 PM	PH3 valve closed
10/4/2011	7:47:05 PM	SiCl4 pre valve closed
10/4/2011	7:47:05 PM	SiCl4 post valve closed
10/4/2011	7:47:05 PM	Bypass valve closed
10/4/2011	7:47:05 PM	Bubbler valve closed
10/4/2011	7:47:05 PM	Main Vac valve opened
10/4/2011	7:47:05 PM	Helium MFC set to  0.000000
10/4/2011	7:47:05 PM	H2 MFC set to  0.000000
10/4/2011	7:47:05 PM	BCl3 MFC set to  0.000000
10/4/2011	7:47:05 PM	PHl3 MFC set to  0.000000
10/4/2011	7:47:05 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:47:05 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:47:05 PM	Tube furnace set to 150
10/4/2011	7:47:35 PM	H2 valve closed
10/4/2011	7:47:35 PM	BCl3 valve closed
10/4/2011	7:47:35 PM	PH3 valve closed
10/4/2011	7:47:35 PM	SiCl4 pre valve closed
10/4/2011	7:47:35 PM	SiCl4 post valve closed
10/4/2011	7:47:35 PM	Bypass valve closed
10/4/2011	7:47:35 PM	Bubbler valve closed
10/4/2011	7:47:35 PM	Helium valve opened
10/4/2011	7:47:35 PM	Main Vac valve opened
10/4/2011	7:47:35 PM	Helium MFC set to  20.000000
10/4/2011	7:47:35 PM	H2 MFC set to  0.000000
10/4/2011	7:47:35 PM	BCl3 MFC set to  0.000000
10/4/2011	7:47:35 PM	PHl3 MFC set to  0.000000
10/4/2011	7:47:35 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:47:35 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:47:36 PM	Tube furnace set to 150
10/4/2011	7:48:06 PM	Helium valve closed
10/4/2011	7:48:06 PM	H2 valve closed
10/4/2011	7:48:06 PM	BCl3 valve closed
10/4/2011	7:48:06 PM	PH3 valve closed
10/4/2011	7:48:06 PM	SiCl4 pre valve closed
10/4/2011	7:48:06 PM	SiCl4 post valve closed
10/4/2011	7:48:06 PM	Bypass valve closed
10/4/2011	7:48:06 PM	Bubbler valve closed
10/4/2011	7:48:06 PM	Main Vac valve opened
10/4/2011	7:48:06 PM	Helium MFC set to  0.000000
10/4/2011	7:48:06 PM	H2 MFC set to  0.000000
10/4/2011	7:48:06 PM	BCl3 MFC set to  0.000000
10/4/2011	7:48:06 PM	PHl3 MFC set to  0.000000
10/4/2011	7:48:06 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:48:06 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:48:06 PM	Tube furnace set to 150
10/4/2011	7:48:36 PM	H2 valve closed
10/4/2011	7:48:36 PM	BCl3 valve closed
10/4/2011	7:48:36 PM	PH3 valve closed
10/4/2011	7:48:36 PM	SiCl4 pre valve closed
10/4/2011	7:48:36 PM	SiCl4 post valve closed
10/4/2011	7:48:36 PM	Bypass valve closed
10/4/2011	7:48:36 PM	Bubbler valve closed
10/4/2011	7:48:36 PM	Helium valve opened
10/4/2011	7:48:36 PM	Main Vac valve opened
10/4/2011	7:48:36 PM	Helium MFC set to  20.000000
10/4/2011	7:48:36 PM	H2 MFC set to  0.000000
10/4/2011	7:48:36 PM	BCl3 MFC set to  0.000000
10/4/2011	7:48:36 PM	PHl3 MFC set to  0.000000
10/4/2011	7:48:36 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:48:36 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:48:36 PM	Tube furnace set to 150
10/4/2011	7:49:06 PM	Helium valve closed
10/4/2011	7:49:06 PM	H2 valve closed
10/4/2011	7:49:06 PM	BCl3 valve closed
10/4/2011	7:49:06 PM	PH3 valve closed
10/4/2011	7:49:06 PM	SiCl4 pre valve closed
10/4/2011	7:49:06 PM	SiCl4 post valve closed
10/4/2011	7:49:06 PM	Bypass valve closed
10/4/2011	7:49:06 PM	Bubbler valve closed
10/4/2011	7:49:06 PM	Main Vac valve opened
10/4/2011	7:49:06 PM	Helium MFC set to  0.000000
10/4/2011	7:49:06 PM	H2 MFC set to  0.000000
10/4/2011	7:49:06 PM	BCl3 MFC set to  0.000000
10/4/2011	7:49:06 PM	PHl3 MFC set to  0.000000
10/4/2011	7:49:06 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:49:06 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:49:06 PM	Tube furnace set to 150
10/4/2011	7:49:36 PM	H2 valve closed
10/4/2011	7:49:36 PM	BCl3 valve closed
10/4/2011	7:49:36 PM	PH3 valve closed
10/4/2011	7:49:36 PM	SiCl4 pre valve closed
10/4/2011	7:49:36 PM	SiCl4 post valve closed
10/4/2011	7:49:36 PM	Bypass valve closed
10/4/2011	7:49:36 PM	Bubbler valve closed
10/4/2011	7:49:36 PM	Helium valve opened
10/4/2011	7:49:36 PM	Main Vac valve opened
10/4/2011	7:49:36 PM	Helium MFC set to  20.000000
10/4/2011	7:49:36 PM	H2 MFC set to  0.000000
10/4/2011	7:49:36 PM	BCl3 MFC set to  0.000000
10/4/2011	7:49:36 PM	PHl3 MFC set to  0.000000
10/4/2011	7:49:36 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:49:36 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:49:36 PM	Tube furnace set to 150
10/4/2011	7:50:06 PM	Helium valve closed
10/4/2011	7:50:06 PM	H2 valve closed
10/4/2011	7:50:06 PM	BCl3 valve closed
10/4/2011	7:50:06 PM	PH3 valve closed
10/4/2011	7:50:06 PM	SiCl4 pre valve closed
10/4/2011	7:50:06 PM	SiCl4 post valve closed
10/4/2011	7:50:06 PM	Bypass valve closed
10/4/2011	7:50:06 PM	Bubbler valve closed
10/4/2011	7:50:06 PM	Main Vac valve opened
10/4/2011	7:50:06 PM	Helium MFC set to  0.000000
10/4/2011	7:50:06 PM	H2 MFC set to  0.000000
10/4/2011	7:50:06 PM	BCl3 MFC set to  0.000000
10/4/2011	7:50:06 PM	PHl3 MFC set to  0.000000
10/4/2011	7:50:06 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:50:06 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:50:07 PM	Tube furnace set to 150
10/4/2011	7:50:37 PM	H2 valve closed
10/4/2011	7:50:37 PM	BCl3 valve closed
10/4/2011	7:50:37 PM	PH3 valve closed
10/4/2011	7:50:37 PM	SiCl4 pre valve closed
10/4/2011	7:50:37 PM	SiCl4 post valve closed
10/4/2011	7:50:37 PM	Bypass valve closed
10/4/2011	7:50:37 PM	Bubbler valve closed
10/4/2011	7:50:37 PM	Helium valve opened
10/4/2011	7:50:37 PM	Main Vac valve opened
10/4/2011	7:50:37 PM	Helium MFC set to  20.000000
10/4/2011	7:50:37 PM	H2 MFC set to  0.000000
10/4/2011	7:50:37 PM	BCl3 MFC set to  0.000000
10/4/2011	7:50:37 PM	PHl3 MFC set to  0.000000
10/4/2011	7:50:37 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:50:37 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:50:37 PM	Tube furnace set to 150
10/4/2011	7:51:07 PM	Helium valve closed
10/4/2011	7:51:07 PM	H2 valve closed
10/4/2011	7:51:07 PM	BCl3 valve closed
10/4/2011	7:51:07 PM	PH3 valve closed
10/4/2011	7:51:07 PM	SiCl4 pre valve closed
10/4/2011	7:51:07 PM	SiCl4 post valve closed
10/4/2011	7:51:07 PM	Bypass valve closed
10/4/2011	7:51:07 PM	Bubbler valve closed
10/4/2011	7:51:07 PM	Main Vac valve opened
10/4/2011	7:51:07 PM	Helium MFC set to  0.000000
10/4/2011	7:51:07 PM	H2 MFC set to  0.000000
10/4/2011	7:51:07 PM	BCl3 MFC set to  0.000000
10/4/2011	7:51:07 PM	PHl3 MFC set to  0.000000
10/4/2011	7:51:07 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:51:07 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:51:07 PM	Tube furnace set to 150
10/4/2011	7:51:37 PM	H2 valve closed
10/4/2011	7:51:37 PM	BCl3 valve closed
10/4/2011	7:51:37 PM	PH3 valve closed
10/4/2011	7:51:37 PM	SiCl4 pre valve closed
10/4/2011	7:51:37 PM	SiCl4 post valve closed
10/4/2011	7:51:37 PM	Bypass valve closed
10/4/2011	7:51:37 PM	Bubbler valve closed
10/4/2011	7:51:37 PM	Helium valve opened
10/4/2011	7:51:37 PM	Main Vac valve opened
10/4/2011	7:51:37 PM	Helium MFC set to  20.000000
10/4/2011	7:51:37 PM	H2 MFC set to  0.000000
10/4/2011	7:51:37 PM	BCl3 MFC set to  0.000000
10/4/2011	7:51:37 PM	PHl3 MFC set to  0.000000
10/4/2011	7:51:37 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:51:37 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:51:37 PM	Tube furnace set to 150
10/4/2011	7:52:07 PM	Helium valve closed
10/4/2011	7:52:07 PM	H2 valve closed
10/4/2011	7:52:07 PM	BCl3 valve closed
10/4/2011	7:52:07 PM	PH3 valve closed
10/4/2011	7:52:07 PM	SiCl4 pre valve closed
10/4/2011	7:52:07 PM	SiCl4 post valve closed
10/4/2011	7:52:07 PM	Bypass valve closed
10/4/2011	7:52:07 PM	Bubbler valve closed
10/4/2011	7:52:07 PM	Main Vac valve opened
10/4/2011	7:52:07 PM	Helium MFC set to  0.000000
10/4/2011	7:52:07 PM	H2 MFC set to  0.000000
10/4/2011	7:52:07 PM	BCl3 MFC set to  0.000000
10/4/2011	7:52:07 PM	PHl3 MFC set to  0.000000
10/4/2011	7:52:07 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:52:07 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:52:07 PM	Tube furnace set to 150
10/4/2011	7:52:38 PM	H2 valve closed
10/4/2011	7:52:38 PM	BCl3 valve closed
10/4/2011	7:52:38 PM	PH3 valve closed
10/4/2011	7:52:38 PM	SiCl4 pre valve closed
10/4/2011	7:52:38 PM	SiCl4 post valve closed
10/4/2011	7:52:38 PM	Bypass valve closed
10/4/2011	7:52:38 PM	Bubbler valve closed
10/4/2011	7:52:38 PM	Helium valve opened
10/4/2011	7:52:38 PM	Main Vac valve opened
10/4/2011	7:52:38 PM	Helium MFC set to  20.000000
10/4/2011	7:52:38 PM	H2 MFC set to  0.000000
10/4/2011	7:52:38 PM	BCl3 MFC set to  0.000000
10/4/2011	7:52:38 PM	PHl3 MFC set to  0.000000
10/4/2011	7:52:38 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:52:38 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:52:38 PM	Tube furnace set to 150
10/4/2011	7:53:08 PM	Helium valve closed
10/4/2011	7:53:08 PM	H2 valve closed
10/4/2011	7:53:08 PM	BCl3 valve closed
10/4/2011	7:53:08 PM	PH3 valve closed
10/4/2011	7:53:08 PM	SiCl4 pre valve closed
10/4/2011	7:53:08 PM	SiCl4 post valve closed
10/4/2011	7:53:08 PM	Bypass valve closed
10/4/2011	7:53:08 PM	Bubbler valve closed
10/4/2011	7:53:08 PM	Main Vac valve opened
10/4/2011	7:53:08 PM	Helium MFC set to  0.000000
10/4/2011	7:53:08 PM	H2 MFC set to  0.000000
10/4/2011	7:53:08 PM	BCl3 MFC set to  0.000000
10/4/2011	7:53:08 PM	PHl3 MFC set to  0.000000
10/4/2011	7:53:08 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:53:08 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:53:08 PM	Tube furnace set to 150
10/4/2011	7:53:38 PM	H2 valve closed
10/4/2011	7:53:38 PM	BCl3 valve closed
10/4/2011	7:53:38 PM	PH3 valve closed
10/4/2011	7:53:38 PM	SiCl4 pre valve closed
10/4/2011	7:53:38 PM	SiCl4 post valve closed
10/4/2011	7:53:38 PM	Bypass valve closed
10/4/2011	7:53:38 PM	Bubbler valve closed
10/4/2011	7:53:38 PM	Helium valve opened
10/4/2011	7:53:38 PM	Main Vac valve opened
10/4/2011	7:53:38 PM	Helium MFC set to  20.000000
10/4/2011	7:53:38 PM	H2 MFC set to  0.000000
10/4/2011	7:53:38 PM	BCl3 MFC set to  0.000000
10/4/2011	7:53:38 PM	PHl3 MFC set to  0.000000
10/4/2011	7:53:38 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:53:38 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:53:38 PM	Tube furnace set to 150
10/4/2011	7:54:08 PM	Helium valve closed
10/4/2011	7:54:08 PM	H2 valve closed
10/4/2011	7:54:08 PM	BCl3 valve closed
10/4/2011	7:54:08 PM	PH3 valve closed
10/4/2011	7:54:08 PM	SiCl4 pre valve closed
10/4/2011	7:54:08 PM	SiCl4 post valve closed
10/4/2011	7:54:08 PM	Bypass valve closed
10/4/2011	7:54:08 PM	Bubbler valve closed
10/4/2011	7:54:08 PM	Main Vac valve opened
10/4/2011	7:54:08 PM	Helium MFC set to  0.000000
10/4/2011	7:54:08 PM	H2 MFC set to  0.000000
10/4/2011	7:54:08 PM	BCl3 MFC set to  0.000000
10/4/2011	7:54:08 PM	PHl3 MFC set to  0.000000
10/4/2011	7:54:08 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:54:08 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:54:08 PM	Tube furnace set to 150
10/4/2011	7:54:38 PM	H2 valve closed
10/4/2011	7:54:38 PM	BCl3 valve closed
10/4/2011	7:54:38 PM	PH3 valve closed
10/4/2011	7:54:38 PM	SiCl4 pre valve closed
10/4/2011	7:54:38 PM	SiCl4 post valve closed
10/4/2011	7:54:38 PM	Bypass valve closed
10/4/2011	7:54:38 PM	Bubbler valve closed
10/4/2011	7:54:38 PM	Helium valve opened
10/4/2011	7:54:38 PM	Main Vac valve opened
10/4/2011	7:54:38 PM	Helium MFC set to  20.000000
10/4/2011	7:54:38 PM	H2 MFC set to  0.000000
10/4/2011	7:54:38 PM	BCl3 MFC set to  0.000000
10/4/2011	7:54:38 PM	PHl3 MFC set to  0.000000
10/4/2011	7:54:38 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:54:38 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:54:39 PM	Tube furnace set to 150
10/4/2011	7:55:09 PM	Helium valve closed
10/4/2011	7:55:09 PM	H2 valve closed
10/4/2011	7:55:09 PM	BCl3 valve closed
10/4/2011	7:55:09 PM	PH3 valve closed
10/4/2011	7:55:09 PM	SiCl4 pre valve closed
10/4/2011	7:55:09 PM	SiCl4 post valve closed
10/4/2011	7:55:09 PM	Bypass valve closed
10/4/2011	7:55:09 PM	Bubbler valve closed
10/4/2011	7:55:09 PM	Main Vac valve opened
10/4/2011	7:55:09 PM	Helium MFC set to  0.000000
10/4/2011	7:55:09 PM	H2 MFC set to  0.000000
10/4/2011	7:55:09 PM	BCl3 MFC set to  0.000000
10/4/2011	7:55:09 PM	PHl3 MFC set to  0.000000
10/4/2011	7:55:09 PM	SiCl4 MFC set to  0.000000
10/4/2011	7:55:09 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	7:55:09 PM	Tube furnace set to 180
10/4/2011	7:55:14 PM	Run finished at 7:55 PM
10/4/2011	8:47:13 PM	Main Vac valve closed
10/4/2011	8:47:18 PM	Main Vac valve opened
10/4/2011	8:47:41 PM	Main Vac valve closed
10/4/2011	8:47:46 PM	Main Vac valve opened
10/4/2011	8:48:10 PM	Recipe started at 8:48 PM
10/4/2011	8:48:10 PM	Helium valve closed
10/4/2011	8:48:10 PM	H2 valve closed
10/4/2011	8:48:10 PM	BCl3 valve closed
10/4/2011	8:48:10 PM	PH3 valve closed
10/4/2011	8:48:10 PM	SiCl4 pre valve closed
10/4/2011	8:48:10 PM	SiCl4 post valve closed
10/4/2011	8:48:10 PM	Main Vac valve closed
10/4/2011	8:48:10 PM	Bypass valve closed
10/4/2011	8:48:10 PM	Bubbler valve closed
10/4/2011	8:48:10 PM	Helium MFC set to  0.000000
10/4/2011	8:48:10 PM	H2 MFC set to  0.000000
10/4/2011	8:48:10 PM	BCl3 MFC set to  0.000000
10/4/2011	8:48:10 PM	PHl3 MFC set to  0.000000
10/4/2011	8:48:10 PM	SiCl4 MFC set to  0.000000
10/4/2011	8:48:10 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	8:48:10 PM	Tube furnace set to 0
10/4/2011	8:48:14 PM	Helium valve closed
10/4/2011	8:48:14 PM	BCl3 valve closed
10/4/2011	8:48:14 PM	PH3 valve closed
10/4/2011	8:48:14 PM	SiCl4 pre valve closed
10/4/2011	8:48:14 PM	SiCl4 post valve closed
10/4/2011	8:48:14 PM	Main Vac valve closed
10/4/2011	8:48:14 PM	Bypass valve closed
10/4/2011	8:48:14 PM	Bubbler valve closed
10/4/2011	8:48:14 PM	H2 valve opened
10/4/2011	8:48:14 PM	Helium MFC set to  0.000000
10/4/2011	8:48:14 PM	H2 MFC set to  500.000000
10/4/2011	8:48:14 PM	BCl3 MFC set to  0.000000
10/4/2011	8:48:14 PM	PHl3 MFC set to  0.000000
10/4/2011	8:48:14 PM	SiCl4 MFC set to  0.000000
10/4/2011	8:48:14 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	8:48:14 PM	Tube furnace set to 0
10/4/2011	8:49:18 PM	Helium valve closed
10/4/2011	8:49:18 PM	BCl3 valve closed
10/4/2011	8:49:18 PM	PH3 valve closed
10/4/2011	8:49:18 PM	SiCl4 pre valve closed
10/4/2011	8:49:18 PM	SiCl4 post valve closed
10/4/2011	8:49:18 PM	Main Vac valve closed
10/4/2011	8:49:18 PM	Bypass valve closed
10/4/2011	8:49:18 PM	H2 valve opened
10/4/2011	8:49:18 PM	Bubbler valve opened
10/4/2011	8:49:18 PM	Helium MFC set to  0.000000
10/4/2011	8:49:18 PM	H2 MFC set to  500.000000
10/4/2011	8:49:18 PM	BCl3 MFC set to  0.000000
10/4/2011	8:49:18 PM	PHl3 MFC set to  0.000000
10/4/2011	8:49:18 PM	SiCl4 MFC set to  0.000000
10/4/2011	8:49:18 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	8:49:18 PM	Tube furnace set to 0
10/4/2011	8:49:19 PM	Helium valve closed
10/4/2011	8:49:19 PM	BCl3 valve closed
10/4/2011	8:49:19 PM	PH3 valve closed
10/4/2011	8:49:19 PM	SiCl4 pre valve closed
10/4/2011	8:49:19 PM	SiCl4 post valve closed
10/4/2011	8:49:19 PM	Main Vac valve closed
10/4/2011	8:49:19 PM	Bypass valve closed
10/4/2011	8:49:19 PM	H2 valve opened
10/4/2011	8:49:19 PM	Bubbler valve opened
10/4/2011	8:49:19 PM	Helium MFC set to  0.000000
10/4/2011	8:49:19 PM	H2 MFC set to  500.000000
10/4/2011	8:49:19 PM	BCl3 MFC set to  0.000000
10/4/2011	8:49:19 PM	PHl3 MFC set to  0.000000
10/4/2011	8:49:19 PM	SiCl4 MFC set to  0.000000
10/4/2011	8:49:19 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	8:49:19 PM	Tube furnace set to 950
10/4/2011	9:04:19 PM	Helium valve closed
10/4/2011	9:04:19 PM	PH3 valve closed
10/4/2011	9:04:19 PM	SiCl4 pre valve closed
10/4/2011	9:04:19 PM	SiCl4 post valve closed
10/4/2011	9:04:19 PM	Main Vac valve closed
10/4/2011	9:04:19 PM	Bypass valve closed
10/4/2011	9:04:19 PM	H2 valve opened
10/4/2011	9:04:19 PM	BCl3 valve opened
10/4/2011	9:04:19 PM	Bubbler valve opened
10/4/2011	9:04:19 PM	Helium MFC set to  0.000000
10/4/2011	9:04:19 PM	H2 MFC set to  500.000000
10/4/2011	9:04:19 PM	BCl3 MFC set to  35.000000
10/4/2011	9:04:19 PM	PHl3 MFC set to  0.000000
10/4/2011	9:04:19 PM	SiCl4 MFC set to  0.000000
10/4/2011	9:04:19 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	9:04:20 PM	Tube furnace set to 950
10/4/2011	9:34:20 PM	Helium valve closed
10/4/2011	9:34:20 PM	BCl3 valve closed
10/4/2011	9:34:20 PM	PH3 valve closed
10/4/2011	9:34:20 PM	SiCl4 pre valve closed
10/4/2011	9:34:20 PM	SiCl4 post valve closed
10/4/2011	9:34:20 PM	Main Vac valve closed
10/4/2011	9:34:20 PM	Bypass valve closed
10/4/2011	9:34:20 PM	H2 valve opened
10/4/2011	9:34:20 PM	Bubbler valve opened
10/4/2011	9:34:20 PM	Helium MFC set to  0.000000
10/4/2011	9:34:20 PM	H2 MFC set to  500.000000
10/4/2011	9:34:20 PM	BCl3 MFC set to  0.000000
10/4/2011	9:34:20 PM	PHl3 MFC set to  0.000000
10/4/2011	9:34:20 PM	SiCl4 MFC set to  0.000000
10/4/2011	9:34:20 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	9:34:20 PM	Tube furnace set to 750
10/4/2011	9:39:20 PM	H2 valve closed
10/4/2011	9:39:20 PM	BCl3 valve closed
10/4/2011	9:39:20 PM	PH3 valve closed
10/4/2011	9:39:20 PM	SiCl4 pre valve closed
10/4/2011	9:39:20 PM	SiCl4 post valve closed
10/4/2011	9:39:20 PM	Main Vac valve closed
10/4/2011	9:39:20 PM	Bypass valve closed
10/4/2011	9:39:20 PM	Helium valve opened
10/4/2011	9:39:20 PM	Bubbler valve opened
10/4/2011	9:39:20 PM	Helium MFC set to  500.000000
10/4/2011	9:39:20 PM	H2 MFC set to  0.000000
10/4/2011	9:39:20 PM	BCl3 MFC set to  0.000000
10/4/2011	9:39:20 PM	PHl3 MFC set to  0.000000
10/4/2011	9:39:20 PM	SiCl4 MFC set to  0.000000
10/4/2011	9:39:20 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	9:39:20 PM	Tube furnace set to 0
10/4/2011	9:59:20 PM	Helium valve closed
10/4/2011	9:59:20 PM	H2 valve closed
10/4/2011	9:59:20 PM	BCl3 valve closed
10/4/2011	9:59:20 PM	PH3 valve closed
10/4/2011	9:59:20 PM	SiCl4 pre valve closed
10/4/2011	9:59:20 PM	SiCl4 post valve closed
10/4/2011	9:59:20 PM	Main Vac valve closed
10/4/2011	9:59:20 PM	Bypass valve closed
10/4/2011	9:59:20 PM	Bubbler valve closed
10/4/2011	9:59:20 PM	Helium MFC set to  0.000000
10/4/2011	9:59:20 PM	H2 MFC set to  0.000000
10/4/2011	9:59:20 PM	BCl3 MFC set to  0.000000
10/4/2011	9:59:20 PM	PHl3 MFC set to  0.000000
10/4/2011	9:59:20 PM	SiCl4 MFC set to  0.000000
10/4/2011	9:59:20 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	9:59:20 PM	Tube furnace set to 0
10/4/2011	9:59:21 PM	Run finished at 9:59 PM
10/4/2011	11:27:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2011	11:27:58 PM	Recipe started at 11:27 PM
10/4/2011	11:27:58 PM	Helium valve closed
10/4/2011	11:27:58 PM	H2 valve closed
10/4/2011	11:27:58 PM	BCl3 valve closed
10/4/2011	11:27:58 PM	PH3 valve closed
10/4/2011	11:27:58 PM	SiCl4 pre valve closed
10/4/2011	11:27:58 PM	SiCl4 post valve closed
10/4/2011	11:27:58 PM	Main Vac valve closed
10/4/2011	11:27:58 PM	Bypass valve closed
10/4/2011	11:27:58 PM	Bubbler valve closed
10/4/2011	11:27:58 PM	Helium MFC set to  0.000000
10/4/2011	11:27:58 PM	H2 MFC set to  0.000000
10/4/2011	11:27:58 PM	BCl3 MFC set to  0.000000
10/4/2011	11:27:58 PM	PHl3 MFC set to  0.000000
10/4/2011	11:27:58 PM	SiCl4 MFC set to  0.000000
10/4/2011	11:27:58 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	11:27:58 PM	Tube furnace set to 0
10/4/2011	11:28:01 PM	H2 valve closed
10/4/2011	11:28:01 PM	BCl3 valve closed
10/4/2011	11:28:01 PM	PH3 valve closed
10/4/2011	11:28:01 PM	SiCl4 pre valve closed
10/4/2011	11:28:01 PM	SiCl4 post valve closed
10/4/2011	11:28:01 PM	Main Vac valve closed
10/4/2011	11:28:01 PM	Bypass valve closed
10/4/2011	11:28:01 PM	Bubbler valve closed
10/4/2011	11:28:01 PM	Helium valve opened
10/4/2011	11:28:01 PM	Helium MFC set to  500.000000
10/4/2011	11:28:01 PM	H2 MFC set to  0.000000
10/4/2011	11:28:01 PM	BCl3 MFC set to  0.000000
10/4/2011	11:28:01 PM	PHl3 MFC set to  0.000000
10/4/2011	11:28:01 PM	SiCl4 MFC set to  0.000000
10/4/2011	11:28:01 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	11:28:01 PM	Tube furnace set to 0
10/4/2011	11:28:05 PM	Helium valve closed
10/4/2011	11:28:05 PM	H2 valve closed
10/4/2011	11:28:05 PM	BCl3 valve closed
10/4/2011	11:28:05 PM	PH3 valve closed
10/4/2011	11:28:05 PM	SiCl4 pre valve closed
10/4/2011	11:28:05 PM	SiCl4 post valve closed
10/4/2011	11:28:05 PM	Main Vac valve closed
10/4/2011	11:28:05 PM	Bypass valve closed
10/4/2011	11:28:05 PM	Bubbler valve closed
10/4/2011	11:28:05 PM	Helium MFC set to  0.000000
10/4/2011	11:28:05 PM	H2 MFC set to  0.000000
10/4/2011	11:28:05 PM	BCl3 MFC set to  0.000000
10/4/2011	11:28:05 PM	PHl3 MFC set to  0.000000
10/4/2011	11:28:05 PM	SiCl4 MFC set to  0.000000
10/4/2011	11:28:05 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	11:28:05 PM	Tube furnace set to 0
10/4/2011	11:28:06 PM	Run finished at 11:28 PM
10/4/2011	11:28:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2011	11:31:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2011	11:31:56 PM	Recipe started at 11:31 PM
10/4/2011	11:31:56 PM	Helium valve closed
10/4/2011	11:31:56 PM	H2 valve closed
10/4/2011	11:31:56 PM	BCl3 valve closed
10/4/2011	11:31:56 PM	PH3 valve closed
10/4/2011	11:31:56 PM	SiCl4 pre valve closed
10/4/2011	11:31:56 PM	SiCl4 post valve closed
10/4/2011	11:31:56 PM	Main Vac valve closed
10/4/2011	11:31:56 PM	Bubbler valve closed
10/4/2011	11:31:56 PM	Bypass valve opened
10/4/2011	11:31:56 PM	Helium MFC set to  0.000000
10/4/2011	11:31:56 PM	H2 MFC set to  0.000000
10/4/2011	11:31:56 PM	BCl3 MFC set to  0.000000
10/4/2011	11:31:56 PM	PHl3 MFC set to  0.000000
10/4/2011	11:31:56 PM	SiCl4 MFC set to  0.000000
10/4/2011	11:31:56 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	11:31:57 PM	Tube furnace set to 0
10/4/2011	11:33:00 PM	Helium valve closed
10/4/2011	11:33:00 PM	H2 valve closed
10/4/2011	11:33:00 PM	BCl3 valve closed
10/4/2011	11:33:00 PM	PH3 valve closed
10/4/2011	11:33:00 PM	SiCl4 pre valve closed
10/4/2011	11:33:00 PM	SiCl4 post valve closed
10/4/2011	11:33:00 PM	Main Vac valve closed
10/4/2011	11:33:00 PM	Bubbler valve closed
10/4/2011	11:33:00 PM	Bypass valve opened
10/4/2011	11:33:00 PM	Helium MFC set to  0.000000
10/4/2011	11:33:00 PM	H2 MFC set to  0.000000
10/4/2011	11:33:00 PM	BCl3 MFC set to  0.000000
10/4/2011	11:33:00 PM	PHl3 MFC set to  0.000000
10/4/2011	11:33:00 PM	SiCl4 MFC set to  0.000000
10/4/2011	11:33:00 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	11:33:00 PM	Tube furnace set to 0
10/4/2011	11:34:00 PM	Helium valve closed
10/4/2011	11:34:00 PM	H2 valve closed
10/4/2011	11:34:00 PM	BCl3 valve closed
10/4/2011	11:34:00 PM	PH3 valve closed
10/4/2011	11:34:00 PM	SiCl4 pre valve closed
10/4/2011	11:34:00 PM	SiCl4 post valve closed
10/4/2011	11:34:00 PM	Bypass valve closed
10/4/2011	11:34:00 PM	Bubbler valve closed
10/4/2011	11:34:00 PM	Main Vac valve opened
10/4/2011	11:34:00 PM	Helium MFC set to  0.000000
10/4/2011	11:34:00 PM	H2 MFC set to  0.000000
10/4/2011	11:34:00 PM	BCl3 MFC set to  0.000000
10/4/2011	11:34:00 PM	PHl3 MFC set to  0.000000
10/4/2011	11:34:00 PM	SiCl4 MFC set to  0.000000
10/4/2011	11:34:00 PM	Bypass solenoid MFC set to  0.000000
10/4/2011	11:34:00 PM	Tube furnace set to 0
10/4/2011	11:34:02 PM	Run finished at 11:34 PM
10/4/2011	11:34:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
